FIG. 1 is a top perspective view of a wafer carrier having pockets showing our new design;
FIG. 2 is an enlarged view of a portion of FIG. 1;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom perspective view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is an enlarged view of a portion of FIG. 4; and,
FIG. 7 is a right side view thereof, the left side, front, and rear views being the same as the right side view.
The broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.
The dash-dot broken lines define the area corresponding to the enlarged portion shown in FIGS. 2 and 6 and form no part of the claimed design.
Patent |
Priority |
Assignee |
Title |
10197291, |
Jun 04 2015 |
TROPITONE FURNITURE CO., INC. |
Fire burner |
D704155, |
Feb 18 2011 |
EPISTAR CORPORATION |
Wafer carrier |
D716742, |
Sep 13 2013 |
ASM IP Holding B.V. |
Substrate supporter for semiconductor deposition apparatus |
D724553, |
Sep 13 2013 |
ASM IP Holding B.V. |
Substrate supporter for semiconductor deposition apparatus |
D730304, |
May 15 2014 |
Kioxia Corporation |
Substrate for an electronic circuit |
D748593, |
Mar 05 2014 |
HZO, INC |
Boat for use in a material deposition apparatus |
D760180, |
Feb 21 2014 |
HZO, INC |
Hexcell channel arrangement for use in a boat for a deposition apparatus |
D764424, |
May 15 2014 |
Kioxia Corporation |
Substrate for an electronic circuit |
D769200, |
May 15 2013 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing apparatus |
D770990, |
May 15 2013 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing apparatus |
D778247, |
Apr 16 2015 |
Veeco Instruments Inc.; VEECO INSTRUMENTS, INC |
Wafer carrier with a multi-pocket configuration |
D778850, |
May 15 2014 |
Kioxia Corporation |
Substrate for an electronic circuit |
D778851, |
May 15 2014 |
Kioxia Corporation |
Substrate for an electronic circuit |
D778852, |
May 15 2014 |
Kioxia Corporation |
Substrate for an electronic circuit |
D784937, |
Nov 13 2014 |
Tokyo Electron Limited |
Dummy wafer |
D785576, |
Nov 13 2014 |
Tokyo Electron Limited |
Dummy wafer |
D786810, |
Nov 13 2014 |
Tokyo Electron Limited |
Dummy wafer |
D790489, |
Jul 08 2015 |
Ebara Corporation |
Vacuum contact pad |
D791930, |
Jun 04 2015 |
TROPITONE FURNITURE CO , INC |
Fire burner |
D793971, |
Mar 27 2015 |
Veeco Instruments INC |
Wafer carrier with a 14-pocket configuration |
D793972, |
Mar 27 2015 |
Veeco Instruments INC |
Wafer carrier with a 31-pocket configuration |
D806046, |
Apr 16 2015 |
Veeco Instruments Inc. |
Wafer carrier with a multi-pocket configuration |
D808349, |
May 15 2013 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing apparatus |
D813180, |
May 15 2013 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing apparatus |
D842450, |
Jun 04 2015 |
TROPITONE FURNITURE CO., INC. |
Fire burner |
D852762, |
Mar 27 2015 |
Veeco Instruments Inc. |
Wafer carrier with a 14-pocket configuration |
D854506, |
Mar 26 2018 |
Veeco Instruments INC |
Chemical vapor deposition wafer carrier with thermal cover |
D858469, |
Mar 26 2018 |
Veeco Instruments INC |
Chemical vapor deposition wafer carrier with thermal cover |
D860146, |
Nov 30 2017 |
Veeco Instruments INC |
Wafer carrier with a 33-pocket configuration |
D860147, |
Mar 26 2018 |
Veeco Instruments INC |
Chemical vapor deposition wafer carrier with thermal cover |
D863239, |
Mar 26 2018 |
Veeco Instruments INC |
Chemical vapor deposition wafer carrier with thermal cover |
D866491, |
Mar 26 2018 |
Veeco Instruments INC |
Chemical vapor deposition wafer carrier with thermal cover |
D893438, |
Aug 21 2017 |
Tokyo Electron Limited |
Wafer boat |
ER1219, |
|
|
|
ER1922, |
|
|
|
ER2449, |
|
|
|
ER2608, |
|
|
|
ER3761, |
|
|
|
ER511, |
|
|
|
Patent |
Priority |
Assignee |
Title |
3731435, |
|
|
|
3845738, |
|
|
|
4165584, |
Jan 27 1977 |
ITT Corporation |
Apparatus for lapping or polishing materials |
4512113, |
Sep 23 1982 |
|
Workpiece holder for polishing operation |
4739589, |
Jul 12 1985 |
Siltronic AG |
Process and apparatus for abrasive machining of a wafer-like workpiece |
5191738, |
Jun 16 1989 |
Shin-Etsu Handotai Co., Ltd. |
Method of polishing semiconductor wafer |
5193316, |
Oct 29 1991 |
Texas Instruments Incorporated |
Semiconductor wafer polishing using a hydrostatic medium |
5377451, |
Feb 23 1993 |
MEMC Electronic Materials, Inc. |
Wafer polishing apparatus and method |
5422316, |
Mar 18 1994 |
MEMC Electronic Materials, Inc |
Semiconductor wafer polisher and method |
5573448, |
Aug 18 1993 |
Shin-Etsu Handotai Co., Ltd. |
Method of polishing wafers, a backing pad used therein, and method of making the backing pad |
5647789, |
Nov 01 1993 |
Fujikoshi Kakai Kogyo Kabushiki Kaisha |
Polishing machine and a method of polishing a work |
5674107, |
Apr 25 1995 |
AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD |
Diamond polishing method and apparatus employing oxygen-emitting medium |
5683518, |
Jan 21 1993 |
MOORE EPITAXIAL INC |
Rapid thermal processing apparatus for processing semiconductor wafers |
5788777, |
Mar 06 1997 |
Northrop Grumman Systems Corporation |
Susceptor for an epitaxial growth factor |
5840124, |
Jun 30 1997 |
EMCORE CORPORATION, A CORPORATION OF NEW JERSEY |
Wafer carrier with flexible wafer flat holder |
5865666, |
Aug 20 1997 |
Bell Semiconductor, LLC |
Apparatus and method for polish removing a precise amount of material from a wafer |
6080042, |
Oct 31 1997 |
Virginia Semiconductor, Inc. |
Flatness and throughput of single side polishing of wafers |
6241825, |
Apr 16 1999 |
CuTek Research Inc. |
Compliant wafer chuck |
6375749, |
Jul 14 1999 |
SEH America, Inc. |
Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth |
6454635, |
Aug 08 2000 |
SUNEDISON SEMICONDUCTOR LIMITED UEN201334164H |
Method and apparatus for a wafer carrier having an insert |
6500059, |
Dec 01 2000 |
Taiwan Semiconductor Manufacturing Company, Ltd |
Apparatus and method for mounting a wafer in a polishing machine |
6514424, |
May 11 2000 |
Siltronic AG |
Process for the double-side polishing of semiconductor wafers and carrier for carrying out the process |
6666948, |
Apr 23 2001 |
|
Silicon wafer polisher |
6709981, |
Aug 16 2000 |
GLOBALWAFERS CO , LTD |
Method and apparatus for processing a semiconductor wafer using novel final polishing method |
6733367, |
Apr 23 2001 |
|
Method and apparatus for polishing silicon wafers |
7008308, |
May 20 2003 |
SUNEDISON SEMICONDUCTOR LIMITED UEN201334164H |
Wafer carrier |
7169234, |
Jan 30 2004 |
ASM IP HOLDING B V |
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder |
7235139, |
Oct 28 2003 |
Veeco Instruments INC |
Wafer carrier for growing GaN wafers |
7252737, |
Aug 09 2001 |
Applied Materials, Inc. |
Pedestal with integral shield |
8177993, |
Nov 05 2006 |
ALSEPHINA INNOVATIONS INC |
Apparatus and methods for cleaning and drying of wafers |
8182315, |
Mar 24 2008 |
|
Chemical mechanical polishing pad and dresser |
8328600, |
Mar 12 2010 |
|
Workpiece spindles supported floating abrasive platen |
20020011204, |
|
|
|
20030057089, |
|
|
|
20090194026, |
|
|
|
D633452, |
Aug 27 2009 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing apparatus |
D674759, |
Aug 19 2010 |
EPISTAR CORPORATION |
Wafer carrier |