Patent
   D665759
Priority
Dec 14 2010
Filed
Jun 10 2011
Issued
Aug 21 2012
Expiry
Aug 21 2026
Assg.orig
Entity
unknown
9
6
n/a
The ornamental design for a substrate transfer holder, as shown and described.

FIG. 1 is a top perspective view of a substrate transfer holder showing my new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side view thereof, the right side being a mirror image;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is an enlarged fragmental view taken along 7-7 of FIG. 5 thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 7 thereof.

The broken lines shown represent unclaimed subject matter and form no part of the claimed design. The alternating long and short dashed lines in the drawings define the boundaries between the claimed and unclaimed features. None of the broken lines form any part of the claim.

The article is a substrate transfer holder for holding and transferring a circular substrate, for example, a semiconductor wafer or the like. Parts indicated by solid lines are the part of article for which a design patent is sought.

Sato, Norifumi

Patent Priority Assignee Title
D785578, Mar 22 2016 ASM IP Holding B.V. Substrate supporting arm for semiconductor manufacturing apparatus
D805044, Oct 30 2015 HIRATA CORPORATION Adhesive sheet for substrate
D811457, Nov 02 2015 HIRATA CORPORATION Substrate conveyance arm
D812014, Jul 30 2015 Japan Aviation Electronics Industry, Limited Ring for holding the connections of the connectors
D813283, Jun 17 2015 THK CO , LTD Robot hand
D868012, Jan 18 2017 KOKUSAI ELECTRIC CORPORATION Cassette receiving tool for semiconductor manufacturing apparatus
D868013, Jan 18 2017 KOKUSAI ELECTRIC CORPORATION Cassette receiving tool for semiconductor manufacturing apparatus
D877706, Jan 18 2017 KOKUSAI ELECTRIC CORPORATION Cassette displacement prevention jig of semiconductor manufacturing apparatus
D938373, Oct 25 2019 Applied Materials, Inc Substrate transfer structure
Patent Priority Assignee Title
6578891, Jul 08 1999 Ebara Corporation Substrate holder and substrate transfer apparatus using the same
6874515, Apr 25 2001 Tokyo Electron Limited Substrate dual-side processing apparatus
20070076345,
D552138, Jun 29 2005 Tokyo Electron Limited Arm transferring substrate to be processed
D614593, Jul 21 2008 ASM KOREA LTD Substrate support for a semiconductor deposition apparatus
JP1286013,
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May 11 2011SATO, NORIFUMITokyo Electron LimitedASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0264260946 pdf
Jun 10 2011Tokyo Electron Limited(assignment on the face of the patent)
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