FIG. 1 is a front view of a top panel for microwave introduction window of plasma processing apparatus showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a sectional view taken along line 7—7 of FIG. 5;
FIG. 8 is an enlarged view taken along line 8—8 of FIG. 7;
FIG. 9 is an enlarged view taken along line 9—9 of FIG. 7; and,
FIG. 10 is a perspective view thereof.
Tian, Cai Zhong, Kitagawa, Junichi, Ota, Kinya
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