PTO
Wrapper
PDF
|
Dossier
Espace
Google
|
|
Patent
D674366
|
Priority
Jan 20 2011
|
Filed
Jun 24 2011
|
Issued
Jan 15 2013
|
Expiry
Jan 15 2027
|
|
Assg.orig
|
|
Entity
unknown
|
12
|
17
|
n/a
|
|
|
The ornamental design for wafer holding member, as shown and described.
|
FIG. 1 is front perspective view of a wafer holding member illustrating my new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom view thereof;
FIG. 4 is a front view thereof, the rear view being a mirror image;
FIG. 5 is a left side view thereof;
FIG. 6 is a right side view thereof;
FIG. 7 is a sectional view taken along line 7-7 of FIG. 2; and,
FIG. 8 is an enlarged view of portion 8 encircled in FIG. 7.
Kajiwara, Hideki
Patent |
Priority |
Assignee |
Title |
D691974, |
Dec 22 2011 |
Tokyo Electron Limited |
Holding pad for transferring a wafer |
D693319, |
Dec 22 2011 |
Tokyo Electron Limited |
Holding pad for transferring a wafer |
D695240, |
Oct 20 2011 |
Tokyo Electron Limited |
Arm for wafer transportation for manufacturing semiconductor |
D701498, |
Oct 20 2011 |
Tokyo Electron Limited |
Arm for wafer transportation for manufacturing semiconductor |
D703161, |
Oct 15 2012 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for ion implantation |
D703162, |
Oct 17 2012 |
Sumitomo Electric Industries, Ltd. |
Wafer holder for stepper |
D749531, |
Jun 09 2014 |
GUDENG PRECISION INDUSTRIAL CO., LTD. |
Diffusion assembly for front opening unified pod |
D766850, |
Mar 28 2014 |
Tokyo Electron Limited |
Wafer holder for manufacturing semiconductor |
D803283, |
May 16 2016 |
Veeco Instruments INC |
Wafer handling assembly |
ER2457, |
|
|
|
ER4838, |
|
|
|
ER5712, |
|
|
|
Patent |
Priority |
Assignee |
Title |
4938166, |
Mar 31 1986 |
Hughes Electronics Corporation |
Device for growing multi-layer crystals employing set of masking elements with different aperature configurations |
5643366, |
Jan 31 1994 |
Applied Materials, Inc |
Wafer handling within a vacuum chamber using vacuum |
5851041, |
Jun 26 1996 |
Lam Research Corporation |
Wafer holder with spindle assembly and wafer holder actuator |
5881668, |
Nov 07 1995 |
MKS Instruments, Inc |
System for providing a controlled deposition on wafers |
6117238, |
Nov 07 1995 |
APPLIED SCIENCE & TECHNOLOGY, INC |
End effector assembly for inclusion in a system for producing uniform deposits on a wafer |
6244641, |
Dec 02 1999 |
M.E.C. Technology, Inc. |
Wafer transfer arm |
6267423, |
Dec 08 1995 |
Applied Materials, Inc. |
End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector |
6409453, |
Feb 18 1998 |
Applied Materials, Inc. |
End effector for wafer handler in processing system |
6491330, |
May 04 1999 |
ADE Corporation |
Edge gripping end effector wafer handling apparatus |
6558562, |
Dec 01 2000 |
Novellus Systems, Inc |
Work piece wand and method for processing work pieces using a work piece handling wand |
7100954, |
Jul 11 2003 |
TEL NEXX, INC |
Ultra-thin wafer handling system |
7644968, |
Jan 23 2004 |
Kawasaki Jukogyo Kabushiki Kaisha |
Substrate holding device |
7694647, |
Dec 22 2004 |
Applied Materials, Inc |
Cluster tool architecture for processing a substrate |
7980611, |
Jan 24 2008 |
Kabushiki Kaisha Yaskawa Denki |
Substrate holding apparatus, substrate transferring robot equipped with the same, and semiconductor production apparatus |
D589474, |
Dec 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
D589912, |
Jun 06 2007 |
Tokyo Electron Limited |
Wafer holding member |
D639253, |
Sep 10 2010 |
Cheng Uei Precision Industry Co., Ltd. |
Mounting frame for printed circuit board of a mouse |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a