|
I claim the ornamental design for wafer boat for use in a semiconductor wafer heat processing apparatus, as shown and described. |
|||||||||||||||||
FIG. 1 a perspective view of a wafer boat for use in a semiconductor wafer heat processing apparatus.
FIG. 2 a front elevational view thereof.
FIG. 3 a cross-sectional view taken along line III--III in FIG. 2.
FIG. 4 a rear elevational view thereof.
FIG. 5a right side view thereof.
FIG. 6 a cross-sectional view taken along line VI--VI in FIG. 2.
FIG. 7 a top plan view thereof; and,
FIG. 8 a bottom plan view thereof.
| Patent | Priority | Assignee | Title |
| 10020213, | Dec 30 2016 | MAXEON SOLAR PTE LTD | Semiconductor wafer carriers |
| 10553466, | Dec 30 2016 | MAXEON SOLAR PTE LTD | Semiconductor wafer carriers |
| 6065615, | Feb 28 1996 | Asahi Glass Company Ltd | Vertical wafer boat |
| 6571964, | Mar 28 2001 | HITACHI GLOBAL STORAGE TECHNOLOGIES NETHERLANDS B V ; MARIANA HDD B V | Tray for retaining disks |
| 6871657, | Apr 06 2001 | NAURA AKRION INC | Low profile wafer carrier |
| D551634, | Feb 28 2005 | Tokyo Electron Limited | Wafer-boat for heat-processing of semiconductor wafers |
| D570308, | May 01 2006 | Tokyo Electron Limited | Wafer boat |
| D570309, | Oct 25 2006 | Tokyo Electron Limited | Wafer boat |
| D580894, | May 01 2006 | Tokyo Electron Limited | Wafer boat |
| D615936, | Mar 06 2009 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
| D616396, | Mar 12 2009 | Tokyo Electron Limited | Pedestal of heat insulating cylinder for manufacturing semiconductor wafers |
| D655255, | Jun 18 2010 | KOKUSAI ELECTRIC CORPORATION | Boat of wafer processing apparatus |
| D655682, | Jun 18 2010 | KOKUSAI ELECTRIC CORPORATION | Boat of wafer processing apparatus |
| D734730, | Dec 27 2012 | KOKUSAI ELECTRIC CORPORATION | Boat of substrate processing apparatus |
| D737785, | Jul 29 2013 | KOKUSAI ELECTRIC CORPORATION | Boat for substrate processing apparatus |
| D738329, | Jul 29 2013 | KOKUSAI ELECTRIC CORPORATION | Boat for substrate processing apparatus |
| D739831, | Mar 22 2013 | KOKUSAI ELECTRIC CORPORATION | Boat for substrate processing apparatus |
| D740769, | Mar 22 2013 | KOKUSAI ELECTRIC CORPORATION | Boat for substrate processing apparatus |
| D747279, | Jul 29 2013 | KOKUSAI ELECTRIC CORPORATION | Boat for substrate processing apparatus |
| D769201, | Nov 20 2014 | Tokyo Electron Limited | Wafer boat |
| D772183, | Nov 20 2014 | Tokyo Electron Limited | Wafer boat |
| D789310, | Nov 20 2014 | Tokyo Electron Limited | Wafer boat |
| D791721, | Nov 20 2014 | Tokyo Electron Limited | Wafer boat |
| D839219, | Feb 12 2016 | KOKUSAI ELECTRIC CORPORATION | Boat for substrate processing apparatus |
| D846514, | May 03 2018 | KOKUSAI ELECTRIC CORPORATION | Boat of substrate processing apparatus |
| D847105, | May 03 2018 | KOKUSAI ELECTRIC CORPORATION | Boat of substrate processing apparatus |
| D893438, | Aug 21 2017 | Tokyo Electron Limited | Wafer boat |
| D908102, | Feb 20 2019 | Veeco Instruments INC | Transportable semiconductor wafer rack |
| D908103, | Feb 20 2019 | Veeco Instruments INC | Transportable semiconductor wafer rack |
| D939459, | Aug 07 2019 | KOKUSAI ELECTRIC CORPORATION | Boat for wafer processing apparatus |
| Patent | Priority | Assignee | Title |
| 4743156, | May 09 1986 | Motorola, Inc.; MOTOROLA, INC , A CORP OF DE ; MOTOROLA INC , A CORP OF DE | Dump transfer wafer carrier |
| 4857689, | Mar 23 1988 | Axcelis Technologies, Inc | Rapid thermal furnace for semiconductor processing |
| 5174045, | May 17 1991 | SEMITOOL, INC | Semiconductor processor with extendible receiver for handling multiple discrete wafers without wafer carriers |
| 5314574, | Jun 26 1992 | Tokyo Electron Kabushiki Kaisha | Surface treatment method and apparatus |
| 5320218, | Apr 07 1992 | MURATEC AUTOMATION CO , LTD | Closed container to be used in a clean room |
| D291413, | Jul 30 1984 | Tokyo Denshi Kagaku Co., Ltd. | Wafer holding frame |
| D361752, | Sep 17 1993 | Tokyo Electron Kabushiki Kaisha; Tokyo Electron Tohoku Kabushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
| D378823, | May 30 1995 | Tokyo Electron Tohoku Limited | Wafer boat |
| Executed on | Assignor | Assignee | Conveyance | Frame | Reel | Doc |
| Feb 05 1998 | Tokyo Electron Limited | (assignment on the face of the patent) | / | |||
| Mar 18 1998 | SHIMAZU, TOMOHISA | Tokyo Electron Limited | ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS | 009126 | /0630 |
| Date | Maintenance Fee Events |
| Date | Maintenance Schedule |