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Patent
D926715
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Priority
Jul 29 2019
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Filed
Nov 12 2019
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Issued
Aug 03 2021
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Expiry
Aug 03 2036
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Assg.orig
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Entity
unknown
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6
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14
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n/a
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The ornamental design for a support for a wafer for fabricating a semiconductor, as shown and described.
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FIG. 1 is a front view of a support for a wafer for fabricating a semiconductor showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a top perspective view thereof; and,
FIG. 8 is a bottom perspective view thereof.
Okabe, Akira, Takenaga, Yukio
Patent |
Priority |
Assignee |
Title |
10854498, |
Jul 15 2011 |
ASM IP Holding B.V.; ASM JAPAN K K |
Wafer-supporting device and method for producing same |
6572814, |
Sep 08 1998 |
Applied Materials Inc. |
Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas |
20030029570, |
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20040124413, |
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D552565, |
Sep 08 2005 |
TOKYO OHKA KOGYO CO , LTD |
Supporting plate |
D606952, |
Jan 16 2009 |
ASM KOREA LTD |
Plasma inducing plate for semiconductor deposition apparatus |
D614593, |
Jul 21 2008 |
ASM KOREA LTD |
Substrate support for a semiconductor deposition apparatus |
D616394, |
Mar 06 2009 |
Tokyo Electron Limited |
Support of wafer boat for manufacturing semiconductor wafers |
D616395, |
Mar 11 2009 |
Tokyo Electron Limited |
Support of wafer boat for manufacturing semiconductor wafers |
D784276, |
Aug 06 2013 |
Applied Materials, Inc |
Susceptor assembly |
D819580, |
Apr 01 2016 |
VEECO INSTRUMENTS, INC |
Self-centering wafer carrier for chemical vapor deposition |
D830981, |
Apr 07 2017 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Susceptor for semiconductor substrate processing apparatus |
D864134, |
Oct 24 2018 |
ASM IP Holding B.V. |
Susceptor |
JP1399397, |
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Date |
Maintenance Fee Events |
n/a
Date |
Maintenance Schedule |
n/a