Patent
   D641829
Priority
Oct 29 2010
Filed
Oct 29 2010
Issued
Jul 19 2011
Expiry
Jul 19 2025

TERM.DISCL.
Assg.orig
Entity
unknown
11
10
n/a
We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,

FIG. 5 is a cross-sectional view thereof, taken generally along line 55 in FIG. 3, showing succinctly the surface contours seen in FIGS. 1 and 3.

Angelov, Ivelin A., Caron, James E., Kalinovshi, Ilia

Patent Priority Assignee Title
9121097, Aug 31 2012 Novellus Systems, Inc. Variable showerhead flow by varying internal baffle conductance
9315899, Jun 15 2012 Novellus Systems, Inc. Contoured showerhead for improved plasma shaping and control
9598770, Jun 15 2012 Novellus Systems, Inc. Contoured showerhead for improved plasma shaping and control
9728380, Aug 31 2012 Novellus Systems, Inc. Dual-plenum showerhead with interleaved plenum sub-volumes
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D793526, Apr 08 2016 Applied Materials, Inc Showerhead for a semiconductor processing chamber
D794753, Apr 08 2016 Applied Materials, Inc Showerhead for a semiconductor processing chamber
D967935, Jan 23 2022 KAIPING LINLONG SANITARY WARE TECHNOLOGY CO., LTD. Faucet
D967936, Jan 23 2022 JIANGMEN DONGRUI TECHNOLOGY CO., LTD. Faucet
Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Oct 29 2010Novellus Systems, Inc.(assignment on the face of the patent)
Oct 29 2010ANGELOV, IVELIN ANovellus Systems, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0255760210 pdf
Oct 29 2010CARON, JAMES E Novellus Systems, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0255760210 pdf
Nov 01 2010KALINOVSKI, ILIANovellus Systems, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0255760210 pdf
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