Patent
   D793974
Priority
Sep 29 2015
Filed
Mar 10 2016
Issued
Aug 08 2017
Expiry
Aug 08 2032
Assg.orig
Entity
unknown
0
28
n/a
The ornamental design for a heater for semiconductor thermal process, as shown and described.

FIG. 1 is a front, top, right side perspective view of a heater for semiconductor thermal process showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

The dashed-dot-dashed lines represent the boundary lines of the claimed design.

The broken lines shown in the drawings represent portions of the heater for semiconductor thermal process that form no part of the claimed design.

Yamaguchi, Takatomo, Murata, Hitoshi

Patent Priority Assignee Title
Patent Priority Assignee Title
1140145,
2173217,
2205496,
2610884,
3484070,
5324920, Oct 18 1990 Tokyo Electron Limited Heat treatment apparatus
6023091, Nov 30 1995 SHENZHEN XINGUODU TECHNOLOGY CO , LTD Semiconductor heater and method for making
6737613, Mar 26 2002 KOKUSAI ELECTRIC CORPORATION Heat treatment apparatus and method for processing substrates
7027722, Nov 25 2002 KOYO THERMO SYSTEMS CO , LTD Electric heater for a semiconductor processing apparatus
7350756, May 10 2005 PLUTO OPCO CAYMAN , LLC Fastener
D244903, Nov 20 1975 Wirecraft Manufacturing Company Frankfurter roasting stick
D404016, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D405428, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D410438, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D424527, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D425871, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D426521, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D428858, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D429224, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
D450801, Jun 20 2000 Retractable lobster snare
D484283, Mar 21 2002 Sky City International Limited Dog belt
D502631, Oct 30 2003 Cooking pin
D574166, Sep 12 2006 Food tray support
D579885, Feb 20 2007 Tokyo Electron Limited Upper heat insulating cylinder for manufacturing semiconductor wafers
D703578, Oct 08 2013 POLYGROUP MACAU LIMITED BVI Decoration holder
D706161, Oct 08 2013 POLYGROUP MACAU LIMITED BVI Decoration holder
D711771, Oct 08 2013 POLYGROUP MACAU LIMITED BVI Decoration holder
D739293, Aug 01 2014 Hallmark Cards, Incorporated Wire decorative holder
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Feb 09 2016MURATA, HITOSHIHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0379590399 pdf
Feb 09 2016YAMAGUCHI, TAKATOMOHitachi Kokusai Electric IncASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0379590399 pdf
Mar 10 2016HITACHI KOKUSAI ELECTRIC INC.(assignment on the face of the patent)
Mar 29 2019Hitachi Kokusai Electric IncKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0491960764 pdf
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