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Patent
D616391
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Priority
Mar 06 2009
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Filed
Sep 02 2009
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Issued
May 25 2010
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Expiry
May 25 2024
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Assg.orig
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Entity
unknown
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5
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18
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n/a
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The ornamental design for a pedestal of heat insulating cylinder for manufacturing semiconductor wafers, as shown and described.
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FIG. 1 is front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers illustrating my new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side view thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is a cross-sectional view taken through line 8—8 of FIG. 2; and,
FIG. 9 is a front perspective view of a pedestal of heat insulating cylinder for manufacturing semiconductor wafers in use.
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Sato, Izumi
Patent |
Priority |
Assignee |
Title |
5494524, |
Dec 17 1992 |
Covalent Materials Corporation |
Vertical heat treatment device for semiconductor |
5743967, |
Jul 13 1995 |
Semiconductor Energy Laboratory Co.; TDK Corporation |
Low pressure CVD apparatus |
5752609, |
Feb 06 1996 |
Tokyo Electron Limited |
Wafer boat |
5897311, |
May 31 1995 |
Tokyo Electron Limited |
Support boat for objects to be processed |
6056123, |
Dec 10 1997 |
Novus Corporation |
Semiconductor wafer carrier having the same composition as the wafers |
6099302, |
Jun 23 1998 |
Samsung Electronics Co., Ltd. |
Semiconductor wafer boat with reduced wafer contact area |
6099645, |
Jul 09 1999 |
POCO GRAPHITE FINANCE, LLC; POCO GRAPHITE, INC |
Vertical semiconductor wafer carrier with slats |
6110285, |
Apr 15 1997 |
COORSTEK KK |
Vertical wafer boat |
6287112, |
Mar 30 2000 |
ASM INTERNATIONAL N V |
Wafer boat |
6450346, |
Jun 30 2000 |
HANGZHOU DUNYUANJUXIN SEMICONDUCTOR TECHNOLOGY CO , LTD |
Silicon fixtures for supporting wafers during thermal processing |
6716027, |
Jan 18 2001 |
Samsung Electronics Co., Ltd. |
Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
6796439, |
May 11 2001 |
HERAEUS QUARZGLAS GMBH & CO KG; SHIN-ETSU QUARTZ PRODUCTS CO , LTD |
Vertical type wafer supporting jig |
6979659, |
Feb 26 2001 |
HANGZHOU DUNYUANJUXIN SEMICONDUCTOR TECHNOLOGY CO , LTD |
Silicon fixture supporting silicon wafers during high temperature processing |
7033168, |
Jan 24 2005 |
GLOBALWAFERS CO , LTD |
Semiconductor wafer boat for a vertical furnace |
7484958, |
Jul 16 2003 |
SHIN-ETSU HANDOTAI CO , LTD |
Vertical boat for heat treatment and method for producing the same |
D404016, |
Jan 31 1997 |
Tokyo Electron Limited |
Heat retaining tube for use in a semiconductor wafer heat processing apparatus |
D411176, |
Aug 20 1997 |
TOKYO ELECTRON LLIMITED |
Wafer boat for use in a semiconductor wafer heat processing apparatus |
D580894, |
May 01 2006 |
Tokyo Electron Limited |
Wafer boat |
Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a