Patent
   D361752
Priority
Sep 17 1993
Filed
Sep 17 1993
Issued
Aug 29 1995
Expiry
Aug 29 2009
Assg.orig
Entity
unknown
34
8
n/a
The ornamental design for wafer boat or rack for holding semiconductor wafers.

FIG. 1 is a front elevational view of a wafer boat or rack for holding semiconductor wafers showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a right side view thereof, the left side view being a mirror image and, therefore, not being shown;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is an enlarged sectional view on section 6--6 in FIG. 1; and,

FIG. 7 is an enlarged sectional view of on section 7--7 in FIG. 1.

Yamaga, Kenichi

Patent Priority Assignee Title
D378823, May 30 1995 Tokyo Electron Tohoku Limited Wafer boat
D404015, Jan 31 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D404016, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D404371, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D405427, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D405428, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D409158, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D410438, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D411176, Aug 20 1997 TOKYO ELECTRON LLIMITED Wafer boat for use in a semiconductor wafer heat processing apparatus
D424527, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D425871, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D426521, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D427570, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D428858, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D429224, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D551634, Feb 28 2005 Tokyo Electron Limited Wafer-boat for heat-processing of semiconductor wafers
D570308, May 01 2006 Tokyo Electron Limited Wafer boat
D691974, Dec 22 2011 Tokyo Electron Limited Holding pad for transferring a wafer
D693319, Dec 22 2011 Tokyo Electron Limited Holding pad for transferring a wafer
D734730, Dec 27 2012 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D737785, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D738329, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D739831, Mar 22 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D740769, Mar 22 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D747279, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D748593, Mar 05 2014 HZO, INC Boat for use in a material deposition apparatus
D769201, Nov 20 2014 Tokyo Electron Limited Wafer boat
D772183, Nov 20 2014 Tokyo Electron Limited Wafer boat
D789310, Nov 20 2014 Tokyo Electron Limited Wafer boat
D791721, Nov 20 2014 Tokyo Electron Limited Wafer boat
D839219, Feb 12 2016 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D893438, Aug 21 2017 Tokyo Electron Limited Wafer boat
D908102, Feb 20 2019 Veeco Instruments INC Transportable semiconductor wafer rack
D908103, Feb 20 2019 Veeco Instruments INC Transportable semiconductor wafer rack
Patent Priority Assignee Title
4676008, May 16 1986 Microglass, Inc.; MICROGLASS, INC Cage-type wafer carrier and method
4872554, Jul 02 1987 Entegris, Inc Reinforced carrier with embedded rigid insert
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Sep 17 1993Tokyo Electron Kasbushiki Kaisha(assignment on the face of the patent)
Sep 17 1993Tokyo Electron Tohoku Kabushiki Kaisha(assignment on the face of the patent)
Nov 02 1993YAMAGA, KENICHITokyo Electron Kabushiki KaishaASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0067890805 pdf
Nov 02 1993YAMAGA, KENICHITokyo Electron Tohoku Kabushiki KaishaASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0067890805 pdf
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