Patent
   D615936
Priority
Mar 06 2009
Filed
Sep 02 2009
Issued
May 18 2010
Expiry
May 18 2024
Assg.orig
Entity
unknown
2
6
n/a
The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2; and,

FIG. 9 is a cross-section view taken through line 99 of FIG. 2.

Sato, Izumi

Patent Priority Assignee Title
ER2903,
ER4854,
Patent Priority Assignee Title
6099302, Jun 23 1998 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
6110285, Apr 15 1997 COORSTEK KK Vertical wafer boat
6716027, Jan 18 2001 Samsung Electronics Co., Ltd. Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
D404016, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D409158, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D424527, Jan 31 1997 Tokyo Electron Limited Quartz fin heat retaining tube
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Aug 21 2009SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0231810104 pdf
Sep 02 2009Tokyo Electron Limited(assignment on the face of the patent)
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