Gas nozzle for substrate processing apparatus

Abstract

Description

FIG. 1 is a front, top and left side perspective view of a gas nozzle for substrate processing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof.

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2 thereof;

FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof; and,

FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 8.

The broken lines shown in the drawings represent portions of the gas nozzle for substrate processing apparatus that form no part of the claimed design.

Claims

We claim the ornamental design for a gas nozzle for substrate processing apparatus, as shown and described.