Patent
   D601979
Priority
Mar 28 2008
Filed
Sep 26 2008
Issued
Oct 13 2009
Expiry
Oct 13 2023
Assg.orig
Entity
unknown
8
8
n/a
The ornamental design for a pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is a perspective view of the design for a pedestal base of a heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a plan view thereof;

FIG. 7 is a bottom view thereof; and,

FIG. 8 is a sectional view along line 88 of FIG. 6.

Sato, Izumi

Patent Priority Assignee Title
9816184, Mar 20 2012 Veeco Instruments INC Keyed wafer carrier
D616394, Mar 06 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D616395, Mar 11 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D712852, Mar 20 2012 Veeco Instruments INC Spindle key
D726133, Mar 20 2012 Veeco Instruments INC Keyed spindle
D744967, Mar 20 2012 Veeco Instruments INC Spindle key
D748591, Mar 20 2012 Veeco Instruments Inc. Keyed spindle
D776801, Jun 24 2014 Kobe Steel, Ltd Heat exchanger tube
Patent Priority Assignee Title
5534074, May 17 1995 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
6811040, Jul 16 2001 TOKAI CARBON CO , LTD Wafer holding apparatus
20020092815,
20050145584,
D404375, Aug 20 1997 Tokyo Electron Limited Heat retaining tube base for use in a semiconductor wafer head processing apparatus
D570309, Oct 25 2006 Tokyo Electron Limited Wafer boat
D574792, Aug 23 2006 Tokyo Electron Limited Lower heat insulating cylinder for manufacturing semiconductor wafers
D579885, Feb 20 2007 Tokyo Electron Limited Upper heat insulating cylinder for manufacturing semiconductor wafers
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Sep 26 2008Tokyo Electron Limited(assignment on the face of the patent)
Nov 13 2008SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0220190766 pdf
n/a
Date Maintenance Fee Events


n/a
Date Maintenance Schedule