Patent
   D574792
Priority
Aug 23 2006
Filed
Feb 20 2007
Issued
Aug 12 2008
Expiry
Aug 12 2022
Assg.orig
Entity
unknown
8
8
n/a
The ornamental design for a lower heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is a perspective view of the design for a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention;

FIG. 2 is a front view thereof;

FIG. 3 is a left side view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a rear view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is another top view thereof which shows sectional line 99;

FIG. 9 is a sectional view thereof along line 99 of FIG. 8; and,

FIG. 10 shows a lower heat insulating cylinder for manufacturing semiconductor wafers in accordance with the invention in use wherein the broken line showing of the environment is for illustrative purpose only and forms no part of the claimed design.

Sato, Izumi

Patent Priority Assignee Title
9816184, Mar 20 2012 Veeco Instruments INC Keyed wafer carrier
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D748591, Mar 20 2012 Veeco Instruments Inc. Keyed spindle
Patent Priority Assignee Title
5534074, May 17 1995 Heraeus Amersil, Inc. Vertical boat for holding semiconductor wafers
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Feb 07 2007SAITO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0192130110 pdf
Feb 20 2007Tokyo Electron Limited(assignment on the face of the patent)
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