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Patent
D868012
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Priority
Jan 18 2017
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Filed
Jul 17 2017
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Issued
Nov 26 2019
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Expiry
Nov 26 2034
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Assg.orig
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Entity
unknown
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1
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10
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n/a
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The ornamental design for a cassette receiving tool for semiconductor manufacturing apparatus, as shown and described.
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FIG. 1 is a front, top, and left side perspective view of a cassette receiving tool for semiconductor manufacturing apparatus, showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view; and,
FIG. 8 is a cross sectional view taken along line 8-8 in FIG. 2.
Karasawa, Tadayoshi
| Patent |
Priority |
Assignee |
Title |
| 5947675, |
Nov 13 1996 |
Tokyo Electron Limited |
Cassette transfer mechanism |
| 5947677, |
Nov 20 1996 |
Tokyo Electron Limited |
Cassette transfer mechanism |
| 6152680, |
Aug 26 1997 |
DAITRON, INC |
Wafer cassette rotation mechanism |
| 6270307, |
Jan 25 1999 |
Chartered Semiconductor Manufacturing Company |
Method for aligning wafers in a cassette |
| 6595841, |
Dec 20 2001 |
Taiwan Semiconductor Manufacturing Co., Ltd. |
Apparatus for holding wafer cassettes in a cassette tub during a chemical mechanical polishing process |
| 8676375, |
Feb 27 2012 |
Veeco Instruments INC |
Automated cassette-to-cassette substrate handling system |
| D665759, |
Dec 14 2010 |
Tokyo Electron Limited |
Substrate transfer holder |
| D674365, |
Jan 20 2011 |
Tokyo Electron Limited |
Arm for wafer transportation for manufacturing semiconductor |
| D695240, |
Oct 20 2011 |
Tokyo Electron Limited |
Arm for wafer transportation for manufacturing semiconductor |
| D701498, |
Oct 20 2011 |
Tokyo Electron Limited |
Arm for wafer transportation for manufacturing semiconductor |
| Date |
Maintenance Fee Events |
n/a
| Date |
Maintenance Schedule |
n/a