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Patent
D674366
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Priority
Jan 20 2011
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Filed
Jun 24 2011
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Issued
Jan 15 2013
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Expiry
Jan 15 2027
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Assg.orig
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Entity
unknown
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14
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17
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n/a
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The ornamental design for wafer holding member, as shown and described.
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FIG. 1 is front perspective view of a wafer holding member illustrating my new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a front view thereof, the rear view being a mirror image;
FIG. 5 is a left side view thereof;
FIG. 6 is a right side view thereof;
FIG. 7 is a sectional view taken along line 7-7 of FIG. 2; and,
FIG. 8 is an enlarged view of portion 8 encircled in FIG. 7.
Kajiwara, Hideki
Patent |
Priority |
Assignee |
Title |
D691974, |
Dec 22 2011 |
Tokyo Electron Limited |
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Tokyo Electron Limited |
Holding pad for transferring a wafer |
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D749531, |
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Mar 28 2014 |
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Wafer holder for manufacturing semiconductor |
D803283, |
May 16 2016 |
Veeco Instruments INC |
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ER2457, |
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|
ER3805, |
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|
ER4458, |
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ER4838, |
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ER5712, |
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Patent |
Priority |
Assignee |
Title |
4938166, |
Mar 31 1986 |
Hughes Electronics Corporation |
Device for growing multi-layer crystals employing set of masking elements with different aperature configurations |
5643366, |
Jan 31 1994 |
Applied Materials, Inc |
Wafer handling within a vacuum chamber using vacuum |
5851041, |
Jun 26 1996 |
Lam Research Corporation |
Wafer holder with spindle assembly and wafer holder actuator |
5881668, |
Nov 07 1995 |
MKS Instruments, Inc |
System for providing a controlled deposition on wafers |
6117238, |
Nov 07 1995 |
APPLIED SCIENCE & TECHNOLOGY, INC |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
6244641, |
Dec 02 1999 |
M.E.C. Technology, Inc. |
Wafer transfer arm |
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Dec 08 1995 |
Applied Materials, Inc. |
End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector |
6409453, |
Feb 18 1998 |
Applied Materials, Inc. |
End effector for wafer handler in processing system |
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May 04 1999 |
ADE Corporation |
Edge gripping end effector wafer handling apparatus |
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Dec 01 2000 |
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Work piece wand and method for processing work pieces using a work piece handling wand |
7100954, |
Jul 11 2003 |
TEL NEXX, INC |
Ultra-thin wafer handling system |
7644968, |
Jan 23 2004 |
Kawasaki Jukogyo Kabushiki Kaisha |
Substrate holding device |
7694647, |
Dec 22 2004 |
Applied Materials, Inc |
Cluster tool architecture for processing a substrate |
7980611, |
Jan 24 2008 |
Kabushiki Kaisha Yaskawa Denki |
Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus |
D589474, |
Dec 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
D589912, |
Jun 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
D639253, |
Sep 10 2010 |
Cheng Uei Precision Industry Co., Ltd. |
Mounting frame for printed circuit board of a mouse |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a