Seal member for semiconductor production apparatus

Abstract

Description

FIG. 1 is a perspective view of a seal member for semiconductor production apparatus, showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top view thereof;

FIG. 7 is a bottom view thereof;

FIG. 8 is a cross-sectional view thereof;

FIG. 9 is an enlarged cross-sectional view of a portion thereof; and,

FIG. 10 is an enlarged cross-sectional view of a portion thereof in a condition of use.

The broken lines shown in FIG. 10 are for the purposes of illustrating environmental structure and form no part of the claimed design.

Claims

The ornamental design for a seal member for semiconductor production apparatus, as shown and described.