Patent
   D872037
Priority
Aug 09 2017
Filed
Jan 30 2018
Issued
Jan 07 2020
Expiry
Jan 07 2035
Assg.orig
Entity
unknown
4
8
n/a
We claim the ornamental design for a cover of seal cap for reaction chamber for semiconductor manufacturing, as shown (and described).

FIG. 1 is a front, bottom and right side perspective view of a cover of seal cap for reaction chamber for semiconductor manufacturing showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof; and

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 6; and,

FIG. 9 is a cross-sectional view take along line 9-9 in FIG. 7.

Sasaki, Takafumi, Yoshida, Hidenari, Okajima, Yusaku, Saido, Shuhei

Patent Priority Assignee Title
D891382, Feb 08 2019 Applied Materials, Inc Process shield for a substrate processing chamber
D916037, May 18 2018 KOKUSAI ELECTRIC CORPORATION Cover of seal cap for reaction chamber for semiconductor
D929198, Sep 16 2019 Tungsten grinder
D931241, Aug 28 2019 Applied Materials, Inc Lower shield for a substrate processing chamber
Patent Priority Assignee Title
20140302700,
D404370, Aug 20 1997 Tokyo Electron Limited Cap for use in a semiconductor wafer heat processing apparatus
D560284, Mar 30 2005 Tokyo Electron Limited Cover ring
D616390, Mar 06 2009 Tokyo Electron Limited Quartz cover for manufacturing semiconductor wafers
D717746, Nov 06 2013 Applied Materials, Inc Lower chamber liner
D732480, Dec 20 2012 Patrick Alan, Watson Snap electrical connector assembly
D813181, Jul 26 2016 KOKUSAI ELECTRIC CORPORATION Cover of seal cap for reaction chamber of semiconductor
JP1579504,
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 13 2017OKAJIMA, YUSAKUHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0447730771 pdf
Dec 13 2017YOSHIDA, HIDENARIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0447730771 pdf
Dec 14 2017SAIDO, SHUHEIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0447730771 pdf
Dec 14 2017SASAKI, TAKAFUMIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0447730771 pdf
Jan 30 2018KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
Sep 19 2018Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0469260886 pdf
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