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The ornamental design for wafer boat or rack for holding semiconductor wafers. |
FIG. 1 is a front elevational view of a wafer boat or rack for holding semiconductor wafers showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a right side view thereof, the left side view being a mirror image and, therefore, not being shown;
FIG. 4 is a top view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is an enlarged sectional view on section 6--6 in FIG. 1; and,
FIG. 7 is an enlarged sectional view of on section 7--7 in FIG. 1.
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Sep 17 1993 | Tokyo Electron Kasbushiki Kaisha | (assignment on the face of the patent) | / | |||
Sep 17 1993 | Tokyo Electron Tohoku Kabushiki Kaisha | (assignment on the face of the patent) | / | |||
Nov 02 1993 | YAMAGA, KENICHI | Tokyo Electron Kabushiki Kaisha | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006789 | /0805 | |
Nov 02 1993 | YAMAGA, KENICHI | Tokyo Electron Tohoku Kabushiki Kaisha | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 006789 | /0805 |
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