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Patent
   D570308
Priority
May 01 2006
Filed
Nov 01 2006
Issued
Jun 03 2008
Expiry
Jun 03 2022
Inventors
Sato, Izumi
Assg.orig
Tokyo Elec…
Assg.curr
Tokyo Elec…
Entity
unknown
Referenced by
26
References
12
Maint.:
n/a
The ornamental design for a wafer boat, as shown and described.

FIG. 1 is a side sectional view at line 1—1 in FIG. 7 of the wafer boat.

FIG. 2 is a cross sectional view at line 2—2 of FIGS. 8 and 9 of the wafer boat.

FIG. 3 is a side view of the wafer boat.

FIG. 4 is another side view of the wafer boat.

FIG. 5 is perspective view of the wafer boat.

FIG. 6 is a bottom view of the wafer boat.

FIG. 7 is a top view of the wafer boat.

FIG. 8 is another side view of the wafer boat; and,

FIG. 9 is still another side view of the wafer boat.
INVENTORS:

Sato, Izumi

THIS PATENT IS REFERENCED BY THESE PATENTS:
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11929272, Jul 31 2019 KOKUSAI ELECTRIC CORPORATION Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
D616394, Mar 06 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D616395, Mar 11 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D691974, Dec 22 2011 Tokyo Electron Limited Holding pad for transferring a wafer
D693319, Dec 22 2011 Tokyo Electron Limited Holding pad for transferring a wafer
D734730, Dec 27 2012 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D737785, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D738329, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D739831, Mar 22 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
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D747279, Jul 29 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D748593, Mar 05 2014 HZO, INC Boat for use in a material deposition apparatus
D763807, May 22 2014 HZO, INC Boat for a deposition apparatus
D769201, Nov 20 2014 Tokyo Electron Limited Wafer boat
D772183, Nov 20 2014 Tokyo Electron Limited Wafer boat
D789310, Nov 20 2014 Tokyo Electron Limited Wafer boat
D791721, Nov 20 2014 Tokyo Electron Limited Wafer boat
D839219, Feb 12 2016 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D846514, May 03 2018 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D847105, May 03 2018 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
D893438, Aug 21 2017 Tokyo Electron Limited Wafer boat
D908102, Feb 20 2019 Veeco Instruments INC Transportable semiconductor wafer rack
D908103, Feb 20 2019 Veeco Instruments INC Transportable semiconductor wafer rack
D939459, Aug 07 2019 KOKUSAI ELECTRIC CORPORATION Boat for wafer processing apparatus
ER4192,
ER6595,
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
5903711, Mar 26 1996 Toyko Electron Limited Heat treatment apparatus and heat treatment method
6056123, Dec 10 1997 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
6065615, Feb 28 1996 Asahi Glass Company, Ltd. Vertical wafer boat
6110285, Apr 15 1997 COORSTEK KK Vertical wafer boat
6444262, Apr 14 1999 Tokyo Electron Limited Thermal processing unit and thermal processing method
20020092815,
20020113027,
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D361752, Sep 17 1993 Tokyo Electron Kabushiki Kaisha; Tokyo Electron Tohoku Kabushiki Kaisha Wafer boat or rack for holding semiconductor wafers
D404371, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D409158, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D551634, Feb 28 2005 Tokyo Electron Limited Wafer-boat for heat-processing of semiconductor wafers
ASSIGNMENT RECORDS    Assignment records on the USPTO
//
Executed onAssignorAssigneeConveyanceFrameReelDoc
Nov 01 2006Tokyo Electron Limited(assignment on the face of the patent)
Feb 21 2007SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0189970165 pdf
MAINTENANCE FEES AND DATES:    Maintenance records on the USPTO
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