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Patent
   D803283
Priority
May 16 2016
Filed
May 16 2016
Issued
Nov 21 2017
Expiry
Nov 21 2032
Inventors
Rashkovsky…
Assg.orig
Veeco Inst…
Assg.curr
Veeco Inst…
Entity
unknown
Referenced by
3
References
21
Maint.:
n/a
The ornamental design for a wafer handling assembly, as shown and described.

FIG. 1 is a top perspective view of a first embodiment of a wafer handling assembly.

FIG. 2 is a top view of the wafer handling assembly of FIG. 1.

FIG. 3 is a side view of the wafer handling assembly of FIG. 1.

FIG. 4 is another side view of the wafer handling assembly of FIG. 1.

FIG. 5 is a bottom perspective view of the wafer handling assembly of FIG. 1.

FIG. 6 is a top perspective view of a second embodiment of a wafer handling assembly.

FIG. 7 is a top view of the wafer handling assembly of FIG. 6.

FIG. 8 is a side view of the wafer handling assembly of FIG. 6.

FIG. 9 is another side view of the wafer handling assembly of FIG. 6.

FIG. 10 is a bottom perspective view of the wafer handling assembly of FIG. 6.

FIG. 11 is a top perspective view of a third embodiment of a wafer handling assembly.

FIG. 12 is a top view of the wafer handling assembly of FIG. 11.

FIG. 13 is a side view of the wafer handling assembly of FIG. 11.

FIG. 14 is another side view of the wafer handling assembly of FIG. 11.

FIG. 15 is a bottom perspective view of the wafer handling assembly of FIG. 11.

FIG. 16 is a top perspective view of a fourth embodiment of a wafer handling assembly.

FIG. 17 is a top view of the wafer handling assembly of FIG. 16.

FIG. 18 is a side view of the wafer handling assembly of FIG. 16.

FIG. 19 is another side view of the wafer handling assembly of FIG. 16.

FIG. 20 is a bottom perspective view of the wafer handling assembly of FIG. 16.

FIG. 21 is a top perspective view of a fifth embodiment of a wafer handling assembly.

FIG. 22 is a top view of the wafer handling assembly of FIG. 21.

FIG. 23 is a side view of the wafer handling assembly of FIG. 21.

FIG. 24 is another side view of the wafer handling assembly of FIG. 21.

FIG. 25 is a bottom perspective view of the wafer handling assembly of FIG. 21.

FIG. 26 is a top perspective view of a sixth embodiment of a wafer handling assembly.

FIG. 27 is a top view of the wafer handling assembly of FIG. 26.

FIG. 28 is a side view of the wafer handling assembly of FIG. 26.

FIG. 29 is another side view of the wafer handling assembly of FIG. 26; and,

FIG. 30 is a bottom perspective view of the wafer handling assembly of FIG. 26.
INVENTORS:

Rashkovsky, Yuliy, Saldana, Miguel Angel, Snowden, Brett Stuart

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
D849072, Apr 05 2017 Sundyne, LLC Bearing box frame
D875795, Jun 29 2017 Superior Industries, Inc.; SUPERIOR INDUSTRIES, INC Vertical shaft impact crusher rotor
D930720, Oct 02 2019 Clamp device for a press
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
4029351, Jun 02 1976 International Business Machines Corporation Bernoulli pickup head with self-restoring anti-tilt improvement
5643366, Jan 31 1994 Applied Materials, Inc Wafer handling within a vacuum chamber using vacuum
5791895, Feb 17 1994 Novellus Systems, Inc Apparatus for thermal treatment of thin film wafer
6249342, Jul 06 1999 Method and apparatus for handling and testing wafers
6276892, Mar 31 1998 Matsushita Electric Industrial Co., Ltd. Wafer handling apparatus
6357996, May 14 1999 KENSINGTON LABORATORIES, LLC Edge gripping specimen prealigner
6514033, Mar 18 1999 Applied Materials, Inc. Mechanical gripper for wafer handling robots
6537011, Mar 10 2000 Applied Materials, Inc Method and apparatus for transferring and supporting a substrate
6692219, Nov 29 2000 Tokyo Electron Limited Reduced edge contact wafer handling system and method of retrofitting and using same
6935466, Mar 01 2001 Applied Materials, Inc Lift pin alignment and operation methods and apparatus
8008884, Jul 17 2007 BROOKS AUTOMATION HOLDING, LLC; Brooks Automation US, LLC Substrate processing apparatus with motors integral to chamber walls
8920097, Nov 02 2006 GLOBALFOUNDRIES Singapore Pte. Ltd.; Chartered Semiconductor Manufacturing LTD Wafer handling system for a loadlock
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ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
May 16 2016Veeco Instruments Inc.(assignment on the face of the patent)
May 24 2016RASHKOVSKY, YULIYVeeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0387720773 pdf
May 24 2016SNOWDEN, BRETT STUARTVeeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0387720773 pdf
Jun 01 2016SALDANA, MIGUEL ANGELVeeco Instruments INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0387720773 pdf
Dec 16 2021Veeco Instruments INCHSBC BANK USA, NATIONAL ASSOCIATION, AS COLLATERAL AGENTPATENT SECURITY AGREEMENT0585330321 pdf
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