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Patent
   D763807
Priority
May 22 2014
Filed
May 22 2014
Issued
Aug 16 2016
Expiry
Aug 16 2030
Inventors
Dempster, …
Assg.orig
HZO, Inc.
Assg.curr
HZO, INC
Entity
unknown
Referenced by
0
References
29
Maint.:
n/a
The ornamental design for a boat for a deposition apparatus, as shown and described.

FIG. 1 is a perspective view of a boat for a deposition apparatus showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a side view thereof; and,

FIG. 7 is another side view thereof.

Broken lines are used in the drawings to illustrate features that form no part of the claimed design.
INVENTORS:

Dempster, James, Maynard, Jason

THIS PATENT IS REFERENCED BY THESE PATENTS:
Patent Priority Assignee Title
THIS PATENT REFERENCES THESE PATENTS:
Patent Priority Assignee Title
4303694, May 04 1979 Method and device of deposition through vacuum evaporation making use _of a modulated electron beam and a screen
5743967, Jul 13 1995 Semiconductor Energy Laboratory Co.; TDK Corporation Low pressure CVD apparatus
5752609, Feb 06 1996 Tokyo Electron Limited Wafer boat
5897311, May 31 1995 Tokyo Electron Limited Support boat for objects to be processed
5904958, Mar 20 1998 REXAM IMAGE PRODUCTS INC Adjustable nozzle for evaporation or organic monomers
6056123, Dec 10 1997 Novus Corporation Semiconductor wafer carrier having the same composition as the wafers
6095806, Jun 24 1998 Tokyo Electron Limited; Kabushiki Kaisha Toshiba Semiconductor wafer boat and vertical heat treating system
6099302, Jun 23 1998 Samsung Electronics Co., Ltd. Semiconductor wafer boat with reduced wafer contact area
6099645, Jul 09 1999 POCO GRAPHITE FINANCE, LLC; POCO GRAPHITE, INC Vertical semiconductor wafer carrier with slats
6110285, Apr 15 1997 COORSTEK KK Vertical wafer boat
6287112, Mar 30 2000 ASM INTERNATIONAL N V Wafer boat
6341935, Jun 14 2000 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
6450346, Jun 30 2000 HANGZHOU DUNYUANJUXIN SEMICONDUCTOR TECHNOLOGY CO , LTD Silicon fixtures for supporting wafers during thermal processing
6979659, Feb 26 2001 HANGZHOU DUNYUANJUXIN SEMICONDUCTOR TECHNOLOGY CO , LTD Silicon fixture supporting silicon wafers during high temperature processing
7033168, Jan 24 2005 GLOBALWAFERS CO , LTD Semiconductor wafer boat for a vertical furnace
7484958, Jul 16 2003 SHIN-ETSU HANDOTAI CO , LTD Vertical boat for heat treatment and method for producing the same
8042697, Jun 30 2008 GLOBALWAFERS CO , LTD Low thermal mass semiconductor wafer support
20020113027,
20030024888,
20050145584,
20100081104,
D404371, Aug 20 1997 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
D570308, May 01 2006 Tokyo Electron Limited Wafer boat
D580894, May 01 2006 Tokyo Electron Limited Wafer boat
D600221, Mar 28 2008 Tokyo Electron Limited Wafer boat
D600222, Mar 28 2008 Tokyo Electron Limited Wafer boat
D616391, Mar 06 2009 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
D616394, Mar 06 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
D616395, Mar 11 2009 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
ASSIGNMENT RECORDS    Assignment records on the USPTO
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Sep 23 2013HZO, INC PACIFIC WESTERN BANK AS SUCCESSOR IN INTEREST BY MERGER TO SQUARE 1 BANK SECURITY INTEREST SEE DOCUMENT FOR DETAILS 0384350224 pdf
May 22 2014HZO, Inc.(assignment on the face of the patent)
Jun 20 2014DEMPSTER, JAMESHZO, INC ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0331650598 pdf
Jun 20 2014MAYNARD, JASONHZO, INC ASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0331650598 pdf
Dec 27 2017HZO, INC CATHAY BANKSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0449950270 pdf
Dec 29 2017Pacific Western BankHZO, INC RELEASE BY SECURED PARTY SEE DOCUMENT FOR DETAILS 0445230446 pdf
Feb 04 2019HZO, INC CATHAY BANKSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0482840626 pdf
Jun 05 2023HZO, INC CATHAY BANKSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0638610025 pdf
Jun 05 2023HZO HONG KONG LIMITEDCATHAY BANKSECURITY INTEREST SEE DOCUMENT FOR DETAILS 0638610025 pdf
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