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Patent
   D947914
Priority
Nov 23 2020
Filed
Nov 23 2020
Issued
Apr 05 2022
Expiry
Apr 05 2037
Inventors
Sansoni, S…
Assg.orig
Applied Ma…
Assg.curr
Applied Ma…
Entity
unknown
Referenced by
9
References
32
Maint.:
n/a
The ornamental design for a base plate for a processing chamber substrate support, as shown and described.

FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.

FIG. 2 is a bottom isometric view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a front elevation view thereof.

FIG. 6 is a back elevation view thereof.

FIG. 7 is a left side elevation view thereof.

FIG. 8 is a right side elevation view thereof.

FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3; and,

FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.

The broken lines in the drawings depict portions of the article that form no part of the claimed design.
INVENTORS:

Sansoni, Steven V., Tsai, Cheng-Hsiung Matthew, Rao, Shreesha Yogish, Sundararajan, Mukund, Koppa, Manjunatha P.

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
D981973, May 11 2021 ASM IP HOLDING B V Reactor wall for substrate processing apparatus
D986190, Mar 19 2020 Applied Materials, Inc. Confinement plate for a substrate processing chamber
D989012, Sep 17 2020 Ebara Corporation Elastic membrane
ER3298,
ER4489,
ER6789,
ER6966,
ER8750,
ER8863,
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
10559327, Feb 28 2018 NIDEC CORPORATION Base plate with electrodeposition coating film and method for producing base plate
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7589950, Oct 13 2006 Applied Materials, Inc Detachable electrostatic chuck having sealing assembly
7697260, Mar 31 2004 Applied Materials, Inc. Detachable electrostatic chuck
8476793, May 03 2008 EVAULT, INC Stiffener tab for a spindle motor base plate
9666467, Nov 21 2014 Varian Semiconductor Equipment Associates, Inc Detachable high-temperature electrostatic chuck assembly
9668873, Mar 08 2013 Biomet Manufacturing, LLC Modular glenoid base plate with augments
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D707257, Apr 30 2012 Samhongsa Co., Ltd. Base plate for spindle motor
D793816, Aug 19 2014 Saucer base plate
D802546, Jan 08 2016 ASM IP Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus
D836399, Mar 17 2017 HUSKEE TECH PTY LTD Saucer
D847982, Feb 04 2016 COLOPLAST A S Heat exchanger base plate
D893441, Jun 28 2019 Applied Materials, Inc Base plate for a processing chamber substrate support
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ASSIGNMENT RECORDS    Assignment records on the USPTO
//////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 23 2020Applied Materials, Inc.(assignment on the face of the patent)
Nov 24 2020RAO, SHREESHA YOGISHApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 24 2020TSAI, CHENG-HSIUNG MATTHEWApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 24 2020KOPPA, MANJUNATHA P Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 24 2020SANSONI, STEVEN V Applied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
Nov 29 2020SUNDARARAJAN, MUKUNDApplied Materials, IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0545060494 pdf
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