Patent
   D490096
Priority
Dec 20 2002
Filed
Jun 20 2003
Issued
May 18 2004
Expiry
May 18 2018
Assg.orig
Entity
unknown
6
11
n/a
The ornamental design for a electrostatic chuck, as shown and described.

FIG. 1 is a perspective view of the top, front and right side of an electrostatic chuck showing my new design;

FIG. 2 is a front elevational view thereof, the rear elevational view being a mirror image thereof;

FIG. 3 is a right side elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is a sectional view taking along the line 7--7 in FIG. 5.

Okugawa, Keisuke

Patent Priority Assignee Title
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Patent Priority Assignee Title
4518889, Sep 22 1982 North American Philips Corporation Piezoelectric apodized ultrasound transducers
4692836, Oct 31 1983 Toshiba Kikai Kabushiki Kaisha Electrostatic chucks
5474614, Jun 10 1994 Texas Instruments Incorporated Method and apparatus for releasing a semiconductor wafer from an electrostatic clamp
5572398, Nov 14 1994 FM INDUSTRIES, INC Tri-polar electrostatic chuck
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5838528, Jul 10 1995 Applied Materials, Inc Electrostatic chuck assembly
6268994, Jul 09 1999 FM INDUSTRIES, INC Electrostatic chuck and method of manufacture
6513796, Feb 23 2001 International Business Machines Corporation Wafer chuck having a removable insert
6639783, Sep 08 1998 ABL IP Holding, LLC Multi-layer ceramic electrostatic chuck with integrated channel
D420022, May 08 1996 Applied Materials, Inc. Electrostatic chuck with improved spacing and charge migration reduction mask
D425919, Nov 14 1997 Applied Materials, Inc Electrostatic chuck with improved spacing mask and workpiece detection device
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Jun 20 2003NGK Spark Plug Co., Ltd.(assignment on the face of the patent)
Jul 01 2003OKUGAWA, KEISUKENGK SPARK PLUG CO , LTD ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0145080210 pdf
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