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Patent
D826185
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Priority
Oct 14 2016
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Filed
Mar 13 2017
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Issued
Aug 21 2018
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Expiry
Aug 21 2033
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Assg.orig
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Entity
unknown
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18
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14
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n/a
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We claim the ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.
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FIG. 1 is a front, bottom and right side perspective view of a ceiling heater for substrate processing apparartus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a rear elevational view thereof.
Kosugi, Tetsuya, Yamaguchi, Takatomo, Saido, Shuhei
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Apr 08 2014 |
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Mar 16 2015 |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a