Patent
   D616391
Priority
Mar 06 2009
Filed
Sep 02 2009
Issued
May 25 2010
Expiry
May 25 2024
Assg.orig
Entity
unknown
5
18
n/a
The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.

FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a right side view thereof;

FIG. 5 is a left side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view taken through line 88 of FIG. 2; and,

FIG. 9 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.

The broken lines are shown for illustrative purposes only and form no part of the claimed design.

Sato, Izumi

Patent Priority Assignee Title
8042697, Jun 30 2008 GLOBALWAFERS CO , LTD Low thermal mass semiconductor wafer support
8220646, Jun 30 2008 GLOBALWAFERS CO , LTD Low thermal mass semiconductor wafer plate
8220647, Jun 30 2008 GLOBALWAFERS CO , LTD Low thermal mass semiconductor wafer boat
9691668, Oct 14 2011 EPISTAR CORPORATION Wafer carrier
D763807, May 22 2014 HZO, INC Boat for a deposition apparatus
Patent Priority Assignee Title
5494524, Dec 17 1992 Covalent Materials Corporation Vertical heat treatment device for semiconductor
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6716027, Jan 18 2001 Samsung Electronics Co., Ltd. Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
6796439, May 11 2001 HERAEUS QUARZGLAS GMBH & CO KG; SHIN-ETSU QUARTZ PRODUCTS CO , LTD Vertical type wafer supporting jig
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7033168, Jan 24 2005 GLOBALWAFERS CO , LTD Semiconductor wafer boat for a vertical furnace
7484958, Jul 16 2003 SHIN-ETSU HANDOTAI CO , LTD Vertical boat for heat treatment and method for producing the same
D404016, Jan 31 1997 Tokyo Electron Limited Heat retaining tube for use in a semiconductor wafer heat processing apparatus
D411176, Aug 20 1997 TOKYO ELECTRON LLIMITED Wafer boat for use in a semiconductor wafer heat processing apparatus
D580894, May 01 2006 Tokyo Electron Limited Wafer boat
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Aug 21 2009SATO, IZUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0231810166 pdf
Sep 02 2009Tokyo Electron Limited(assignment on the face of the patent)
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