Sheet heater for electrostatic chuck

Abstract

Description

FIG. 1 is a front view of a first embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 4 is a right view thereof, the left view thereof being a mirror image;

FIG. 5 is an enlarged view taken along line 5-5 in FIG. 1;

FIG. 6 is an enlarged view taken along line 6-6 in FIG. 5;

FIG. 7 is an enlarged view taken along line 7-7 in FIG. 6;

FIG. 8 is an enlarged view taken along line 8-8 in FIG. 7;

FIG. 9 is a front view of a second embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 10 is a rear view thereof;

FIG. 11 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 12 is a right view thereof, the left view thereof being a mirror image;

FIG. 13 is an enlarged view taken along line 13-13 in FIG. 9;

FIG. 14 is an enlarged view taken along line 14-14 in FIG. 13;

FIG. 15 is an enlarged view taken along line 15-15 in FIG. 14;

FIG. 16 is an enlarged view taken along line 16-16 in FIG. 15;

FIG. 17 is a front view of a third embodiment of a sheet heater for electrostatic chuck illustrating our new design;

FIG. 18 is a rear view thereof;

FIG. 19 is a top view thereof, the bottom view thereof being a mirror image;

FIG. 20 is a right view thereof, the left view thereof being a mirror image;

FIG. 21 is an enlarged view taken along line 21-21 in FIG. 17;

FIG. 22 is an enlarged view taken along line 22-22 in FIG. 21;

FIG. 23 is an enlarged view taken along line 23-23 in FIG. 22; and,

FIG. 24 is an enlarged view taken along line 24-24 in FIG. 23.

The broken lines in the drawings depict unclaimed subject matter only and form no part of the claimed design.

Claims

The ornamental design for a sheet heater for electrostatic chuck, as shown and described.