Patent
   D958093
Priority
Nov 28 2019
Filed
May 26 2020
Issued
Jul 19 2022
Expiry
Jul 19 2037
Assg.orig
Entity
unknown
1
11
n/a
I claim the ornamental design for a boat of substrate processing apparatus, as shown and described.

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a rear elevational view thereof;

FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 2 thereof;

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;

FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 2 thereof;

FIG. 11 is a perspective view of the claimed portion indicated by the solid line FIG thereof;

FIG. 12 is a front elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 13 is a left side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 14 is a right side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 15 is a top plan view of the claimed portion indicated by the solid line in FIG. 8 thereof;

FIG. 16 is a bottom plan elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof; and,

FIG. 17 is a rear elevational view of the claimed portion indicated by the solid line in FIG. 8.

The broken lines shown represent environmental subject matter and form no part of the claimed design. The dashed-dot-dashed broken lines define the bounds of the claim and form no part thereof.

Murata, Satoru

Patent Priority Assignee Title
D981971, Mar 15 2021 KOKUSAI ELECTRIC CORPORATION Boat of substrate processing apparatus
Patent Priority Assignee Title
6341935, Jun 14 2000 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
7484958, Jul 16 2003 SHIN-ETSU HANDOTAI CO , LTD Vertical boat for heat treatment and method for producing the same
20020092815,
20020113027,
D655255, Jun 18 2010 KOKUSAI ELECTRIC CORPORATION Boat of wafer processing apparatus
D655682, Jun 18 2010 KOKUSAI ELECTRIC CORPORATION Boat of wafer processing apparatus
D740769, Mar 22 2013 KOKUSAI ELECTRIC CORPORATION Boat for substrate processing apparatus
D772183, Nov 20 2014 Tokyo Electron Limited Wafer boat
D791721, Nov 20 2014 Tokyo Electron Limited Wafer boat
D868012, Jan 18 2017 KOKUSAI ELECTRIC CORPORATION Cassette receiving tool for semiconductor manufacturing apparatus
JP1494309,
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May 08 2020MURATA, SATORUKOKUSAI ELECTRIC CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0527530784 pdf
May 26 2020KOKUSAI ELECTRIC CORPORATION(assignment on the face of the patent)
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