FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a back elevation view thereof.
FIG. 7 is a left side elevation view thereof.
FIG. 8 is a right side elevation view thereof.
FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3.
FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.
FIG. 11 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.
FIG. 12 is a bottom isometric view thereof.
FIG. 13 is a top plan view thereof.
FIG. 14 is a bottom plan view thereof.
FIG. 15 is a front elevation view thereof.
FIG. 16 is a back elevation view thereof.
FIG. 17 is a left side elevation view thereof.
FIG. 18 is a right side elevation view thereof.
FIG. 19 is a cross-sectional view taken along line 19-19 in FIG. 13; and,
FIG. 20 is a cross-sectional view taken along line 20-20 in FIG. 13.
The dashed lines in FIGS. 1-20 represent unclaimed environment forming no part of the claimed design.
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