Patent
   D855027
Priority
Jan 22 2018
Filed
May 30 2018
Issued
Jul 30 2019
Expiry
Jul 30 2034
Assg.orig
Entity
unknown
8
12
n/a
The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.

FIG. 1 is a front, top, left side perspective view of a cover of seal cap for reaction chamber of semiconductor showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 6.

Yoshida, Hidenari, Okajima, Yusaku, Saido, Shuhei

Patent Priority Assignee Title
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Patent Priority Assignee Title
5789810, Dec 21 1995 International Business Machines Corporation Semiconductor cap
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20170229360,
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D748594, Mar 12 2014 KOKUSAI ELECTRIC CORPORATION Reaction tube
D796458, Jan 08 2016 ASM IP Holding B.V. Gas flow control plate for semiconductor manufacturing apparatus
D797067, Apr 21 2015 Applied Materials, Inc Target profile for a physical vapor deposition chamber target
D813181, Jul 26 2016 KOKUSAI ELECTRIC CORPORATION Cover of seal cap for reaction chamber of semiconductor
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Executed onAssignorAssigneeConveyanceFrameReelDoc
May 15 2018OKAJIMA, YUSAKUHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0459380248 pdf
May 15 2018SAIDO, SHUHEIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0459380248 pdf
May 15 2018YOSHIDA, HIDENARIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0459380248 pdf
May 30 2018KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
Sep 19 2018Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0469260886 pdf
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