Wafer holder for ion implantation

Abstract

Description

FIG. 1 is a front view of a wafer holder for ion implantation showing my new design;

FIG. 2 is a rear view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a left side view thereof;

FIG. 7 is a perspective view thereof; and,

FIG. 8 is an enlarged cross sectional view taken along line 8-8 of FIG. 3 thereof.

The broken lines shown in the drawings represent portions of the wafer holder for ion implantation that form no part of the claimed design.

Claims

The ornamental design for a wafer holder for ion implantation, as shown and described.