| Patent |
Priority |
Assignee |
Title |
| 10801106, |
Dec 15 2016 |
ASM IP Holding B.V. |
Shower plate structure for exhausting deposition inhibiting gas |
| 11274369, |
Sep 11 2018 |
ASM IP Holding B.V. |
Thin film deposition method |
| 11286558, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| 11295980, |
Aug 30 2017 |
ASM IP HOLDING B V |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| 11296189, |
Jun 21 2018 |
ASM IP Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
| 11306395, |
Jun 28 2017 |
ASM IP HOLDING B V |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| 11315794, |
Oct 21 2019 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching films |
| 11339476, |
Oct 08 2019 |
ASM IP Holding B.V. |
Substrate processing device having connection plates, substrate processing method |
| 11342216, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| 11345999, |
Jun 06 2019 |
ASM IP Holding B.V. |
Method of using a gas-phase reactor system including analyzing exhausted gas |
| 11355338, |
May 10 2019 |
ASM IP Holding B.V. |
Method of depositing material onto a surface and structure formed according to the method |
| 11361990, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
| 11378337, |
Mar 28 2019 |
ASM IP Holding B.V. |
Door opener and substrate processing apparatus provided therewith |
| 11387106, |
Feb 14 2018 |
ASM IP Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| 11387120, |
Sep 28 2017 |
ASM IP Holding B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
| 11390945, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
| 11390946, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| 11390950, |
Jan 10 2017 |
ASM IP HOLDING B V |
Reactor system and method to reduce residue buildup during a film deposition process |
| 11393690, |
Jan 19 2018 |
ASM IP HOLDING B V |
Deposition method |
| 11396702, |
Nov 15 2016 |
ASM IP Holding B.V. |
Gas supply unit and substrate processing apparatus including the gas supply unit |
| 11398382, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
| 11401605, |
Nov 26 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11410851, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| 11411088, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| 11414760, |
Oct 08 2018 |
ASM IP Holding B.V. |
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
| 11417545, |
Aug 08 2017 |
ASM IP Holding B.V. |
Radiation shield |
| 11424119, |
Mar 08 2019 |
ASM IP HOLDING B V |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
| 11430640, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11430674, |
Aug 22 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
| 11437241, |
Apr 08 2020 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching silicon oxide films |
| 11443926, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11447861, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| 11447864, |
Apr 19 2019 |
ASM IP Holding B.V. |
Layer forming method and apparatus |
| 11450529, |
Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
| 11453943, |
May 25 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
| 11453946, |
Jun 06 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system including a gas detector |
| 11473195, |
Mar 01 2018 |
ASM IP Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate |
| 11476109, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
| 11482412, |
Jan 19 2018 |
ASM IP HOLDING B V |
Method for depositing a gap-fill layer by plasma-assisted deposition |
| 11482418, |
Feb 20 2018 |
ASM IP Holding B.V. |
Substrate processing method and apparatus |
| 11482533, |
Feb 20 2019 |
ASM IP Holding B.V. |
Apparatus and methods for plug fill deposition in 3-D NAND applications |
| 11488819, |
Dec 04 2018 |
ASM IP Holding B.V. |
Method of cleaning substrate processing apparatus |
| 11488854, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
| 11492703, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11495459, |
Sep 04 2019 |
ASM IP Holding B.V. |
Methods for selective deposition using a sacrificial capping layer |
| 11499222, |
Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11499226, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
| 11501968, |
Nov 15 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for providing a semiconductor device with silicon filled gaps |
| 11501973, |
Jan 16 2018 |
ASM IP Holding B.V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
| 11515187, |
May 01 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Fast FOUP swapping with a FOUP handler |
| 11515188, |
May 16 2019 |
ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
| 11521851, |
Feb 03 2020 |
ASM IP HOLDING B V |
Method of forming structures including a vanadium or indium layer |
| 11527403, |
Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| 11530483, |
Jun 21 2018 |
ASM IP Holding B.V. |
Substrate processing system |
| 11530876, |
Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
| 11532757, |
Oct 27 2016 |
ASM IP Holding B.V. |
Deposition of charge trapping layers |
| 11551912, |
Jan 20 2020 |
ASM IP Holding B.V. |
Method of forming thin film and method of modifying surface of thin film |
| 11551925, |
Apr 01 2019 |
ASM IP Holding B.V. |
Method for manufacturing a semiconductor device |
| 11551960, |
Jan 30 2020 |
Applied Materials, Inc |
Helical plug for reduction or prevention of arcing in a substrate support |
| 11557474, |
Jul 29 2019 |
ASM IP Holding B.V. |
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
| 11562901, |
Sep 25 2019 |
ASM IP Holding B.V. |
Substrate processing method |
| 11572620, |
Nov 06 2018 |
ASM IP Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate |
| 11581186, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus |
| 11581220, |
Aug 30 2017 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
| 11587814, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11587815, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11587821, |
Aug 08 2017 |
ASM IP Holding B.V. |
Substrate lift mechanism and reactor including same |
| 11594450, |
Aug 22 2019 |
ASM IP HOLDING B V |
Method for forming a structure with a hole |
| 11594600, |
Nov 05 2019 |
ASM IP Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same |
| 11605528, |
Jul 09 2019 |
ASM IP Holding B.V. |
Plasma device using coaxial waveguide, and substrate treatment method |
| 11610774, |
Oct 02 2019 |
ASM IP Holding B.V. |
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
| 11610775, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
| 11615970, |
Jul 17 2019 |
ASM IP HOLDING B V |
Radical assist ignition plasma system and method |
| 11615980, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
| 11626308, |
May 13 2020 |
ASM IP Holding B.V. |
Laser alignment fixture for a reactor system |
| 11626316, |
Nov 20 2019 |
ASM IP Holding B.V. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
| 11629407, |
Feb 22 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus and method for processing substrates |
| 11637011, |
Oct 16 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
| 11637014, |
Oct 17 2019 |
ASM IP Holding B.V. |
Methods for selective deposition of doped semiconductor material |
| 11639548, |
Aug 21 2019 |
ASM IP Holding B.V. |
Film-forming material mixed-gas forming device and film forming device |
| 11639811, |
Nov 27 2017 |
ASM IP HOLDING B V |
Apparatus including a clean mini environment |
| 11643724, |
Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
| 11644758, |
Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
| 11646184, |
Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11646197, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 11646204, |
Jun 24 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming a layer provided with silicon |
| 11646205, |
Oct 29 2019 |
ASM IP Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
| 11649546, |
Jul 08 2016 |
ASM IP Holding B.V. |
Organic reactants for atomic layer deposition |
| 11658029, |
Dec 14 2018 |
ASM IP HOLDING B V |
Method of forming a device structure using selective deposition of gallium nitride and system for same |
| 11658035, |
Jun 30 2020 |
ASM IP HOLDING B V |
Substrate processing method |
| 11664199, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
| 11664245, |
Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
| 11664267, |
Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
| 11674220, |
Jul 20 2020 |
ASM IP Holding B.V. |
Method for depositing molybdenum layers using an underlayer |
| 11676812, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top/bottom portions |
| 11680839, |
Aug 05 2019 |
ASM IP Holding B.V. |
Liquid level sensor for a chemical source vessel |
| 11682572, |
Nov 27 2017 |
ASM IP Holdings B.V. |
Storage device for storing wafer cassettes for use with a batch furnace |
| 11685991, |
Feb 14 2018 |
ASM IP HOLDING B V ; Universiteit Gent |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
| 11688603, |
Jul 17 2019 |
ASM IP Holding B.V. |
Methods of forming silicon germanium structures |
| 11694892, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
| 11695054, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
| 11705333, |
May 21 2020 |
ASM IP Holding B.V. |
Structures including multiple carbon layers and methods of forming and using same |
| 11718913, |
Jun 04 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas distribution system and reactor system including same |
| 11725277, |
Jul 20 2011 |
ASM IP HOLDING B V |
Pressure transmitter for a semiconductor processing environment |
| 11725280, |
Aug 26 2020 |
ASM IP Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers |
| 11735414, |
Feb 06 2018 |
ASM IP Holding B.V. |
Method of post-deposition treatment for silicon oxide film |
| 11735422, |
Oct 10 2019 |
ASM IP HOLDING B V |
Method of forming a photoresist underlayer and structure including same |
| 11735445, |
Oct 31 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus for processing substrates |
| 11742189, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
| 11742198, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOCN layer and method of forming same |
| 11746414, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
| 11749562, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
| 11767589, |
May 29 2020 |
ASM IP Holding B.V. |
Substrate processing device |
| 11769670, |
Dec 13 2018 |
ASM IP Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
| 11769682, |
Aug 09 2017 |
ASM IP Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
| 11776846, |
Feb 07 2020 |
ASM IP Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices |
| 11781221, |
May 07 2019 |
ASM IP Holding B.V. |
Chemical source vessel with dip tube |
| 11781243, |
Feb 17 2020 |
ASM IP Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon |
| 11795545, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
| 11798830, |
May 01 2020 |
ASM IP Holding B.V. |
Fast FOUP swapping with a FOUP handler |
| 11798834, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
| 11798999, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
| 11802338, |
Jul 26 2017 |
ASM IP Holding B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
| 11804364, |
May 19 2020 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11804388, |
Sep 11 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
| 11810788, |
Nov 01 2016 |
ASM IP Holding B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
| 11814715, |
Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11814747, |
Apr 24 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
| 11821078, |
Apr 15 2020 |
ASM IP HOLDING B V |
Method for forming precoat film and method for forming silicon-containing film |
| 11823866, |
Apr 02 2020 |
ASM IP Holding B.V. |
Thin film forming method |
| 11823876, |
Sep 05 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus |
| 11827978, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
| 11827981, |
Oct 14 2020 |
ASM IP HOLDING B V |
Method of depositing material on stepped structure |
| 11828707, |
Feb 04 2020 |
ASM IP Holding B.V. |
Method and apparatus for transmittance measurements of large articles |
| 11830730, |
Aug 29 2017 |
ASM IP HOLDING B V |
Layer forming method and apparatus |
| 11830738, |
Apr 03 2020 |
ASM IP Holding B.V. |
Method for forming barrier layer and method for manufacturing semiconductor device |
| 11837494, |
Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
| 11840761, |
Dec 04 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
| 11848200, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
| 11851755, |
Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
| 11866823, |
Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
| 11873557, |
Oct 22 2020 |
ASM IP HOLDING B V |
Method of depositing vanadium metal |
| 11876008, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
| 11876356, |
Mar 11 2020 |
ASM IP Holding B.V. |
Lockout tagout assembly and system and method of using same |
| 11885013, |
Dec 17 2019 |
ASM IP Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
| 11885020, |
Dec 22 2020 |
ASM IP Holding B.V. |
Transition metal deposition method |
| 11885023, |
Oct 01 2018 |
ASM IP Holding B.V. |
Substrate retaining apparatus, system including the apparatus, and method of using same |
| 11887857, |
Apr 24 2020 |
ASM IP Holding B.V. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
| 11891696, |
Nov 30 2020 |
ASM IP Holding B.V. |
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
| 11898242, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film |
| 11898243, |
Apr 24 2020 |
ASM IP Holding B.V. |
Method of forming vanadium nitride-containing layer |
| 11901175, |
Mar 08 2019 |
ASM IP Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
| 11901179, |
Oct 28 2020 |
ASM IP HOLDING B V |
Method and device for depositing silicon onto substrates |
| 11908684, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
| 11908733, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
| 11915929, |
Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
| 11923181, |
Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing |
| 11923190, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
| 11929251, |
Dec 02 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus having electrostatic chuck and substrate processing method |
| 11939673, |
Feb 23 2018 |
ASM IP Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
| 11946137, |
Dec 16 2020 |
ASM IP HOLDING B V |
Runout and wobble measurement fixtures |
| 11952658, |
Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
| 11956977, |
Dec 29 2015 |
ASM IP Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices |
| 11959168, |
Apr 29 2020 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Solid source precursor vessel |
| 11959171, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
| 11961741, |
Mar 12 2020 |
ASM IP Holding B.V. |
Method for fabricating layer structure having target topological profile |
| 11967488, |
Feb 01 2013 |
ASM IP Holding B.V. |
Method for treatment of deposition reactor |
| 11970766, |
Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus |
| 11972944, |
Jan 19 2018 |
ASM IP Holding B.V. |
Method for depositing a gap-fill layer by plasma-assisted deposition |
| 11976359, |
Jan 06 2020 |
ASM IP Holding B.V. |
Gas supply assembly, components thereof, and reactor system including same |
| 11976361, |
Jun 28 2017 |
ASM IP Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
| 11986868, |
Feb 28 2020 |
ASM IP Holding B.V. |
System dedicated for parts cleaning |
| 11987881, |
May 22 2020 |
ASM IP Holding B.V. |
Apparatus for depositing thin films using hydrogen peroxide |
| 11993847, |
Jan 08 2020 |
ASM IP HOLDING B V |
Injector |
| 11996289, |
Apr 16 2020 |
ASM IP HOLDING B V |
Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
| 11996292, |
Oct 25 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| 11996304, |
Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
| 11996309, |
May 16 2019 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
| 12055863, |
Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
| 12057314, |
May 15 2020 |
ASM IP Holding B.V. |
Methods for silicon germanium uniformity control using multiple precursors |
| 12068154, |
Apr 13 2020 |
ASM IP Holding B.V. |
Method of forming a nitrogen-containing carbon film and system for performing the method |
| 12074022, |
Aug 27 2020 |
ASM IP Holding B.V. |
Method and system for forming patterned structures using multiple patterning process |
| 12087586, |
Apr 15 2020 |
ASM IP HOLDING B V |
Method of forming chromium nitride layer and structure including the chromium nitride layer |
| 12106944, |
Jun 02 2020 |
ASM IP Holding B.V. |
Rotating substrate support |
| 12106965, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
| 12107000, |
Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
| 12107005, |
Oct 06 2020 |
ASM IP Holding B.V. |
Deposition method and an apparatus for depositing a silicon-containing material |
| 12112940, |
Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
| 12119220, |
Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
| 12119228, |
Jan 19 2018 |
ASM IP Holding B.V. |
Deposition method |
| 12125700, |
Jan 16 2020 |
ASM IP Holding B.V. |
Method of forming high aspect ratio features |
| 12129545, |
Dec 22 2020 |
ASM IP Holding B.V. |
Precursor capsule, a vessel and a method |
| 12129548, |
Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
| 12130084, |
Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
| 12131885, |
Dec 22 2020 |
ASM IP Holding B.V. |
Plasma treatment device having matching box |
| 12148609, |
Sep 16 2020 |
ASM IP HOLDING B V |
Silicon oxide deposition method |
| 12154824, |
Aug 14 2020 |
ASM IP Holding B.V. |
Substrate processing method |
| 12159788, |
Dec 14 2020 |
ASM IP Holding B.V. |
Method of forming structures for threshold voltage control |
| 12169361, |
Jul 30 2019 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
| 12173402, |
Feb 15 2018 |
ASM IP Holding B.V. |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
| 12173404, |
Mar 17 2020 |
ASM IP Holding B.V. |
Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
| 12176243, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
| D829306, |
Jul 06 2016 |
ASM IP Holding B.V. |
Shower plate |
| D834686, |
Dec 15 2016 |
ASM IP Holding B.V. |
Shower plate |
| D867521, |
Jul 07 2015 |
ORBITAL SYSTEMS AB |
Shower |
| D868993, |
Aug 31 2017 |
HITACHI HIGH-TECH CORPORATION |
Electrode plate for a plasma processing apparatus |
| D908645, |
Aug 26 2019 |
Applied Materials, Inc |
Sputtering target for a physical vapor deposition chamber |
| D914134, |
Jan 25 2019 |
DELTA FAUCET COMPANY |
Showerhead |
| D937329, |
Mar 23 2020 |
Applied Materials, Inc |
Sputter target for a physical vapor deposition chamber |
| D940765, |
Dec 02 2020 |
Applied Materials, Inc |
Target profile for a physical vapor deposition chamber target |
| D944946, |
Jun 14 2019 |
ASM IP Holding B.V. |
Shower plate |
| D946638, |
Dec 11 2017 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D947913, |
May 17 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
| D958401, |
May 27 2020 |
HITACHI HIGH-TECH CORPORATION |
Ion shield plate for plasma processing device |
| D965044, |
Aug 19 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
| D965524, |
Aug 19 2019 |
ASM IP Holding B.V. |
Susceptor support |
| D966357, |
Dec 02 2020 |
Applied Materials, Inc. |
Target profile for a physical vapor deposition chamber target |
| D970566, |
Mar 23 2020 |
Applied Materials, Inc. |
Sputter target for a physical vapor deposition chamber |
| D975665, |
May 17 2019 |
ASM IP Holding B.V. |
Susceptor shaft |
| D979506, |
Aug 22 2019 |
ASM IP Holding B.V. |
Insulator |
| D980813, |
May 11 2021 |
ASM IP HOLDING B V |
Gas flow control plate for substrate processing apparatus |
| D980814, |
May 11 2021 |
ASM IP HOLDING B V |
Gas distributor for substrate processing apparatus |
| D981973, |
May 11 2021 |
ASM IP HOLDING B V |
Reactor wall for substrate processing apparatus |
| ER1077, |
|
|
|
| ER1413, |
|
|
|
| ER1726, |
|
|
|
| ER195, |
|
|
|
| ER2810, |
|
|
|
| ER315, |
|
|
|
| ER348, |
|
|
|
| ER3481, |
|
|
|
| ER3883, |
|
|
|
| ER3967, |
|
|
|
| ER4264, |
|
|
|
| ER4403, |
|
|
|
| ER4489, |
|
|
|
| ER4496, |
|
|
|
| ER4646, |
|
|
|
| ER4732, |
|
|
|
| ER5378, |
|
|
|
| ER5980, |
|
|
|
| ER6015, |
|
|
|
| ER6261, |
|
|
|
| ER6328, |
|
|
|
| ER6426, |
|
|
|
| ER6877, |
|
|
|
| ER6881, |
|
|
|
| ER7009, |
|
|
|
| ER7016, |
|
|
|
| ER7365, |
|
|
|
| ER7472, |
|
|
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| ER7701, |
|
|
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| ER7895, |
|
|
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| ER8714, |
|
|
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| ER8750, |
|
|
|
| ER9386, |
|
|
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| ER9931, |
|
|
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