Patent
   D291413
Priority
Jul 30 1984
Filed
Jan 08 1985
Issued
Aug 18 1987
Expiry
Aug 18 2001
Assg.orig
Entity
unknown
8
9
n/a
The ornamental design for a wafer holding frame, as shown.

FIG. 1 is a front elevational view of a wafer holding frame showing our new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevational view thereof; and

FIG. 6 is a cross sectional view thereof taken along line A--A in FIG. 1.

Nakane, Hisashi, Uehara, Akira, Hijikata, Isamu, Nakayama, Muneo

Patent Priority Assignee Title
D356699, Apr 14 1993 CD rack
D356700, Apr 19 1993 CD rack
D360097, Jan 28 1993 Rotatable rack for compact discs
D366868, Sep 29 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Toboku Kabushiki Kaisha Wafer boat or rack
D404015, Jan 31 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D404371, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D409158, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D411176, Aug 20 1997 TOKYO ELECTRON LLIMITED Wafer boat for use in a semiconductor wafer heat processing apparatus
Patent Priority Assignee Title
3856472,
3877134,
4228902, Nov 07 1977 Kasper Instruments, Inc. Carrier for semiconductive wafers
4388140, Jul 15 1980 Shin-Etsu Chemical Co., Ltd. Apparatus for wet treatment of wafer materials
4550239, Oct 05 1981 Tokyo Denshi Kagaku Kabushiki Kaisha Automatic plasma processing device and heat treatment device
4550242, Oct 05 1981 Tokyo Denshi Kagaku Kabushiki Kaisha Automatic plasma processing device and heat treatment device for batch treatment of workpieces
4573851, May 18 1983 Microglass, Inc. Semiconductor wafer transfer apparatus and method
4574950, Apr 25 1983 Sumitomo Electric Industries, Ltd. Wafer box
D260237, Aug 07 1978 Fuzere Manufacturing Co., Inc. Semiconductor wafer container
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Dec 11 1984UEHARA, AKIRATOKYO DESHI KAGAKU CO ASSIGNMENT OF ASSIGNORS INTEREST 0043560101 pdf
Dec 11 1984NAKANE, HISASHITOKYO DESHI KAGAKU CO ASSIGNMENT OF ASSIGNORS INTEREST 0043560101 pdf
Dec 14 1984HIJIKATA, ISAMUTOKYO DESHI KAGAKU CO ASSIGNMENT OF ASSIGNORS INTEREST 0043560101 pdf
Dec 19 1984NAKAYAMA, MUNEOTOKYO DESHI KAGAKU CO ASSIGNMENT OF ASSIGNORS INTEREST 0043560101 pdf
Jan 08 1985Tokyo Denshi Kagaku Co., Ltd.(assignment on the face of the patent)
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