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Patent
D855027
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Priority
Jan 22 2018
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Filed
May 30 2018
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Issued
Jul 30 2019
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Expiry
Jul 30 2034
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Assg.orig
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Entity
unknown
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8
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12
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n/a
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The ornamental design for a cover of seal cap for reaction chamber of semiconductor, as shown and described.
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FIG. 1 is a front, top, left side perspective view of a cover of seal cap for reaction chamber of semiconductor showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 6.
Yoshida, Hidenari, Okajima, Yusaku, Saido, Shuhei
Patent |
Priority |
Assignee |
Title |
12100577, |
Aug 28 2019 |
Applied Materials, Inc |
High conductance inner shield for process chamber |
D891382, |
Feb 08 2019 |
Applied Materials, Inc |
Process shield for a substrate processing chamber |
D913979, |
Aug 28 2019 |
Applied Materials, Inc |
Inner shield for a substrate processing chamber |
D916037, |
May 18 2018 |
KOKUSAI ELECTRIC CORPORATION |
Cover of seal cap for reaction chamber for semiconductor |
D931241, |
Aug 28 2019 |
Applied Materials, Inc |
Lower shield for a substrate processing chamber |
D980813, |
May 11 2021 |
ASM IP HOLDING B V |
Gas flow control plate for substrate processing apparatus |
D980814, |
May 11 2021 |
ASM IP HOLDING B V |
Gas distributor for substrate processing apparatus |
D981973, |
May 11 2021 |
ASM IP HOLDING B V |
Reactor wall for substrate processing apparatus |
Patent |
Priority |
Assignee |
Title |
5789810, |
Dec 21 1995 |
International Business Machines Corporation |
Semiconductor cap |
20170221790, |
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20170229360, |
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D642547, |
May 26 2010 |
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Cover plate for electrical devices |
D720309, |
Nov 18 2011 |
Tokyo Electron Limited |
Inner tube for process tube for manufacturing semiconductor wafers |
D742339, |
Mar 12 2014 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D748594, |
Mar 12 2014 |
KOKUSAI ELECTRIC CORPORATION |
Reaction tube |
D796458, |
Jan 08 2016 |
ASM IP Holding B.V. |
Gas flow control plate for semiconductor manufacturing apparatus |
D797067, |
Apr 21 2015 |
Applied Materials, Inc |
Target profile for a physical vapor deposition chamber target |
D813181, |
Jul 26 2016 |
KOKUSAI ELECTRIC CORPORATION |
Cover of seal cap for reaction chamber of semiconductor |
D840981, |
Oct 20 2017 |
Avery Dennison Retail Information Services, LLC |
RFID inlay |
JP1598442, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a