Patent
   D811457
Priority
Nov 02 2015
Filed
Nov 02 2015
Issued
Feb 27 2018
Expiry
Feb 27 2033

TERM.DISCL.
Assg.orig
Entity
unknown
3
10
n/a
The ornamental design for the substrate conveyance arm, as shown and described.

FIG. 1 is a front perspective view of the substrate conveyance arm according to the first embodiment showing our new design;

FIG. 2 is a rear perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a rear view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a top plan view thereof;

FIG. 8 is a bottom view thereof;

FIG. 9 is a partially enlarged view of a circle portion of 9 in FIG. 1 thereof;

FIG. 10 is a partially enlarged view of a circle portion of 10 in FIG. 2 thereof;

FIG. 11 is a cross sectional view at 11-11 in FIG. 3 thereof;

FIG. 12 is a front perspective view of the substrate conveyance arm according to the second embodiment showing our new design;

FIG. 13 is a rear perspective view thereof;

FIG. 14 is a front view thereof;

FIG. 15 is a rear view thereof;

FIG. 16 is a right side view thereof;

FIG. 17 is a left side view thereof;

FIG. 18 is a top plan view thereof;

FIG. 19 is a bottom view thereof;

FIG. 20 is a partially enlarged view of a circle portion of 20 in FIG. 12 thereof;

FIG. 21 is a partially enlarged view of a circle portion of 21 in FIG. 13 thereof; and,

FIG. 22 is a cross sectional view at 22-22 in FIG. 14 thereof.

The broken lines in the drawings depict unclaimed environmental subject matter.

Sakai, Tetsuya, Sakaue, Hideki

Patent Priority Assignee Title
D831085, Dec 09 2016 HITACHI HIGH-TECH CORPORATION Substrate processing unit
D831086, Dec 09 2016 HITACHI HIGH-TECH CORPORATION Substrate processing unit
D847237, Dec 09 2016 HITACHI HIGH-TECH CORPORATION Substrate processing unit
Patent Priority Assignee Title
6189943, Dec 15 1998 Tokyo Seimitsu Co., Ltd. Robot hand
6578891, Jul 08 1999 Ebara Corporation Substrate holder and substrate transfer apparatus using the same
20060210387,
20120189419,
20120301832,
20160148812,
20170052460,
D552138, Jun 29 2005 Tokyo Electron Limited Arm transferring substrate to be processed
D665759, Dec 14 2010 Tokyo Electron Limited Substrate transfer holder
D666979, Dec 14 2010 Tokyo Electron Limited Substrate holder
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Executed onAssignorAssigneeConveyanceFrameReelDoc
Oct 20 2015SAKAI, TETSUYAHIRATA CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0369370215 pdf
Oct 20 2015SAKAUE, HIDEKIHIRATA CORPORATIONASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0369370215 pdf
Nov 02 2015HIRATA CORPORATION(assignment on the face of the patent)
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