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Patent
D616396
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Priority
Mar 12 2009
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Filed
Sep 02 2009
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Issued
May 25 2010
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Expiry
May 25 2024
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Assg.orig
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Entity
unknown
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18
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9
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n/a
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The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken through line 8—8 of FIG. 2;
FIG. 9 is a cross-sectional view taken through line 9—9 of FIG. 2; and,
FIG. 10 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Sato, Izumi
| Patent |
Priority |
Assignee |
Title |
| 8042697, |
Jun 30 2008 |
GLOBALWAFERS CO , LTD |
Low thermal mass semiconductor wafer support |
| 8220646, |
Jun 30 2008 |
GLOBALWAFERS CO , LTD |
Low thermal mass semiconductor wafer plate |
| 8220647, |
Jun 30 2008 |
GLOBALWAFERS CO , LTD |
Low thermal mass semiconductor wafer boat |
| D655255, |
Jun 18 2010 |
KOKUSAI ELECTRIC CORPORATION |
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| D655682, |
Jun 18 2010 |
KOKUSAI ELECTRIC CORPORATION |
Boat of wafer processing apparatus |
| D725053, |
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Tokyo Electron Limited |
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| D734730, |
Dec 27 2012 |
KOKUSAI ELECTRIC CORPORATION |
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| D737785, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D738329, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D739831, |
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KOKUSAI ELECTRIC CORPORATION |
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| D740769, |
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Boat for substrate processing apparatus |
| D747279, |
Jul 29 2013 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D839219, |
Feb 12 2016 |
KOKUSAI ELECTRIC CORPORATION |
Boat for substrate processing apparatus |
| D846514, |
May 03 2018 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
| D847105, |
May 03 2018 |
KOKUSAI ELECTRIC CORPORATION |
Boat of substrate processing apparatus |
| D908102, |
Feb 20 2019 |
Veeco Instruments INC |
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| D908103, |
Feb 20 2019 |
Veeco Instruments INC |
Transportable semiconductor wafer rack |
| D939459, |
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Boat for wafer processing apparatus |
| Patent |
Priority |
Assignee |
Title |
| 4872554, |
Jul 02 1987 |
Entegris, Inc |
Reinforced carrier with embedded rigid insert |
| 5897311, |
May 31 1995 |
Tokyo Electron Limited |
Support boat for objects to be processed |
| 6099645, |
Jul 09 1999 |
POCO GRAPHITE FINANCE, LLC; POCO GRAPHITE, INC |
Vertical semiconductor wafer carrier with slats |
| 6110285, |
Apr 15 1997 |
COORSTEK KK |
Vertical wafer boat |
| 6488497, |
Jul 12 2001 |
COORSTEK, INC |
Wafer boat with arcuate wafer support arms |
| 7033168, |
Jan 24 2005 |
GLOBALWAFERS CO , LTD |
Semiconductor wafer boat for a vertical furnace |
| 7484958, |
Jul 16 2003 |
SHIN-ETSU HANDOTAI CO , LTD |
Vertical boat for heat treatment and method for producing the same |
| 7501370, |
Jan 06 2004 |
COORSTEK, INC |
High purity silicon carbide wafer boats |
| D409158, |
Aug 20 1997 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
| Date |
Maintenance Fee Events |
n/a
| Date |
Maintenance Schedule |
n/a