Substrate holder

Abstract

Description

FIG. 1 is a top perspective view of a substrate holder showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a left side view thereof, the right side being a mirror image;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof; and,

FIG. 7 is an enlarged cross-sectional view taken along line 7-7 of FIG. 5 thereof.

The article is a substrate holder exchangeably attached to a substrate transfer arm holding and transferring a circular substrate, for example, a semiconductor wafer or the like.

Claims

What is claimed is the ornamental design for a substrate holder, as shown and described.