Chamber of charged particle beam drawing apparatus

Abstract

Description

FIG. 1 is a top perspective view of a chamber of charged particle beam drawing apparatus showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a front view thereof;

FIG. 4 is a right side view thereof, the left side view being a mirror image;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is a cross-sectional view taken along a line 7-7 in FIG. 3; and,

FIG. 8 is a cross-sectional view taken along a line 8-8 in FIG. 3.

The dot-dash lines indicate the boundary between the claimed portion and unclaimed portion.

Claims

The ornamental design for a chamber of charged particle beam drawing apparatus, as shown and described.