Patent
   D797690
Priority
Mar 16 2015
Filed
Sep 15 2015
Issued
Sep 19 2017
Expiry
Sep 19 2032
Assg.orig
Entity
unknown
17
23
n/a
The ornamental design for a heater for semiconductor manufacturing apparatus, as illustrated and described.

FIG. 1 is a top plan view of a heater for semiconductor manufacturing apparatus according to our new design;

FIG. 2 is a bottom plan view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a back view thereof;

FIG. 5 is a left side view thereof; and,

FIG. 6 is a right side view thereof.

Furutani, Hiroshi, Sato, Yuusuke

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Sep 15 2015NuFlare Technology, Inc.(assignment on the face of the patent)
Nov 18 2015FURUTANI, HIROSHINUFLARE TECHNOLOGY, INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0371660447 pdf
Nov 20 2015SATO, YUUSUKENUFLARE TECHNOLOGY, INCASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0371660447 pdf
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