Patent
   D378823
Priority
May 30 1995
Filed
Nov 30 1995
Issued
Apr 15 1997
Expiry
Apr 15 2011
Assg.orig
Entity
unknown
22
4
n/a
The ornamental design for wafer boat, as shown and described.

FIG. 1 is a front view of a wafer boat showing our new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top view thereof;

FIG. 4 is a bottom view thereof;

FIG. 5 is a left side view thereof, the right side view being a mirror image and, therefore, not shown;

FIG. 6 is a cross sectional view thereof on the section line 6--6 in FIG. 1;

FIG. 7 is a cross sectional view thereof on the section line 7--7 in FIG. 3; and,

FIG. 8 is a front/top/right side perspective view thereof.

Watanabe, Shingo, Kitayama, Hirofumi

Patent Priority Assignee Title
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Patent Priority Assignee Title
5482559, Oct 21 1993 Tokyo Electron Limited Heat treatment boat
5510146, Jul 16 1991 Seiko Epson Corporation CVD apparatus, method of forming semiconductor film, and method of fabricating thin-film semiconductor device
D361752, Sep 17 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Tohoku Kabushiki Kaisha Wafer boat or rack for holding semiconductor wafers
D366868, Sep 29 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Toboku Kabushiki Kaisha Wafer boat or rack
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 30 1995Tokyo Electron Limited(assignment on the face of the patent)
Feb 23 1996WATANABE, SHINGOTokyo Electron Tohoku LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0081000924 pdf
Feb 23 1996KITAYAMA, HIROFUMITokyo Electron Tohoku LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0081000924 pdf
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