Top panel for microwave introduction window of plasma processing apparatus

Abstract

Description

FIG. 1 is a front view of a top panel for microwave introduction window of plasma processing apparatus showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a right side view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a sectional view taken along line 7—7 of FIG. 5;

FIG. 8 is an enlarged view taken along line 8—8 of FIG. 7;

FIG. 9 is an enlarged view taken along line 9—9 of FIG. 7; and,

FIG. 10 is a perspective view thereof.

Claims

The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as show and described.