Patent
   D579885
Priority
Feb 20 2007
Filed
Feb 20 2007
Issued
Nov 04 2008
Expiry
Nov 04 2022
Assg.orig
Entity
unknown
18
8
n/a
The ornamental design for an upper heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is a perspective view of the design for an upper heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is another top view thereof which shows sectional line 99;

FIG. 9 is a sectional view thereof along line 99 of FIG. 8; and,

FIG. 10 shows an upper heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention in use wherein the broken line showing of the environment is for illustrative purpose only and forms no part of the claimed design.

Sato, Izumi

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Patent Priority Assignee Title
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Feb 07 2007SAITO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0192130128 pdf
Feb 20 2007Tokyo Electron Limited(assignment on the face of the patent)
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