Patent
   D589471
Priority
Sep 28 2006
Filed
Mar 28 2007
Issued
Mar 31 2009
Expiry
Mar 31 2023
Assg.orig
Entity
unknown
32
11
n/a
The ornamental design for a heater for manufacturing semiconductor, as shown and described.

FIG. 1 is a front elevational view of a heater for manufacturing semiconductor, showing my new design;

FIG. 2 is a rear elevational view thereof; and,

FIG. 3 is a sectional view taken along line 33 in FIG. 1.

The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Komatsu, Tomohito

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Executed onAssignorAssigneeConveyanceFrameReelDoc
Mar 28 2007Tokyo Electron Limited(assignment on the face of the patent)
Jun 22 2007KOMATSU, TOMOHITOTokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0195020691 pdf
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