FIG. 1 is a front perspective view of the substrate conveyance arm according to the first embodiment showing our new design;
FIG. 2 is a rear perspective view thereof;
FIG. 3 is a front view thereof;
FIG. 4 is a rear view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a top plan view thereof;
FIG. 8 is a bottom view thereof;
FIG. 9 is a partially enlarged view of a circle portion of 9 in FIG. 1 thereof;
FIG. 10 is a partially enlarged view of a circle portion of 10 in FIG. 2 thereof;
FIG. 11 is a cross sectional view at 11-11 in FIG. 3 thereof;
FIG. 12 is a front perspective view of the substrate conveyance arm according to the second embodiment showing our new design;
FIG. 13 is a rear perspective view thereof;
FIG. 14 is a front view thereof;
FIG. 15 is a rear view thereof;
FIG. 16 is a right side view thereof;
FIG. 17 is a left side view thereof;
FIG. 18 is a top plan view thereof;
FIG. 19 is a bottom view thereof;
FIG. 20 is a partially enlarged view of a circle portion of 20 in FIG. 12 thereof;
FIG. 21 is a partially enlarged view of a circle portion of 21 in FIG. 13 thereof; and,
FIG. 22 is a cross sectional view at 22-22 in FIG. 14 thereof.
The broken lines in the drawings depict unclaimed environmental subject matter.