Patent
   D712364
Priority
May 09 2012
Filed
May 09 2012
Issued
Sep 02 2014
Expiry
Sep 02 2028
Assg.orig
Entity
unknown
6
13
n/a
The ornamental design for an euv pod, as shown and described.

FIG. 1 is a perspective view of an EUV pod showing our new design;

FIG. 2 is a front view thereof;

FIG. 3 is a back view thereof;

FIG. 4 is a left side view thereof;

FIG. 5 is a right side view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

The broken line showing is for the purpose of illustrating portions of the article which form no part of the claimed design.

Lu, Pao-Yi, Ku, Chen-Wei, Lee, Cheng-Ju

Patent Priority Assignee Title
D732092, Mar 19 2014 Veeco Instruments INC Gas injection plate
D732093, Mar 19 2014 Veeco Instruments INC Gas tube assembly
D964948, Aug 02 2019 GUDENG PRECISION INDUSTRIAL CO., LTD. Upper cover for an ultraviolet light reticle transfer box
D964949, Aug 02 2019 GUDENG PRECISION INDUSTRIAL CO., LTD. Upper cover for an ultraviolet light reticle transfer box
D964950, Aug 02 2019 GUDENG PRECISION INDUSTRIAL CO., LTD. Base for an ultraviolet light reticle transfer box
D965543, Aug 02 2019 GUDENG PRECISION INDUSTRIAL CO., LTD. Base for an ultraviolet light reticle transfer box
Patent Priority Assignee Title
6646720, Sep 21 2001 Intel Corporation Euv reticle carrier with removable pellicle
7400383, Apr 03 2006 MORGAN STANLEY SENIOR FUNDING, INC Environmental control in a reticle SMIF pod
7420655, Dec 14 2004 MIRAIAL CO , LTD Reticle-carrying container
7477358, Sep 28 2004 Nikon Corporation EUV reticle handling system and method
7607543, Feb 27 2005 MORGAN STANLEY SENIOR FUNDING, INC Reticle pod with isolation system
7804583, Sep 28 2004 Nikon Corporation EUV reticle handling system and method
8220630, Jan 11 2011 Gudeng Precision Industrial Co, Ltd EUV pod with fastening structure
8403143, Aug 12 2010 Gudeng Precision Industrial Co, Ltd Reticle storing container
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D641720, Mar 26 2010 Advanced Micro Devices, INC Circuit package lid
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Executed onAssignorAssigneeConveyanceFrameReelDoc
May 09 2012GUDENG PRECISION INDUSTRIAL CO., LTD.(assignment on the face of the patent)
May 09 2012LU, PAO-YIGUDENG PRECISION INDUSTRIAL CO , LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0281810759 pdf
May 09 2012LEE, CHENG-JU GUDENG PRECISION INDUSTRIAL CO , LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0281810759 pdf
May 09 2012KU, CHEN-WEIGUDENG PRECISION INDUSTRIAL CO , LTDASSIGNMENT OF ASSIGNORS INTEREST SEE DOCUMENT FOR DETAILS 0281810759 pdf
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