Patent
   D947914
Priority
Nov 23 2020
Filed
Nov 23 2020
Issued
Apr 05 2022
Expiry
Apr 05 2037
Assg.orig
Entity
unknown
9
32
n/a
The ornamental design for a base plate for a processing chamber substrate support, as shown and described.

FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof.

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3; and,

FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.

The broken lines in the drawings depict portions of the article that form no part of the claimed design.

Sansoni, Steven V., Tsai, Cheng-Hsiung Matthew, Rao, Shreesha Yogish, Sundararajan, Mukund, Koppa, Manjunatha P.

Patent Priority Assignee Title
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 23 2020Applied Materials, Inc.(assignment on the face of the patent)
Nov 24 2020RAO, SHREESHA YOGISHApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 24 2020TSAI, CHENG-HSIUNG MATTHEWApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 24 2020KOPPA, MANJUNATHA P Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 24 2020SANSONI, STEVEN V Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 29 2020SUNDARARAJAN, MUKUNDApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
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