|
The ornamental design for wafer boat or rack, as shown and described. |
FIG. 1 is a front elevational view of a wafer boat or rack showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a right side elevational view thereof, the left side elevational view being a mirror image and, therefore, not being shown;
FIG. 4 is a top view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is a longitudinal sectional view on section 6--6 in FIG. 1;
FIG. 7 is a transverse sectional view on section 7--7 in FIG. 1;
FIG. 8 is an enlarged view of a portion of FIG. 7.
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Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
Sep 29 1993 | Tokyo Electron Kabushiki Kaisha | (assignment on the face of the patent) | / | |||
Sep 29 1993 | Tokyo Electron Tohoku Kabushiki Kaisha | (assignment on the face of the patent) | / | |||
Oct 20 1995 | OHSAWA, TETU | Tokyo Electron Kabushiki Kaisha | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 007718 | /0039 | |
Oct 20 1995 | OHSAWA, TETU | Tokyo Electron Toboku Kabushiki Kaisha | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 007718 | /0039 |
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