Patent
   D616396
Priority
Mar 12 2009
Filed
Sep 02 2009
Issued
May 25 2010
Expiry
May 25 2024
Assg.orig
Entity
unknown
18
9
n/a
The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2;

FIG. 9 is a cross-sectional view taken through line 99 of FIG. 2; and,

FIG. 10 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.

The broken lines are shown for illustrative purposes only and form no part of the claimed design.

Sato, Izumi

Patent Priority Assignee Title
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Patent Priority Assignee Title
4872554, Jul 02 1987 Entegris, Inc Reinforced carrier with embedded rigid insert
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Aug 21 2009SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0231810593 pdf
Sep 02 2009Tokyo Electron Limited(assignment on the face of the patent)
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