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Patent
D601521
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Priority
Sep 28 2006
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Filed
Mar 28 2007
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Issued
Oct 06 2009
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Expiry
Oct 06 2023
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Assg.orig
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Entity
unknown
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25
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11
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n/a
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The ornamental design for a heater for manufacturing semiconductor or the like, as shown and described.
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FIG. 1 is a front elevational view of a heater for manufacturing semiconductor, showing my new design;
FIG. 2 is a rear elevational view thereof; and,
FIG. 3 is a cross-sectional view taken along line 3—3 in FIG. 1.
The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Komatsu, Tomohito
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Patent |
Priority |
Assignee |
Title |
5540782, |
Oct 15 1992 |
Tokyo Electron Limited |
Heat treating apparatus having heat transmission-preventing plates |
5911896, |
Jun 25 1997 |
Brooks Automation, Inc |
Substrate heating apparatus with glass-ceramic panels and thin film ribbon heater element |
6037574, |
Nov 06 1997 |
Watlow Electric Manufacturing |
Quartz substrate heater |
6529686, |
Jun 06 2001 |
FSI International, Inc |
Heating member for combination heating and chilling apparatus, and methods |
6616767, |
Feb 12 1997 |
BAE SYSTEMS ADVANCED CERAMICS INC |
High temperature ceramic heater assembly with RF capability |
20020190051, |
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20040149716, |
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20050217583, |
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20070166146, |
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D427570, |
Jan 31 1997 |
Tokyo Electron Limited |
Quartz fin heat retaining tube |
D428858, |
Jan 31 1997 |
Tokyo Electron Limited |
Quartz fin heat retaining tube |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a