Patent
   D366868
Priority
Sep 29 1993
Filed
Sep 29 1993
Issued
Feb 06 1996
Expiry
Feb 06 2010
Assg.orig
Entity
unknown
23
7
n/a
The ornamental design for wafer boat or rack, as shown and described.

FIG. 1 is a front elevational view of a wafer boat or rack showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a right side elevational view thereof, the left side elevational view being a mirror image and, therefore, not being shown;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a longitudinal sectional view on section 6--6 in FIG. 1;

FIG. 7 is a transverse sectional view on section 7--7 in FIG. 1;

FIG. 8 is an enlarged view of a portion of FIG. 7.

Ohsawa, Tetu

Patent Priority Assignee Title
5607065, Jan 04 1995 Shelving storage unit
D378675, May 30 1995 Tokyo Electron Limited Wafer boat
D378823, May 30 1995 Tokyo Electron Tohoku Limited Wafer boat
D380454, May 30 1995 Tokyo Electron Limited Wafer boat
D413478, Oct 27 1998 CD rack
D653877, Feb 17 2011 Multi-shelf stand
D734730, Dec 27 2012 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D737785, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D738329, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D739831, Mar 22 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D740769, Mar 22 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D747279, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D769201, Nov 20 2014 Tokyo Electron Limited Wafer boat
D772183, Nov 20 2014 Tokyo Electron Limited Wafer boat
D789310, Nov 20 2014 Tokyo Electron Limited Wafer boat
D791721, Nov 20 2014 Tokyo Electron Limited Wafer boat
D839219, Feb 12 2016 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D846514, May 03 2018 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D847105, May 03 2018 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D893438, Aug 21 2017 Tokyo Electron Limited Wafer boat
D908102, Feb 20 2019 Veeco Instruments INC Transportable semiconductor wafer rack
D908103, Feb 20 2019 Veeco Instruments INC Transportable semiconductor wafer rack
D939459, Aug 07 2019 KOKUSAI ELECTRIC CORPORATION Boat for wafer processing apparatus
Patent Priority Assignee Title
4355974, Nov 24 1980 ASQ Boats, Inc. Wafer boat
4515104, May 13 1983 ASQ Boats, Inc. Contiguous wafer boat
4572101, May 13 1983 ASQ BOATS, INC Side lifting wafer boat assembly
D291413, Jul 30 1984 Tokyo Denshi Kagaku Co., Ltd. Wafer holding frame
JP403295227,
JP404207022,
JP404207023,
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Sep 29 1993Tokyo Electron Kabushiki Kaisha(assignment on the face of the patent)
Sep 29 1993Tokyo Electron Tohoku Kabushiki Kaisha(assignment on the face of the patent)
Oct 20 1995OHSAWA, TETUTokyo Electron Kabushiki KaishaASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0077180039 pdf
Oct 20 1995OHSAWA, TETUTokyo Electron Toboku Kabushiki KaishaASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0077180039 pdf
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