Susceptor for use in production of a semiconductor

Abstract

Description

Fig. 1.1 is a Perspective view of a susceptor showing my new design;

Fig. 1.2 is a Front view of the susceptor of Fig. 1.1;

Fig. 1.3 is a Back view of the susceptor of Fig. 1.1;

Fig. 1.4 is a Left side view of the susceptor of Fig. 1.1;

Fig. 1.5 is a Right side view of the Susceptor of Fig. 1.1;

Fig. 1.6 is a Top yiew of the susceptor of Fig. 1.1;

Fig. 1.7 is a Bottom view of the susceptor of Fig. 1.1;

Fig. 1.8 is an Enlarged perspective view of the susceptor of Fig. 1.1;

Fig. 1.9 is an Enlarged view of the claimed portion of the susceptor of Fig. 1.1;

Fig. 1.10 is an End view of a pocket part of the susceptor of Fig. 1.1;

Fig. 1.11 is an End view of a pocket part of the susceptor of Fig. 1.1;

Fig. 1.12 is a Cross-sectional view ofthe susceptor of Fig. 1.1;

Fig. 1.13 is a Cross-sectional view of the susceptor of Fig. 1.1;

Fig. 1.14 is a Cross-sectional view of the susceptor of Fig. 1.1;

Fig. 1.15 is a Reference view of the susceptor of Fig. 1.1;

Fig. 1.16 is a Reference view showing the state of use of the susceptor of Fig. 1.1 with a wafer placed on a pocket part.

In the drawings, thin lines drawn on curved surfaces do not indicate any patterns, but indicate the shapes of stereoscopic surfaces; the broken lines in the figures are directed to environment and are for illustrative purposes only; the broken lines form no part of the claimed design; the chain lines depict only boundaries between the subject matter and the remaining parts of the claimed design.

Claims

The ornamental design for a susceptor for use in production of a semiconductor, as shown and described.