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Patent
D616391
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Priority
Mar 06 2009
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Filed
Sep 02 2009
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Issued
May 25 2010
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Expiry
May 25 2024
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Assg.orig
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Entity
unknown
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5
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18
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n/a
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The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken through line 8—8 of FIG. 2; and,
FIG. 9 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Sato, Izumi
| Patent |
Priority |
Assignee |
Title |
| 5494524, |
Dec 17 1992 |
Covalent Materials Corporation |
Vertical heat treatment device for semiconductor |
| 5743967, |
Jul 13 1995 |
Semiconductor Energy Laboratory Co.; TDK Corporation |
Low pressure CVD apparatus |
| 5752609, |
Feb 06 1996 |
Tokyo Electron Limited |
Wafer boat |
| 5897311, |
May 31 1995 |
Tokyo Electron Limited |
Support boat for objects to be processed |
| 6056123, |
Dec 10 1997 |
Novus Corporation |
Semiconductor wafer carrier having the same composition as the wafers |
| 6099302, |
Jun 23 1998 |
Samsung Electronics Co., Ltd. |
Semiconductor wafer boat with reduced wafer contact area |
| 6099645, |
Jul 09 1999 |
POCO GRAPHITE FINANCE, LLC; POCO GRAPHITE, INC |
Vertical semiconductor wafer carrier with slats |
| 6110285, |
Apr 15 1997 |
COORSTEK KK |
Vertical wafer boat |
| 6287112, |
Mar 30 2000 |
ASM INTERNATIONAL N V |
Wafer boat |
| 6450346, |
Jun 30 2000 |
HANGZHOU DUNYUANJUXIN SEMICONDUCTOR TECHNOLOGY CO , LTD |
Silicon fixtures for supporting wafers during thermal processing |
| 6716027, |
Jan 18 2001 |
Samsung Electronics Co., Ltd. |
Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
| 6796439, |
May 11 2001 |
HERAEUS QUARZGLAS GMBH & CO KG; SHIN-ETSU QUARTZ PRODUCTS CO , LTD |
Vertical type wafer supporting jig |
| 6979659, |
Feb 26 2001 |
HANGZHOU DUNYUANJUXIN SEMICONDUCTOR TECHNOLOGY CO , LTD |
Silicon fixture supporting silicon wafers during high temperature processing |
| 7033168, |
Jan 24 2005 |
GLOBALWAFERS CO , LTD |
Semiconductor wafer boat for a vertical furnace |
| 7484958, |
Jul 16 2003 |
SHIN-ETSU HANDOTAI CO , LTD |
Vertical boat for heat treatment and method for producing the same |
| D404016, |
Jan 31 1997 |
Tokyo Electron Limited |
Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
| D411176, |
Aug 20 1997 |
TOKYO ELECTRON LLIMITED |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
| D580894, |
May 01 2006 |
Tokyo Electron Limited |
Wafer boat |
| Date |
Maintenance Fee Events |
n/a
| Date |
Maintenance Schedule |
n/a