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Patent
D913230
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Priority
Apr 24 2019
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Filed
Oct 15 2019
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Issued
Mar 16 2021
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Expiry
Mar 16 2036
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Assg.orig
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Entity
unknown
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2
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9
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n/a
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The ornamental design for a heater for heating semiconductor wafer, as shown and described.
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FIG. 1 is a perspective view of a heater for heating semiconductor wafer, showing my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top view thereof; and,
FIG. 7 is a bottom view thereof.
The broken lines shown represent the portions of the heater for heating semiconductor wafer that form no part of the claimed design.
Kobayashi, Toshiki
Patent |
Priority |
Assignee |
Title |
6080970, |
Dec 26 1997 |
Kyocera Corporation |
Wafer heating apparatus |
8610034, |
Aug 26 2008 |
NuFlare Technology, Inc. |
Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device |
20060096972, |
|
|
|
D402156, |
Feb 02 1996 |
AKO-Werke GmbH & Co. KG |
Radiant stove heating element |
D410438, |
Jan 31 1997 |
Tokyo Electron Limited |
Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
D423028, |
Aug 26 1998 |
Matsushita Electric Industrial Co., Ltd. |
Coil |
D706714, |
Mar 12 2010 |
Fluke Corporation |
Rogowski coil |
D797690, |
Mar 16 2015 |
NUFLARE TECHNOLOGY, INC |
Heater for semiconductor manufacturing apparatus |
D839224, |
Dec 12 2016 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a