Heat retaining tube for use in a semiconductor wafer heat processing apparatus

Abstract

Description

FIG. 1 a perspective view of a heat retaining tube for use in a semiconductor wafer heat processing apparatus.

FIG. 2 a front elevational view thereof, the rear elevational view being a mirror image of the front view.

FIG. 3 a top plan view thereof.

FIG. 4 a bottom plan view thereof.

FIG. 5 a right side view thereof.

FIG. 6 a left side view thereof.

FIG. 7 a cross sectional view thereof taken along lineVII--VIl in FIG. 3; and,

FIG. 8 a cross sectional view thereof taken along line VIII--VIII in FIG. 2 .

Claims

I claim the ornamental design for a heat retaining tube for use in a semiconductor wafer heat processing apparatus, as shown and described.