FIG. 1 is a top persepective view of a multi-keyed spindle showing our new design;
FIG. 2 is right side view thereof; the left side view being a mirror image thereto;
FIG. 3 is front view thereof; the rear view being a mirror image thereto; and,
FIG. 4 is top plan view thereof.
The broken lines in the drawings are for illustrative purposes only and form no part of the claimed design.
| Patent |
Priority |
Assignee |
Title |
| 3731435, |
|
|
|
| 3845738, |
|
|
|
| 4165584, |
Jan 27 1977 |
ITT Corporation |
Apparatus for lapping or polishing materials |
| 4512113, |
Sep 23 1982 |
|
Workpiece holder for polishing operation |
| 4739589, |
Jul 12 1985 |
Siltronic AG |
Process and apparatus for abrasive machining of a wafer-like workpiece |
| 5191738, |
Jun 16 1989 |
Shin-Etsu Handotai Co., Ltd. |
Method of polishing semiconductor wafer |
| 5193316, |
Oct 29 1991 |
Texas Instruments Incorporated |
Semiconductor wafer polishing using a hydrostatic medium |
| 5377451, |
Feb 23 1993 |
MEMC Electronic Materials, Inc. |
Wafer polishing apparatus and method |
| 5422316, |
Mar 18 1994 |
MEMC Electronic Materials, Inc |
Semiconductor wafer polisher and method |
| 5573448, |
Aug 18 1993 |
Shin-Etsu Handotai Co., Ltd. |
Method of polishing wafers, a backing pad used therein, and method of making the backing pad |
| 5647789, |
Nov 01 1993 |
Fujikoshi Kakai Kogyo Kabushiki Kaisha |
Polishing machine and a method of polishing a work |
| 5674107, |
Apr 25 1995 |
AVAGO TECHNOLOGIES GENERAL IP SINGAPORE PTE LTD |
Diamond polishing method and apparatus employing oxygen-emitting medium |
| 5683518, |
Jan 21 1993 |
MOORE EPITAXIAL INC |
Rapid thermal processing apparatus for processing semiconductor wafers |
| 5788777, |
Mar 06 1997 |
Northrop Grumman Systems Corporation |
Susceptor for an epitaxial growth factor |
| 5840124, |
Jun 30 1997 |
EMCORE CORPORATION, A CORPORATION OF NEW JERSEY |
Wafer carrier with flexible wafer flat holder |
| 5865666, |
Aug 20 1997 |
Bell Semiconductor, LLC |
Apparatus and method for polish removing a precise amount of material from a wafer |
| 6080042, |
Oct 31 1997 |
Virginia Semiconductor, Inc. |
Flatness and throughput of single side polishing of wafers |
| 6241825, |
Apr 16 1999 |
CuTek Research Inc. |
Compliant wafer chuck |
| 6375749, |
Jul 14 1999 |
SEH America, Inc. |
Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth |
| 6454635, |
Aug 08 2000 |
SUNEDISON SEMICONDUCTOR LIMITED UEN201334164H |
Method and apparatus for a wafer carrier having an insert |
| 6500059, |
Dec 01 2000 |
Taiwan Semiconductor Manufacturing Company, Ltd |
Apparatus and method for mounting a wafer in a polishing machine |
| 6514424, |
May 11 2000 |
Siltronic AG |
Process for the double-side polishing of semiconductor wafers and carrier for carrying out the process |
| 6666948, |
Apr 23 2001 |
|
Silicon wafer polisher |
| 6709981, |
Aug 16 2000 |
GLOBALWAFERS CO , LTD |
Method and apparatus for processing a semiconductor wafer using novel final polishing method |
| 6733367, |
Apr 23 2001 |
|
Method and apparatus for polishing silicon wafers |
| 7008308, |
May 20 2003 |
SUNEDISON SEMICONDUCTOR LIMITED UEN201334164H |
Wafer carrier |
| 7169234, |
Jan 30 2004 |
ASM IP HOLDING B V |
Apparatus and methods for preventing rotational slippage between a vertical shaft and a support structure for a semiconductor wafer holder |
| 7235139, |
Oct 28 2003 |
Veeco Instruments INC |
Wafer carrier for growing GaN wafers |
| 7252737, |
Aug 09 2001 |
Applied Materials, Inc. |
Pedestal with integral shield |
| 8177993, |
Nov 05 2006 |
ALSEPHINA INNOVATIONS INC |
Apparatus and methods for cleaning and drying of wafers |
| 8182315, |
Mar 24 2008 |
|
Chemical mechanical polishing pad and dresser |
| 8328600, |
Mar 12 2010 |
|
Workpiece spindles supported floating abrasive platen |
| 8448289, |
Mar 24 2006 |
Robert Bosch GmbH |
Windscreen wiper drive arrangement |
| 20020011204, |
|
|
|
| 20030057089, |
|
|
|
| 20060090915, |
|
|
|
| 20090194026, |
|
|
|
| CN202492576, |
|
|
|
| D405430, |
Jan 31 1997 |
Tokyo Electron Limited |
Inner tube for use in a semiconductor wafer heat processing apparatus |
| D503385, |
Nov 28 2002 |
Kabushiki Kaisha Toshiba |
Optoelectronic converting connector plug for optical fibers |
| D564462, |
Dec 27 2005 |
Tokyo Electron Limited |
RF electrode for a process tube of semiconductor manufacturing apparatus |
| D633452, |
Aug 27 2009 |
Ebara Corporation |
Elastic membrane for semiconductor wafer polishing apparatus |
| D674759, |
Aug 19 2010 |
EPISTAR CORPORATION |
Wafer carrier |
| D675567, |
Aug 23 2011 |
Adamant Kogyo Co., Ltd. |
Ferrule for optical fiber |