Patent
   D916037
Priority
May 18 2018
Filed
Nov 16 2018
Issued
Apr 13 2021
Expiry
Apr 13 2036
Assg.orig
Entity
unknown
6
9
n/a
We claim the ornamental design for a cover of seal cap for reaction chamber for semiconductor, as shown and described.

FIG. 1 is a rear, top and left side perspective view of a cover of seal cap for reaction chamber for semiconductor showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view thereof taken in the direction of line 8-8 in FIG. 2.

The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.

Sasaki, Takafumi, Yoshida, Hidenari, Okajima, Yusaku, Saido, Shuhei

Patent Priority Assignee Title
11887878, Jun 28 2019 Applied Materials, Inc Detachable biasable electrostatic chuck for high temperature applications
D947914, Nov 23 2020 Applied Materials, Inc Base plate for a processing chamber substrate support
D960216, Nov 23 2020 Applied Materials, Inc. Base plate for a processing chamber substrate support
D980813, May 11 2021 ASM IP HOLDING B V Gas flow control plate for substrate processing apparatus
D980814, May 11 2021 ASM IP HOLDING B V Gas distributor for substrate processing apparatus
D981972, Mar 22 2021 KOKUSAI ELECTRIC CORPORATION Adiabatic plate for substrate processing appratus
Patent Priority Assignee Title
D616390, Mar 06 2009 Tokyo Electron Limited Quartz cover for manufacturing semiconductor wafers
D654883, Oct 21 2010 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
D654884, Oct 21 2010 Tokyo Electron Limited Top plate for reactor for manufacturing semiconductor
D797067, Apr 21 2015 Applied Materials, Inc Target profile for a physical vapor deposition chamber target
D813181, Jul 26 2016 KOKUSAI ELECTRIC CORPORATION Cover of seal cap for reaction chamber of semiconductor
D855027, Jan 22 2018 KOKUSAI ELECTRIC CORPORATION Cover of seal cap for reaction chamber of semiconductor
D872037, Aug 09 2017 KOKUSAI ELECTRIC CORPORATION Cover of seal cap for reaction chamber for semiconductor manufacturing
JP1579504,
JP1598442,
/////
Executed onAssignorAssigneeConveyanceFrameReelDoc
Oct 25 2018OKAJIMA, YUSAKUKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0475260818 pdf
Oct 25 2018SAIDO, SHUHEIKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0475260818 pdf
Oct 25 2018YOSHIDA, HIDENARIKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0475260818 pdf
Oct 25 2018SASAKI, TAKAFUMIKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0475260818 pdf
Nov 16 2018KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule