Patent |
Priority |
Assignee |
Title |
10023960, |
Sep 12 2012 |
ASM IP Holdings B.V. |
Process gas management for an inductively-coupled plasma deposition reactor |
10229833, |
Nov 01 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
10236177, |
Aug 22 2017 |
ASM IP HOLDING B V |
Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures |
10249524, |
Aug 09 2017 |
ASM IP Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
10249577, |
May 17 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming metal interconnection and method of fabricating semiconductor apparatus using the method |
10262859, |
Mar 24 2016 |
ASM IP Holding B.V. |
Process for forming a film on a substrate using multi-port injection assemblies |
10269558, |
Dec 22 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming a structure on a substrate |
10276355, |
Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
10283353, |
Mar 29 2017 |
ASM IP HOLDING B V |
Method of reforming insulating film deposited on substrate with recess pattern |
10290508, |
Dec 05 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming vertical spacers for spacer-defined patterning |
10312055, |
Jul 26 2017 |
ASM IP Holding B.V. |
Method of depositing film by PEALD using negative bias |
10312129, |
Sep 29 2015 |
ASM IP Holding B.V. |
Variable adjustment for precise matching of multiple chamber cavity housings |
10319588, |
Oct 10 2017 |
ASM IP HOLDING B V |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
10322384, |
Nov 09 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Counter flow mixer for process chamber |
10340125, |
Mar 08 2013 |
ASM IP Holding B.V. |
Pulsed remote plasma method and system |
10340135, |
Nov 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
10343920, |
Mar 18 2016 |
ASM IP HOLDING B V |
Aligned carbon nanotubes |
10361201, |
Sep 27 2013 |
ASM IP Holding B.V. |
Semiconductor structure and device formed using selective epitaxial process |
10364493, |
Aug 25 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Exhaust apparatus and substrate processing apparatus having an exhaust line with a first ring having at least one hole on a lateral side thereof placed in the exhaust line |
10364496, |
Jun 27 2011 |
ASM IP Holding B.V. |
Dual section module having shared and unshared mass flow controllers |
10366864, |
Mar 18 2013 |
ASM IP Holding B.V. |
Method and system for in-situ formation of intermediate reactive species |
10367080, |
May 02 2016 |
ASM IP HOLDING B V |
Method of forming a germanium oxynitride film |
10378106, |
Nov 14 2008 |
ASM IP Holding B.V. |
Method of forming insulation film by modified PEALD |
10381219, |
Oct 25 2018 |
ASM IP Holding B.V. |
Methods for forming a silicon nitride film |
10381226, |
Jul 27 2016 |
ASM IP Holding B.V. |
Method of processing substrate |
10388509, |
Jun 28 2016 |
ASM IP Holding B.V. |
Formation of epitaxial layers via dislocation filtering |
10388513, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
10395919, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
10403504, |
Oct 05 2017 |
ASM IP HOLDING B V |
Method for selectively depositing a metallic film on a substrate |
10410943, |
Oct 13 2016 |
ASM IP Holding B.V. |
Method for passivating a surface of a semiconductor and related systems |
10435790, |
Nov 01 2016 |
ASM IP Holding B.V. |
Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
10438965, |
Dec 22 2014 |
ASM IP Holding B.V. |
Semiconductor device and manufacturing method thereof |
10446393, |
May 08 2017 |
ASM IP Holding B.V. |
Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
10458018, |
Jun 26 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Structures including metal carbide material, devices including the structures, and methods of forming same |
10468251, |
Feb 19 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
10468261, |
Feb 15 2017 |
ASM IP HOLDING B V |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
10468262, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structures |
10480072, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
10483099, |
Jul 26 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming thermally stable organosilicon polymer film |
10501866, |
Mar 09 2016 |
ASM IP Holding B.V. |
Gas distribution apparatus for improved film uniformity in an epitaxial system |
10504742, |
May 31 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of atomic layer etching using hydrogen plasma |
10510536, |
Mar 29 2018 |
ASM IP Holding B.V. |
Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
10529542, |
Mar 11 2015 |
ASM IP Holdings B.V. |
Cross-flow reactor and method |
10529554, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
10529563, |
Mar 29 2017 |
ASM IP Holdings B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
10535516, |
Feb 01 2018 |
ASM IP Holdings B.V. |
Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
10541173, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
10541333, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
10559458, |
Nov 26 2018 |
ASM IP Holding B.V. |
Method of forming oxynitride film |
10561975, |
Oct 07 2014 |
ASM IP Holdings B.V. |
Variable conductance gas distribution apparatus and method |
10566223, |
Aug 28 2012 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Systems and methods for dynamic semiconductor process scheduling |
10590535, |
Jul 26 2017 |
ASM IP HOLDING B V |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
10600673, |
Jul 07 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Magnetic susceptor to baseplate seal |
10604847, |
Mar 18 2014 |
ASM IP Holding B.V. |
Gas distribution system, reactor including the system, and methods of using the same |
10605530, |
Jul 26 2017 |
ASM IP Holding B.V. |
Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
10607895, |
Sep 18 2017 |
ASM IP HOLDING B V |
Method for forming a semiconductor device structure comprising a gate fill metal |
10612136, |
Jun 29 2018 |
ASM IP HOLDING B V ; ASM IP Holding, B.V. |
Temperature-controlled flange and reactor system including same |
10612137, |
Jul 08 2016 |
ASM IP HOLDING B V |
Organic reactants for atomic layer deposition |
10622375, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
10643826, |
Oct 26 2016 |
ASM IP HOLDING B V |
Methods for thermally calibrating reaction chambers |
10643904, |
Nov 01 2016 |
ASM IP HOLDING B V |
Methods for forming a semiconductor device and related semiconductor device structures |
10644025, |
Nov 07 2016 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by using the method |
10655221, |
Feb 09 2017 |
ASM IP Holding B.V. |
Method for depositing oxide film by thermal ALD and PEALD |
10658181, |
Feb 20 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of spacer-defined direct patterning in semiconductor fabrication |
10658205, |
Sep 28 2017 |
ASM IP HOLDING B V |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
10665452, |
May 02 2016 |
ASM IP Holdings B.V. |
Source/drain performance through conformal solid state doping |
10672636, |
Aug 09 2017 |
ASM IP Holding B.V. |
Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
10683571, |
Feb 25 2014 |
ASM IP Holding B.V. |
Gas supply manifold and method of supplying gases to chamber using same |
10685834, |
Jul 05 2017 |
ASM IP Holdings B.V. |
Methods for forming a silicon germanium tin layer and related semiconductor device structures |
10692741, |
Aug 08 2017 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Radiation shield |
10707106, |
Jun 06 2011 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
10714315, |
Oct 12 2012 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Semiconductor reaction chamber showerhead |
10714335, |
Apr 25 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of depositing thin film and method of manufacturing semiconductor device |
10714350, |
Nov 01 2016 |
ASM IP Holdings, B.V.; ASM IP HOLDING B V |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
10714385, |
Jul 19 2016 |
ASM IP Holding B.V. |
Selective deposition of tungsten |
10720322, |
Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top surface |
10720331, |
Nov 01 2016 |
ASM IP Holdings, B.V. |
Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
10731249, |
Feb 15 2018 |
ASM IP HOLDING B V |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
10734223, |
Oct 10 2017 |
ASM IP Holding B.V. |
Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
10734244, |
Nov 16 2017 |
ASM IP Holding B.V. |
Method of processing a substrate and a device manufactured by the same |
10734497, |
Jul 18 2017 |
ASM IP HOLDING B V |
Methods for forming a semiconductor device structure and related semiconductor device structures |
10741385, |
Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
10755922, |
Jul 03 2018 |
ASM IP HOLDING B V |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
10755923, |
Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
10767789, |
Jul 16 2018 |
ASM IP Holding B.V. |
Diaphragm valves, valve components, and methods for forming valve components |
10770286, |
May 08 2017 |
ASM IP Holdings B.V.; ASM IP HOLDING B V |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
10770336, |
Aug 08 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate lift mechanism and reactor including same |
10784102, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
10787741, |
Aug 21 2014 |
ASM IP Holding B.V. |
Method and system for in situ formation of gas-phase compounds |
10797133, |
Jun 21 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
10804098, |
Aug 14 2009 |
ASM IP HOLDING B V |
Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
10811256, |
Oct 16 2018 |
ASM IP Holding B.V. |
Method for etching a carbon-containing feature |
10818758, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
10829852, |
Aug 16 2018 |
ASM IP Holding B.V. |
Gas distribution device for a wafer processing apparatus |
10832903, |
Oct 28 2011 |
ASM IP Holding B.V. |
Process feed management for semiconductor substrate processing |
10844484, |
Sep 22 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
10844486, |
Apr 06 2009 |
ASM IP HOLDING B V |
Semiconductor processing reactor and components thereof |
10847365, |
Oct 11 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming conformal silicon carbide film by cyclic CVD |
10847366, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
10847371, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
10851456, |
Apr 21 2016 |
ASM IP Holding B.V. |
Deposition of metal borides |
10854498, |
Jul 15 2011 |
ASM IP Holding B.V.; ASM JAPAN K K |
Wafer-supporting device and method for producing same |
10858737, |
Jul 28 2014 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Showerhead assembly and components thereof |
10865475, |
Apr 21 2016 |
ASM IP HOLDING B V |
Deposition of metal borides and silicides |
10867786, |
Mar 30 2018 |
ASM IP Holding B.V. |
Substrate processing method |
10867788, |
Dec 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of forming a structure on a substrate |
10872771, |
Jan 16 2018 |
ASM IP Holding B. V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
10883175, |
Aug 09 2018 |
ASM IP HOLDING B V |
Vertical furnace for processing substrates and a liner for use therein |
10886123, |
Jun 02 2017 |
ASM IP Holding B.V. |
Methods for forming low temperature semiconductor layers and related semiconductor device structures |
10892156, |
May 08 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
10896820, |
Feb 14 2018 |
ASM IP HOLDING B V |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
10910262, |
Nov 16 2017 |
ASM IP HOLDING B V |
Method of selectively depositing a capping layer structure on a semiconductor device structure |
10914004, |
Jun 29 2018 |
ASM IP Holding B.V. |
Thin-film deposition method and manufacturing method of semiconductor device |
10923344, |
Oct 30 2017 |
ASM IP HOLDING B V |
Methods for forming a semiconductor structure and related semiconductor structures |
10928731, |
Sep 21 2017 |
ASM IP Holding B.V. |
Method of sequential infiltration synthesis treatment of infiltrateable material and structures and devices formed using same |
10934619, |
Nov 15 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas supply unit and substrate processing apparatus including the gas supply unit |
10941490, |
Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
10943771, |
Oct 26 2016 |
ASM IP Holding B.V. |
Methods for thermally calibrating reaction chambers |
10950432, |
Apr 25 2017 |
ASM IP Holding B.V. |
Method of depositing thin film and method of manufacturing semiconductor device |
10975470, |
Feb 23 2018 |
ASM IP Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
11001925, |
Dec 19 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11004977, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
11015245, |
Mar 19 2014 |
ASM IP Holding B.V. |
Gas-phase reactor and system having exhaust plenum and components thereof |
11018002, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
11018047, |
Jan 25 2018 |
ASM IP Holding B.V. |
Hybrid lift pin |
11022879, |
Nov 24 2017 |
ASM IP Holding B.V. |
Method of forming an enhanced unexposed photoresist layer |
11024523, |
Sep 11 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus and method |
11031242, |
Nov 07 2018 |
ASM IP Holding B.V. |
Methods for depositing a boron doped silicon germanium film |
11049751, |
Sep 14 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
11053591, |
Aug 06 2018 |
ASM IP Holding B.V. |
Multi-port gas injection system and reactor system including same |
11056344, |
Aug 30 2017 |
ASM IP HOLDING B V |
Layer forming method |
11056567, |
May 11 2018 |
ASM IP Holding B.V. |
Method of forming a doped metal carbide film on a substrate and related semiconductor device structures |
11069510, |
Aug 30 2017 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11081345, |
Feb 06 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method of post-deposition treatment for silicon oxide film |
11087997, |
Oct 31 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus for processing substrates |
11088002, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate rack and a substrate processing system and method |
11094546, |
Oct 05 2017 |
ASM IP Holding B.V. |
Method for selectively depositing a metallic film on a substrate |
11094582, |
Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
11101370, |
May 02 2016 |
ASM IP Holding B.V. |
Method of forming a germanium oxynitride film |
11107676, |
Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
11114283, |
Mar 16 2018 |
ASM IP Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same |
11114294, |
Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOC layer and method of forming same |
11127589, |
Feb 01 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
11127617, |
Nov 27 2017 |
ASM IP HOLDING B V |
Storage device for storing wafer cassettes for use with a batch furnace |
11139191, |
Aug 09 2017 |
ASM IP HOLDING B V |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
11139308, |
Dec 29 2015 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Atomic layer deposition of III-V compounds to form V-NAND devices |
11158513, |
Dec 13 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
11164955, |
Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
11168395, |
Jun 29 2018 |
ASM IP Holding B.V. |
Temperature-controlled flange and reactor system including same |
11171025, |
Jan 22 2019 |
ASM IP Holding B.V. |
Substrate processing device |
11205585, |
Jul 28 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus and method of operating the same |
11217444, |
Nov 30 2018 |
ASM IP HOLDING B V |
Method for forming an ultraviolet radiation responsive metal oxide-containing film |
11222772, |
Dec 14 2016 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11227782, |
Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
11227789, |
Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
11230766, |
Mar 29 2018 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
11232963, |
Oct 03 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
11233133, |
Oct 21 2015 |
ASM IP Holding B.V. |
NbMC layers |
11242598, |
Jun 26 2015 |
ASM IP Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same |
11244825, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
11251035, |
Dec 22 2016 |
ASM IP Holding B.V. |
Method of forming a structure on a substrate |
11251040, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method including treatment step and apparatus for same |
11251068, |
Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
11270899, |
Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
11274369, |
Sep 11 2018 |
ASM IP Holding B.V. |
Thin film deposition method |
11282698, |
Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
11286558, |
Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
11286562, |
Jun 08 2018 |
ASM IP Holding B.V. |
Gas-phase chemical reactor and method of using same |
11289326, |
May 07 2019 |
ASM IP Holding B.V. |
Method for reforming amorphous carbon polymer film |
11295980, |
Aug 30 2017 |
ASM IP HOLDING B V |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
11296189, |
Jun 21 2018 |
ASM IP Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
11306395, |
Jun 28 2017 |
ASM IP HOLDING B V |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
11315794, |
Oct 21 2019 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching films |
11339476, |
Oct 08 2019 |
ASM IP Holding B.V. |
Substrate processing device having connection plates, substrate processing method |
11342216, |
Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
11345999, |
Jun 06 2019 |
ASM IP Holding B.V. |
Method of using a gas-phase reactor system including analyzing exhausted gas |
11355338, |
May 10 2019 |
ASM IP Holding B.V. |
Method of depositing material onto a surface and structure formed according to the method |
11361990, |
May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
11374112, |
Jul 19 2017 |
ASM IP Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures |
11378337, |
Mar 28 2019 |
ASM IP Holding B.V. |
Door opener and substrate processing apparatus provided therewith |
11387106, |
Feb 14 2018 |
ASM IP Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
11387120, |
Sep 28 2017 |
ASM IP Holding B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
11390945, |
Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
11390946, |
Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
11393690, |
Jan 19 2018 |
ASM IP HOLDING B V |
Deposition method |
11396702, |
Nov 15 2016 |
ASM IP Holding B.V. |
Gas supply unit and substrate processing apparatus including the gas supply unit |
11398382, |
Mar 27 2018 |
ASM IP Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode |
11401605, |
Nov 26 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11410851, |
Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
11411088, |
Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
11414760, |
Oct 08 2018 |
ASM IP Holding B.V. |
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same |
11417545, |
Aug 08 2017 |
ASM IP Holding B.V. |
Radiation shield |
11424119, |
Mar 08 2019 |
ASM IP HOLDING B V |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
11430640, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11430674, |
Aug 22 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
11437241, |
Apr 08 2020 |
ASM IP Holding B.V. |
Apparatus and methods for selectively etching silicon oxide films |
11443926, |
Jul 30 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
11447861, |
Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
11447864, |
Apr 19 2019 |
ASM IP Holding B.V. |
Layer forming method and apparatus |
11453943, |
May 25 2016 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
11453946, |
Jun 06 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system including a gas detector |
11469098, |
May 08 2018 |
ASM IP Holding B.V. |
Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures |
11473195, |
Mar 01 2018 |
ASM IP Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate |
11476109, |
Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
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Jan 19 2018 |
ASM IP HOLDING B V |
Method for depositing a gap-fill layer by plasma-assisted deposition |
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Feb 20 2018 |
ASM IP Holding B.V. |
Substrate processing method and apparatus |
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Feb 20 2019 |
ASM IP Holding B.V. |
Apparatus and methods for plug fill deposition in 3-D NAND applications |
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Dec 04 2018 |
ASM IP Holding B.V. |
Method of cleaning substrate processing apparatus |
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Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
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Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
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Sep 04 2019 |
ASM IP Holding B.V. |
Methods for selective deposition using a sacrificial capping layer |
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Jun 27 2018 |
ASM IP HOLDING B V |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
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Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
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Oct 12 2012 |
ASM IP Holding B.V. |
Semiconductor reaction chamber showerhead |
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Nov 15 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for providing a semiconductor device with silicon filled gaps |
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Jan 16 2018 |
ASM IP Holding B.V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
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May 01 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Fast FOUP swapping with a FOUP handler |
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May 16 2019 |
ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
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Feb 03 2020 |
ASM IP HOLDING B V |
Method of forming structures including a vanadium or indium layer |
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Aug 23 2019 |
ASM IP Holding B.V. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane |
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Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
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Jun 21 2018 |
ASM IP Holding B.V. |
Substrate processing system |
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Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
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Oct 27 2016 |
ASM IP Holding B.V. |
Deposition of charge trapping layers |
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Jan 20 2020 |
ASM IP Holding B.V. |
Method of forming thin film and method of modifying surface of thin film |
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Apr 01 2019 |
ASM IP Holding B.V. |
Method for manufacturing a semiconductor device |
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Jul 29 2019 |
ASM IP Holding B.V. |
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation |
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Sep 25 2019 |
ASM IP Holding B.V. |
Substrate processing method |
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Nov 06 2018 |
ASM IP Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate |
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Dec 15 2016 |
ASM IP HOLDING B V |
Sequential infiltration synthesis apparatus |
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Aug 30 2017 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
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Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
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Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
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Aug 08 2017 |
ASM IP Holding B.V. |
Substrate lift mechanism and reactor including same |
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Aug 22 2019 |
ASM IP HOLDING B V |
Method for forming a structure with a hole |
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Nov 05 2019 |
ASM IP Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same |
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Jul 09 2019 |
ASM IP Holding B.V. |
Plasma device using coaxial waveguide, and substrate treatment method |
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Oct 02 2019 |
ASM IP Holding B.V. |
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
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Jul 28 2016 |
ASM IP HOLDING B V |
Method and apparatus for filling a gap |
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Jul 17 2019 |
ASM IP HOLDING B V |
Radical assist ignition plasma system and method |
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Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
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May 13 2020 |
ASM IP Holding B.V. |
Laser alignment fixture for a reactor system |
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Nov 20 2019 |
ASM IP Holding B.V. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure |
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Mar 09 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
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Feb 22 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus and method for processing substrates |
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Oct 16 2019 |
ASM IP Holding B.V. |
Method of topology-selective film formation of silicon oxide |
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Oct 17 2019 |
ASM IP Holding B.V. |
Methods for selective deposition of doped semiconductor material |
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Aug 21 2019 |
ASM IP Holding B.V. |
Film-forming material mixed-gas forming device and film forming device |
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Nov 27 2017 |
ASM IP HOLDING B V |
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Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
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Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
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Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
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Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
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Jun 24 2020 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Method for forming a layer provided with silicon |
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Oct 29 2019 |
ASM IP Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
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Jul 08 2016 |
ASM IP Holding B.V. |
Organic reactants for atomic layer deposition |
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Dec 14 2018 |
ASM IP HOLDING B V |
Method of forming a device structure using selective deposition of gallium nitride and system for same |
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Mar 29 2017 |
ASM IP Holding B.V. |
Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
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Jun 30 2020 |
ASM IP HOLDING B V |
Substrate processing method |
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Oct 19 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and substrate processing method |
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Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
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Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
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Jul 20 2020 |
ASM IP Holding B.V. |
Method for depositing molybdenum layers using an underlayer |
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Feb 19 2016 |
ASM IP Holding B.V. |
Method for forming silicon nitride film selectively on top/bottom portions |
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Aug 05 2019 |
ASM IP Holding B.V. |
Liquid level sensor for a chemical source vessel |
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Nov 27 2017 |
ASM IP Holdings B.V. |
Storage device for storing wafer cassettes for use with a batch furnace |
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Feb 14 2018 |
ASM IP HOLDING B V ; Universiteit Gent |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
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Jul 17 2019 |
ASM IP Holding B.V. |
Methods of forming silicon germanium structures |
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Jul 28 2016 |
ASM IP Holding B.V. |
Method and apparatus for filling a gap |
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Jul 18 2017 |
ASM IP Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures |
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May 21 2020 |
ASM IP Holding B.V. |
Structures including multiple carbon layers and methods of forming and using same |
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Jun 04 2018 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas distribution system and reactor system including same |
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Jul 20 2011 |
ASM IP HOLDING B V |
Pressure transmitter for a semiconductor processing environment |
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Aug 26 2020 |
ASM IP Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers |
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Feb 06 2018 |
ASM IP Holding B.V. |
Method of post-deposition treatment for silicon oxide film |
11735422, |
Oct 10 2019 |
ASM IP HOLDING B V |
Method of forming a photoresist underlayer and structure including same |
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Oct 31 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus for processing substrates |
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Mar 12 2015 |
ASM IP Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same |
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Mar 08 2019 |
ASM IP Holding B.V. |
Structure including SiOCN layer and method of forming same |
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Jul 03 2019 |
ASM IP Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same |
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Jul 08 2016 |
ASM IP Holding B.V. |
Selective deposition method to form air gaps |
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May 29 2020 |
ASM IP Holding B.V. |
Substrate processing device |
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Dec 13 2018 |
ASM IP Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
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Aug 09 2017 |
ASM IP Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
11776846, |
Feb 07 2020 |
ASM IP Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices |
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May 07 2019 |
ASM IP Holding B.V. |
Chemical source vessel with dip tube |
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Feb 17 2020 |
ASM IP Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon |
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Oct 07 2014 |
ASM IP Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
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May 01 2020 |
ASM IP Holding B.V. |
Fast FOUP swapping with a FOUP handler |
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Feb 20 2019 |
ASM IP Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface |
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Nov 16 2018 |
ASM IP Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
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Jul 26 2017 |
ASM IP Holding B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
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May 19 2020 |
ASM IP Holding B.V. |
Substrate processing apparatus |
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Sep 11 2018 |
ASM IP Holding B.V. |
Substrate processing apparatus and method |
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Nov 01 2016 |
ASM IP Holding B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
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Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
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Apr 24 2019 |
ASM IP Holding B.V. |
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly |
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Apr 15 2020 |
ASM IP HOLDING B V |
Method for forming precoat film and method for forming silicon-containing film |
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Apr 02 2020 |
ASM IP Holding B.V. |
Thin film forming method |
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Sep 05 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Substrate processing apparatus |
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Aug 23 2019 |
ASM IP Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
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Oct 14 2020 |
ASM IP HOLDING B V |
Method of depositing material on stepped structure |
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Feb 04 2020 |
ASM IP Holding B.V. |
Method and apparatus for transmittance measurements of large articles |
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Aug 29 2017 |
ASM IP HOLDING B V |
Layer forming method and apparatus |
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Apr 03 2020 |
ASM IP Holding B.V. |
Method for forming barrier layer and method for manufacturing semiconductor device |
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Jun 04 2018 |
ASM IP Holding B.V. |
Wafer handling chamber with moisture reduction |
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Mar 11 2020 |
ASM IP Holding B.V. |
Substrate handling device with adjustable joints |
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Dec 04 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus |
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May 08 2017 |
ASM IP Holding B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
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Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
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Nov 02 2018 |
ASM IP Holding B.V. |
Substrate supporting unit and a substrate processing device including the same |
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Oct 22 2020 |
ASM IP HOLDING B V |
Method of depositing vanadium metal |
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Jul 31 2019 |
ASM IP Holding B.V. |
Vertical batch furnace assembly |
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Mar 11 2020 |
ASM IP Holding B.V. |
Lockout tagout assembly and system and method of using same |
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Dec 17 2019 |
ASM IP Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer |
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Dec 22 2020 |
ASM IP Holding B.V. |
Transition metal deposition method |
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Oct 01 2018 |
ASM IP Holding B.V. |
Substrate retaining apparatus, system including the apparatus, and method of using same |
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Apr 24 2020 |
ASM IP Holding B.V. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element |
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Nov 30 2020 |
ASM IP Holding B.V. |
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus |
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Aug 23 2019 |
ASM IP Holding B.V. |
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film |
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Apr 24 2020 |
ASM IP Holding B.V. |
Method of forming vanadium nitride-containing layer |
11901175, |
Mar 08 2019 |
ASM IP Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer |
11901179, |
Oct 28 2020 |
ASM IP HOLDING B V |
Method and device for depositing silicon onto substrates |
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Jun 11 2019 |
ASM IP Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method |
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May 28 2018 |
ASM IP Holding B.V. |
Substrate processing method and device manufactured by using the same |
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Nov 26 2019 |
ASM IP Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
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Nov 29 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing |
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Jul 03 2018 |
ASM IP Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
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Dec 02 2019 |
ASM IP Holding B.V. |
Substrate processing apparatus having electrostatic chuck and substrate processing method |
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Feb 23 2018 |
ASM IP Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
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Dec 16 2020 |
ASM IP HOLDING B V |
Runout and wobble measurement fixtures |
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Jun 27 2018 |
ASM IP Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material |
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Dec 29 2015 |
ASM IP Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices |
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Apr 29 2020 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Solid source precursor vessel |
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Jan 17 2019 |
ASM IP Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process |
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Mar 12 2020 |
ASM IP Holding B.V. |
Method for fabricating layer structure having target topological profile |
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Feb 01 2013 |
ASM IP Holding B.V. |
Method for treatment of deposition reactor |
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Dec 15 2016 |
ASM IP Holding B.V. |
Sequential infiltration synthesis apparatus |
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Jan 19 2018 |
ASM IP Holding B.V. |
Method for depositing a gap-fill layer by plasma-assisted deposition |
11976359, |
Jan 06 2020 |
ASM IP Holding B.V. |
Gas supply assembly, components thereof, and reactor system including same |
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Jun 28 2017 |
ASM IP Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
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Feb 28 2020 |
ASM IP Holding B.V. |
System dedicated for parts cleaning |
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May 22 2020 |
ASM IP Holding B.V. |
Apparatus for depositing thin films using hydrogen peroxide |
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Aug 31 2017 |
ASM IP Holding B.V. |
Substrate processing apparatus |
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Jan 08 2020 |
ASM IP HOLDING B V |
Injector |
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Apr 16 2020 |
ASM IP HOLDING B V |
Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
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Oct 25 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
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Jul 16 2019 |
ASM IP Holding B.V. |
Substrate processing device |
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May 16 2019 |
ASM IP HOLDING B V ; ASM IP Holding B.V. |
Wafer boat handling device, vertical batch furnace and method |
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Jul 17 2020 |
ASM IP Holding B.V. |
Structures and methods for use in photolithography |
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May 15 2020 |
ASM IP Holding B.V. |
Methods for silicon germanium uniformity control using multiple precursors |
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Aug 27 2020 |
ASM IP Holding B.V. |
Method and system for forming patterned structures using multiple patterning process |
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Apr 15 2020 |
ASM IP HOLDING B V |
Method of forming chromium nitride layer and structure including the chromium nitride layer |
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Jun 02 2020 |
ASM IP Holding B.V. |
Rotating substrate support |
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Feb 15 2017 |
ASM IP Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
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Jul 10 2019 |
ASM IP Holding B.V. |
Substrate support assembly and substrate processing device including the same |
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Oct 06 2020 |
ASM IP Holding B.V. |
Deposition method and an apparatus for depositing a silicon-containing material |
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Jul 19 2019 |
ASM IP Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film |
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Dec 19 2019 |
ASM IP Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures |
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Jan 19 2018 |
ASM IP Holding B.V. |
Deposition method |
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Jan 16 2020 |
ASM IP Holding B.V. |
Method of forming high aspect ratio features |
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Dec 22 2020 |
ASM IP Holding B.V. |
Precursor capsule, a vessel and a method |
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Jul 18 2019 |
ASM IP Holding B.V. |
Method of forming structures using a neutral beam |
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Apr 24 2020 |
ASM IP Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply |
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Dec 22 2020 |
ASM IP Holding B.V. |
Plasma treatment device having matching box |
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Sep 16 2020 |
ASM IP HOLDING B V |
Silicon oxide deposition method |
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Aug 14 2020 |
ASM IP Holding B.V. |
Substrate processing method |
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Dec 14 2020 |
ASM IP Holding B.V. |
Method of forming structures for threshold voltage control |
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Jul 30 2019 |
ASM IP HOLDING B V |
Substrate processing apparatus and method |
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Feb 15 2018 |
ASM IP Holding B.V. |
Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
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Mar 17 2020 |
ASM IP Holding B.V. |
Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
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Feb 20 2019 |
ASM IP Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface |
D777851, |
Jun 23 2015 |
Bronze Fist Design, Inc. |
Weight selector pin |
D880437, |
Feb 01 2018 |
ASM IP Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus |
D900036, |
Aug 24 2017 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Heater electrical connector and adapter |
D903477, |
Jan 24 2018 |
ASM IP HOLDING B V |
Metal clamp |
D913980, |
Feb 01 2018 |
ASM IP Holding B.V. |
Gas supply plate for semiconductor manufacturing apparatus |
D922229, |
Jun 05 2019 |
ASM IP Holding B.V. |
Device for controlling a temperature of a gas supply unit |
D930782, |
Aug 22 2019 |
ASM IP Holding B.V. |
Gas distributor |
D931978, |
Jun 27 2019 |
ASM IP Holding B.V. |
Showerhead vacuum transport |
D935572, |
May 24 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Gas channel plate |
D940837, |
Aug 22 2019 |
ASM IP Holding B.V. |
Electrode |
D944946, |
Jun 14 2019 |
ASM IP Holding B.V. |
Shower plate |
D947913, |
May 17 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
D948463, |
Oct 24 2018 |
ASM IP Holding B.V. |
Susceptor for semiconductor substrate supporting apparatus |
D949319, |
Aug 22 2019 |
ASM IP Holding B.V. |
Exhaust duct |
D965044, |
Aug 19 2019 |
ASM IP Holding B.V.; ASM IP HOLDING B V |
Susceptor shaft |
D965524, |
Aug 19 2019 |
ASM IP Holding B.V. |
Susceptor support |
D975665, |
May 17 2019 |
ASM IP Holding B.V. |
Susceptor shaft |
D979506, |
Aug 22 2019 |
ASM IP Holding B.V. |
Insulator |
D980813, |
May 11 2021 |
ASM IP HOLDING B V |
Gas flow control plate for substrate processing apparatus |
D980814, |
May 11 2021 |
ASM IP HOLDING B V |
Gas distributor for substrate processing apparatus |
D981973, |
May 11 2021 |
ASM IP HOLDING B V |
Reactor wall for substrate processing apparatus |
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Fastener installation method |
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Mar 13 1978 |
Equistar Chemicals, LP |
Fast responsive, high pressure thermocouple |
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May 30 1979 |
The United States of America as represented by the United States |
Method of handling radioactive alkali metal waste |
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Sep 12 1980 |
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Spring loaded sensor fitting |
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Jul 09 1979 |
Nippon Kokan Kabushiki Kaisha |
Method for measuring temperature of molten metal received in vessel |
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Sep 08 1982 |
BUSINESS ALLIANCE CAPITAL CORP |
Heat sensing device |
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Sep 07 1982 |
WAHL, WILLIAM |
Thermocouple surface probe |
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Mar 13 1984 |
The United States of America as represented by the United States |
Spring loaded thermocouple module |
4592307, |
Feb 28 1985 |
RCA Corporation |
Vapor phase deposition apparatus |
4692556, |
Jun 29 1984 |
ELECTRO-NITE CO , A DE CORP ; MRC ACQUISTION CORP , NO 3, A CORP OF DE |
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