FIG. 1 is a perspective view of a chemical vapor deposition wafer carrier with thermal cover showing our new design.
FIG. 2 is a top plan view thereof.
FIG. 3 is a right side view thereof, with the left side view, front view, and rear view being identical.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is an exploded view thereof, with portions of the thermal cover elevated from the remainder of the chemical vapor deposition wafer carrier with thermal cover.
FIG. 6 is a bottom perspective view thereof; and,
FIG. 7 is a perspective view of the thermal cover of the chemical vapor deposition wafer carrier with thermal cover, shown separately for ease of illustration.
Patent |
Priority |
Assignee |
Title |
3461537, |
|
|
|
3783822, |
|
|
|
3845738, |
|
|
|
3895967, |
|
|
|
4165584, |
Jan 27 1977 |
ITT Corporation |
Apparatus for lapping or polishing materials |
5152842, |
Dec 05 1991 |
Rohm Co., Ltd.; Exar Corporation |
Reactor for epitaxial growth |
5191738, |
Jun 16 1989 |
Shin-Etsu Handotai Co., Ltd. |
Method of polishing semiconductor wafer |
5242501, |
Sep 10 1982 |
Lam Research Corporation |
Susceptor in chemical vapor deposition reactors |
5690742, |
Feb 26 1996 |
KOMATSU ELECTRONIC METALS CO , LTD |
Susceptor for an epitaxial growth apparatus |
6001183, |
Jun 10 1996 |
Veeco Instruments INC |
Wafer carriers for epitaxial growth processes |
6436796, |
Jan 31 2000 |
MATTSON TECHNOLOGY, INC; BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO , LTD |
Systems and methods for epitaxial processing of a semiconductor substrate |
6492625, |
Sep 27 2000 |
Veeco Instruments INC |
Apparatus and method for controlling temperature uniformity of substrates |
6506252, |
Feb 07 2001 |
Veeco Instruments INC |
Susceptorless reactor for growing epitaxial layers on wafers by chemical vapor deposition |
6666756, |
Mar 31 2000 |
Applied Materials, Inc |
Wafer carrier head assembly |
6902623, |
Jun 07 2001 |
Veeco Instruments INC |
Reactor having a movable shutter |
7101272, |
Jan 15 2005 |
Applied Materials, Inc. |
Carrier head for thermal drift compensation |
7122844, |
May 13 2002 |
Cree, Inc |
Susceptor for MOCVD reactor |
7276124, |
Jun 07 2001 |
Veeco Instruments Inc. |
Reactor having a movable shutter |
8021487, |
Dec 12 2007 |
Veeco Instruments INC |
Wafer carrier with hub |
8092599, |
Jul 10 2007 |
Veeco Instruments INC |
Movable injectors in rotating disc gas reactors |
8093696, |
May 16 2008 |
Polaris Innovations Limited |
Semiconductor device |
8182315, |
Mar 24 2008 |
|
Chemical mechanical polishing pad and dresser |
8216379, |
Apr 23 2009 |
Applied Materials, Inc. |
Non-circular substrate holders |
8366830, |
Mar 04 2003 |
Cree, Inc |
Susceptor apparatus for inverted type MOCVD reactor |
8367477, |
Mar 13 2009 |
XINTEC INC |
Electronic device package and method for forming the same |
8372204, |
May 13 2002 |
Cree, Inc. |
Susceptor for MOCVD reactor |
8486726, |
Dec 02 2009 |
Veeco Instruments INC |
Method for improving performance of a substrate carrier |
8518753, |
Nov 15 2011 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Assembly method for three dimensional integrated circuit |
8535445, |
Aug 13 2010 |
Veeco Instruments INC |
Enhanced wafer carrier |
8552547, |
Mar 13 2009 |
|
Electronic device package and method for forming the same |
8562746, |
Dec 15 2010 |
Veeco Instruments INC |
Sectional wafer carrier |
8603248, |
Feb 10 2006 |
Veeco Instruments INC |
System and method for varying wafer surface temperature via wafer-carrier temperature offset |
9017483, |
Mar 21 2008 |
Sumco Corporation; Sumco Techxiv Corp. |
Susceptor for vapor phase epitaxial growth device |
20020027762, |
|
|
|
20030057089, |
|
|
|
20040179323, |
|
|
|
20050011436, |
|
|
|
20050274374, |
|
|
|
20060102081, |
|
|
|
20070186853, |
|
|
|
20090155028, |
|
|
|
20090224175, |
|
|
|
20100055318, |
|
|
|
20100055320, |
|
|
|
20100162957, |
|
|
|
20100190418, |
|
|
|
20110049779, |
|
|
|
20110290175, |
|
|
|
20110300297, |
|
|
|
20120040097, |
|
|
|
20120156374, |
|
|
|
20120234229, |
|
|
|
20120240859, |
|
|
|
20120272892, |
|
|
|
20130175005, |
|
|
|
20130276704, |
|
|
|
20130291798, |
|
|
|
20140110894, |
|
|
|
20140261187, |
|
|
|
20140261698, |
|
|
|
20140360430, |
|
|
|
20150118009, |
|
|
|
20150187620, |
|
|
|
20150330601, |
|
|
|
20160251758, |
|
|
|
20170076972, |
|
|
|
20170121847, |
|
|
|
CN102130035, |
|
|
|
CN103258763, |
|
|
|
CN105369348, |
|
|
|
CN105810625, |
|
|
|
CN105810626, |
|
|
|
CN202492576, |
|
|
|
CN203569185, |
|
|
|
CN203569186, |
|
|
|
CN203715721, |
|
|
|
CN204982132, |
|
|
|
CN206127421, |
|
|
|
D320361, |
Jun 02 1989 |
Tokyo Electron Limited |
Wafer probe plate holder |
D325934, |
Apr 20 1990 |
|
Holder for crayons, markers, pencils and the like |
D517073, |
Jul 14 2004 |
CAPITAL ONE SERVICES LLC |
Data card |
D674759, |
Aug 19 2010 |
EPISTAR CORPORATION |
Wafer carrier |
D686175, |
Mar 20 2012 |
Veeco Instruments INC |
Wafer carrier having pockets |
D686582, |
Mar 20 2012 |
Veeco Instruments INC |
Wafer carrier having pockets |
D690671, |
Mar 20 2012 |
Veeco Instruments INC |
Wafer carrier having pockets |
D695241, |
Mar 20 2012 |
Veeco Instruments INC |
Wafer carrier having pockets |
D695242, |
Mar 20 2012 |
Veeco Instruments INC |
Wafer carrier having pockets |
D704155, |
Feb 18 2011 |
EPISTAR CORPORATION |
Wafer carrier |
D721417, |
Apr 11 2013 |
CANADA PIPELINE ACCESSORIES, CO LTD |
Flow conditioner |
D731409, |
Jun 26 2014 |
Water Technology, LLC |
Surface ornamentation for a passive solar heating article |
D754785, |
Jan 22 2014 |
TECH SAFETY LINES, INC |
Musical steel pan with drum sticks |
D778247, |
Apr 16 2015 |
Veeco Instruments Inc.; VEECO INSTRUMENTS, INC |
Wafer carrier with a multi-pocket configuration |
D793971, |
Mar 27 2015 |
Veeco Instruments INC |
Wafer carrier with a 14-pocket configuration |
D793972, |
Mar 27 2015 |
Veeco Instruments INC |
Wafer carrier with a 31-pocket configuration |
D797067, |
Apr 21 2015 |
Applied Materials, Inc |
Target profile for a physical vapor deposition chamber target |
D806046, |
Apr 16 2015 |
Veeco Instruments Inc. |
Wafer carrier with a multi-pocket configuration |
D813181, |
Jul 26 2016 |
KOKUSAI ELECTRIC CORPORATION |
Cover of seal cap for reaction chamber of semiconductor |
DE10261362, |
|
|
|
EP795624, |
|
|
|
EP1096549, |
|
|
|
JP10167885, |
|
|
|
JP10167886, |
|
|
|
JP2004128271, |
|
|
|
JP2006066417, |
|
|
|
JP4110466, |
|
|
|
JP5156240, |
|
|
|
JP58128724, |
|
|
|
KR100854974, |
|
|
|
KR101235928, |
|
|
|
KR1020090036722, |
|
|
|
KR1020090038606, |
|
|
|
TW142257, |
|
|
|
TW152296, |
|
|
|
TW181305, |
|
|
|
TW181306, |
|
|
|
TW201624596, |
|
|
|
TW201624605, |
|
|
|
TW496228, |
|
|
|
TW531049, |
|
|
|
WO1999018599, |
|
|
|
WO2003069029, |
|
|
|
WO2012021370, |
|
|
|
WO2013123859, |
|
|
|