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Patent
D616396
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Priority
Mar 12 2009
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Filed
Sep 02 2009
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Issued
May 25 2010
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Expiry
May 25 2024
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Assg.orig
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Entity
unknown
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18
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9
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n/a
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The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken through line 8—8 of FIG. 2;
FIG. 9 is a cross-sectional view taken through line 9—9 of FIG. 2; and,
FIG. 10 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Sato, Izumi
Patent |
Priority |
Assignee |
Title |
8042697, |
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8220646, |
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Patent |
Priority |
Assignee |
Title |
4872554, |
Jul 02 1987 |
Entegris, Inc |
Reinforced carrier with embedded rigid insert |
5897311, |
May 31 1995 |
Tokyo Electron Limited |
Support boat for objects to be processed |
6099645, |
Jul 09 1999 |
POCO GRAPHITE FINANCE, LLC; POCO GRAPHITE, INC |
Vertical semiconductor wafer carrier with slats |
6110285, |
Apr 15 1997 |
COORSTEK KK |
Vertical wafer boat |
6488497, |
Jul 12 2001 |
COORSTEK, INC |
Wafer boat with arcuate wafer support arms |
7033168, |
Jan 24 2005 |
GLOBALWAFERS CO , LTD |
Semiconductor wafer boat for a vertical furnace |
7484958, |
Jul 16 2003 |
SHIN-ETSU HANDOTAI CO , LTD |
Vertical boat for heat treatment and method for producing the same |
7501370, |
Jan 06 2004 |
COORSTEK, INC |
High purity silicon carbide wafer boats |
D409158, |
Aug 20 1997 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a