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					| Patent    D913230 |  
					| Priority Apr 24 2019 |  
					| Filed Oct 15 2019 |  
					| Issued Mar 16 2021 |  
					| Expiry Mar 16 2036 |  
					|  |  
					| Assg.orig |  
					|  |  
					| Entity unknown |  
					 | 2 |  
					 | 9 |  
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						  n/a |  
						 
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			  The ornamental design for a heater for heating semiconductor wafer, as shown and described. | 
 
	
FIG. 1 is a perspective view of a heater for heating semiconductor wafer, showing my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a top view thereof; and,
FIG. 7 is a bottom view thereof.
The broken lines shown represent the portions of the heater for heating semiconductor wafer that form no part of the claimed design.
	
	Kobayashi, Toshiki
	
	
	
	
	  
 	  	 | Patent | Priority | Assignee | Title | 
	      
	 | 6080970, | Dec 26 1997 | Kyocera Corporation | Wafer heating apparatus | 
    
	 | 8610034, | Aug 26 2008 | NuFlare Technology, Inc. | Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device | 
    
	 | 20060096972, |  |  |  | 
    
	 | D402156, | Feb 02 1996 | AKO-Werke GmbH & Co. KG | Radiant stove heating element | 
    
	 | D410438, | Jan 31 1997 | Tokyo Electron Limited | Heat retaining tube for use in a semiconductor wafer heat processing apparatus | 
    
	 | D423028, | Aug 26 1998 | Matsushita Electric Industrial Co., Ltd. | Coil | 
    
	 | D706714, | Mar 12 2010 | Fluke Corporation | Rogowski coil | 
    
	 | D797690, | Mar 16 2015 | NUFLARE TECHNOLOGY, INC | Heater for semiconductor manufacturing apparatus | 
    
	 | D839224, | Dec 12 2016 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing | 
	
	
	
	
	
	  
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