A lock in pinned photodiode photodetector includes a plurality of output ports which are sequentially enabled. Each time when the output port is enabled is considered to be a different bin of time. A specified pattern is sent, and the output bins are investigated to look for that pattern. The time when the pattern is received indicates the time of flight A CMOS active pixel image sensor includes a plurality of pinned photodiode photodetectors that use a common output transistor. In one configuration, the charge from two or more pinned photodiodes may be binned together and applied to the gate of an output transistor.

Patent
   RE44482
Priority
Aug 19 1998
Filed
Jan 05 2012
Issued
Sep 10 2013
Expiry
Aug 19 2019

TERM.DISCL.
Assg.orig
Entity
Large
1
58
all paid
0. 26. A CMOS active image sensor comprising:
a first pinned photodiode of a first pixel for accumulating charge therein wherein the first pinned photodiode of the first pixel occupies a first row of an array of photodiodes;
a first transistor for transferring charge from the first pinned photodiode directly to a first diffusion region;
a second pinned photodiode of a second pixel for accumulating charge therein wherein the second pinned photodiode of the second pixel occupies a second row, below the first row, of the array;
a second transistor for transferring charge from the second pinned photodiode directly to the first diffusion region;
a third pinned photodiode of a third pixel for accumlating charge therein wherein the third pinned photodiode of the third pixel occupies a third row, below the second row, of the array;
a third transistor for transferring charge from the third pinned photodiode directly to a second diffusion region, separate from the first diffusion region;
a fourth pinned photodiode of a fourth pixel that accumulates charge therein wherein the fourth pinned photodiode of the fourth pixel occupies a fourth row, below the third row, of the array;
a fourth transistor that transfers charge from the fourth pinned photodiode directly to the second diffusion region;
the first diffusion region configured to apply charge to a gate of a fifth transistor coupled between a supply voltage and an output; and
the second diffusion region configured to apply charge to the gate of the fifth transistor, wherein the fifth transistor is an in-pixel buffer transistors common to the first, second, third, and fourth pixels.
0. 1. A method, comprising:
accumulating photocarriers in each of a plurality of photocarrier integrators and successively enabling each of said plurality of photocarrier integrators to connect to a common photodiode, each of said photocarrier integrators connecting to said common photodiode through a respective photodiode output port, said plurality of photocarrier integrators accumulating photocarriers generated by said photodiode during different time periods from one another.
0. 2. A method as in claim 1, wherein said enabling comprises actuating a gate that is connected between each said photocarrier integrator and said photodiode.
0. 3. A method as in claim 2, further comprising, after said enabling, detecting a number of carriers accumulated in said photodiode during at least two of said time periods by detecting the number of photocarriers accumulated in at least two said photocarrier integrators.
0. 4. A method as an claim 2, wherein said photodiode is a pinned photodiode, and further comprising, after said enabling, detecting a number of carriers accumulated in said pinned photodiode during at least two of said time periods by decting the number of photocarriers accumulated in at least two said photocarrier integrators.
0. 5. A method as in claim 1, wherein there are four of said photocarrier integrators, and said successively enabling comprises using a first photocarrier integrator to accumulate photocarrier between times 0 and π/2, a second photocarrier integrator to accumulate photocarriers between times π/2 and π; a third photocarrier integrator to accumulate photocarriers between times π and 3π/2, and a fourth photocarrier integrator to accumulate photocarriers between times 3π/2 and 2π.
0. 6. A method as in claim 1, further comprising detecting a phase shift of light received by said photodiode by detecting accumulated charge in at least two photocarrier integrators.
0. 7. A method, comprising:
generating photocarriers in a photodiode within a pixel during a plurality of time periods;
accumulating photocarriers in each of a plurality of photocarrier integrators within said pixel such that each photocarrier integrator accumulates photocarriers generated during a time period different from a time period in which other photocarrier integrators accumulate photocarriers; and
sampling said photocarriers from said photocarrier integrators;
determining a range of an object using said sampled photocarriers.
0. 8. A method as in claim 7, further comprising controlling each of said photocarrier integrators to be connected to said photodiode during said different time period.
0. 9. A method as in claim 8, wherein said controlling comprises enabling a gate, said gate being connected to said photodiode and to one of said photocarrier integrators.
0. 10. A method as in claim 9, wherein there are four of said photocarrier integrators, and wherein said enabling comprises successively enabling a first photocarrier integrator to accumulate photocarriers between times 0 and π/2, a second photocarrier integrator to accumulate photocarriers between times π/2 and π; a third photocarrier integrator to accumulate photocarriers between times π and 3π/2, and a fourth photocarrier integrator to accumulate photocarriers between times 3π/2 and 2π.
0. 11. A method as in claim 7, wherein there are four of said photocarriers integrators, and said sampling comprises sampling photo carriers which are 90 degrees out of phase with one another.
0. 12. A method, comprising:
sampling a plurality of different samples of light in a photodiode, each of said plurality of different samples being 90 degrees out of phase with one another; and
successively gating photocarriers representing each of said different samples from said photodiode through a respective output port, each output port associated with a respective photocarrier integrator, such that each photocarrier integrator accumulates a different sample than other of said photocarrier integrators.
0. 13. A method as in claim 12, further comprising detecting a phase shift using said samples of light.
0. 14. A method as in claim 12, wherein there are four different gates connected to said photodiode each gating a different sample.
0. 15. A method as in claim 12, wherein there are four photocarrier integrators, and wherein said act of gating comprises successively enabling a first photocarrier integrator to accumulate photocarriers between times 0 and π/2, a second photocarrier integrator to accumulate photocarriers between times π/2 and π; a third photocarrier integrator to accumulate photocarriers between times π and 3π/2, and a fourth photocarrier integrator to accumulate photocarriers between times 3π/2 and 2π.
0. 16. A method of operating a range finding sensor, the method comprising;
providing a plurality of photodiodes, each photodiode having a first output port for switchably coupling each respective photodiode to a first photocarrier integrator in a same pixel as said photodiode and a second output port for switchably coupling each photodiode to a second photocarrier integrator in a same pixel as said photodiode;
generating first photocarriers in said photodiodes in response to light received during a first time period;
transferring said first photocarriers to respective first photocarrier integrators via said first output ports;
generating second photocarriers in said photodiodes in response to light received during a second time period; and
transferring said second photocarriers to respective second photocarrier integrators via said second output ports.
0. 17. The method of claim 16, further comprising outputting said first photocarriers from first photocarrier integrators and outputting said second photocarriers from second photocarrier integrators.
0. 18. The method of claim 17, wherein the act of outputting said first photocarriers comprises summing outputs of all of said first photocarrier integrators, and wherein the act of outputting said second photocarriers comprises summing outputs of all of said second photocarrier integrators.
0. 19. The method of claim 16, further comprising counting the amount of photocarriers in said first photocarriers integrator and counting the amount of said second photocarriers in said second photocarrier integrator.
0. 20. The method of claim 19, further comprising determining a range of an object using the results of said acts of counting.
0. 21. The method of claim 16, wherein said act of providing a plurality of photodiodes includes providing said plurality of photodiodes within a common pixel.
0. 22. The method of claim 16, wherein said act of transferring said first photocarriers comprises transferring said first photocarriers to respective first output drains by operating first gates connected to said photodiodes and said first output drains, and wherein said act of transferring said second photocarriers comprises transferring said second photocarriers to respective second output drains by operating second gates connected to said photodiodes and said second output drains.
0. 23. The method of claim 16, wherein each photodiode further has a third output port for switchably coupling each photodiode to a third photocarrier integrator in a same pixel as said photodiode and a fourth output port for switchably coupling each photodiode to a fourth photocarrier integrator in a same pixel as said photodiode, and further comprising:
generating third photocarriers in said photodiodes in response to light received during a third time period;
transferring said third photocarriers to respective third photocarrier integrators via said third output ports;
generating fourth photocarriers in said photodiodes in response to light received during a fourth time period; and
transferring said fourth photocarriers to respective fourth photocarrier integrators via said fourth output ports.
0. 24. The method of claim 23, further comprising outputting said first photocarriers from said first photocarrier integrators, outputting said second photocarriers from said second photocarrier integrators, outputting said third photocarriers from said third photocarrier integrators, and outputting said fourth photocarriers from said fourth photocarrier integrators.
0. 25. The method of claim 24, wherein the act of outputting said first photocarriers comprises summing outputs of all of said first photocarrier integrators, wherein the act of outputting said second photocarriers comprises summing outputs of all of said second photocarrier integrators, wherein the act of outputting said third photocarriers comprises summing outputs of all of said third photocarrier integrators, and wherein the act of outputting said fourth photocarriers comprises summing outputs of all of said fourth photocarrier integrators.
0. 27. The CMOS active image sensor of claim 26 wherein the first transistor and the second transistor are configured to be turned on during a same period of time during operation of the image sensor.
0. 28. The CMOS active image sensor of claim 27, wherein the third transistor and the fourth transistor are configured to be turned on during a same period of time during operation of the image sensor.
0. 29. The CMOS active image sensor of claim 26, wherein the first and second diffusion regions are reset via a single reset transistor.
0. 30. The CMOS active image sensor of claim 29 further comprising in-pixel selection transistors.
0. 31. The CMOS active image sensor of claim 26 further comprising in-pixel selection transistors.

5,471,505
where L1, L2, L3 and L4 are the amplititudes of the samples from the respective first, second, third and fourth integrators. These four phases are obtained from the four outputs of the photodiode.

The first pinned photodiode 100 is connected to an output drain 102 via gate 1, element 104. This receives the charge for the first bin. Similarly, gates 2, 3 and 4 are turned on to integrate/bin from the second, third and fourth periods.

It is important to obtain as much signal as possible from the photodiode. This can be done by using a large photodiode. However, it can take the electrons a relatively long time to escape from a large photodetector.

The present system divides the one larger photodiode into a number of smaller diodes, each with multiple output ports. FIG. 2 shows the system.

A number of subpixels are formed. Each includes a number of pinned photodiodes 200, each with four parts. Each of the corresponding ports are connected together in a way that allows summing the outputs of the photodiodes. For example, all the gate 1 control lines are connected together as shown. The outputs from all the port 1s are also summed, and output as a simple composite output. Similarly, ports 2, 3 and 4's are all summed.

FIG. 3 shows the circuit and driving waveforms for the system when used as a range finder. A pulse generator drives selection of the active output. Each time period is separately accumulated, and output. If a 40 MHZ pulse generator is used, 25 ns resolution can be obtained.

FIGS. 4A and 4B show representative pixel layouts. FIG. 4A shows a 6 by 6 square micron pixel layout while FIG. 4B shows an 8½ by 8½ micron pixel layout. In both Figures, four outputs are shown.

FIG. 5 shows a cross sectional potential diagram of an exemplary pinned photodiode.

Assuming the operation frequency of modulated light is 10 megahertz with a 25 nanosecond integration slot, the generator carrier has a time of flight within this limit. This resolution time constrains the size of the detector. In addition, the characteristic diffusion time in a semiconductor device is L2/D, where D is the diffusion coefficient. This time originates from the continuity equation and the diffusion equation, and defines how soon the steady state will be established in the area of size L. Hence, for a 10 cm square per second electron diffusion coefficient, the characteristic size of the pinned photodiode could be less than 5 microns.

Other embodiments are also contemplated to exist within this disclosure. For example, other numbers of output ports, e.g. 2-8, are possible. While this application describes using a pinned photodiode, similar operations could be carried out with other CMOS photodetectors, e.g., photodiodes and photogates.

Such modifications are intended to be encompassed within the following claims.

Fossum, Eric R., Berezin, Vladimir, Krymski, Alexander I.

Patent Priority Assignee Title
9077921, Mar 01 2012 Canon Kabushiki Kaisha Image pickup apparatus, image pickup system, driving method for image pickup apparatus, and driving method for image pickup system using two analog-to-digital conversions
Patent Priority Assignee Title
4809075, Oct 17 1986 HITACHI, LTD , A CORP OF JAPAN Solid-state imaging device having an amplifying means in the matrix arrangement of picture elements
4827345, Jul 17 1984 Canon Kabushiki Kaisha Image readout apparatus
5043568, Apr 11 1989 Hamamatsu Photonics K. K. Optical signal detector incorporating means for eluminating background light
5099694, May 19 1987 Canon Kabushiki Kaisha Vibration detecting apparatus
5148268, Apr 26 1991 Xerox Corporation Multiplexing arrangement for controlling data produced by a color images sensor array
5172249, May 31 1989 Canon Kabushiki Kaisha Photoelectric converting apparatus with improved switching to reduce sensor noises
5179565, Jun 07 1990 HAMAMATSU PHOTONICS K K Low noise pulsed light source utilizing laser diode and voltage detector device utilizing same low noise pulsed light source
5262871, Nov 13 1989 Innolux Corporation Multiple resolution image sensor
5471505, Oct 01 1993 Elsag International N.V. Method and apparatus for increasing the resolution of a digital to analog converted pulse width modulated signal
5497390, Jan 31 1992 Nippon Telegraph and Telephone Corporation Polarization mode switching semiconductor laser apparatus
5635705, Sep 11 1995 NYTELL SOFTWARE LLC Sensing and selecting observed events for signal processing
5691486, Jul 30 1996 Siemens Healthcare Diagnostics Inc Apparatus and methods for selecting a variable number of test sample aliquots to mix with respective reagents
5717199, Jan 26 1996 CID TECHNOLOGIES, INC Collective charge reading and injection in random access charge transfer devices
5739562, Aug 01 1995 Bell Semiconductor, LLC Combined photogate and photodiode active pixel image sensor
5781233, Mar 14 1996 Cirrus Logic, INC MOS FET camera chip and methods of manufacture and operation thereof
5790191, Mar 07 1996 OmniVision Technologies, Inc Method and apparatus for preamplification in a MOS imaging array
5880495, Jan 08 1998 OmniVision Technologies, Inc Active pixel with a pinned photodiode
5898168, Jun 12 1997 GLOBALFOUNDRIES Inc Image sensor pixel circuit
5904493, Apr 13 1995 OmniVision Technologies, Inc Active pixel sensor integrated with a pinned photodiode
5936986, Jul 30 1996 Siemens Healthcare Diagnostics Inc Methods and apparatus for driving a laser diode
5949483, Nov 16 1995 California Institute of Technology Active pixel sensor array with multiresolution readout
5955753, Aug 02 1995 Canon Kabushiki Kaisha Solid-state image pickup apparatus and image pickup apparatus
5970115, Nov 25 1997 VAREX IMAGING CORPORATION Multiple mode digital X-ray imaging system
5973311, Feb 12 1997 Imation Corp Pixel array with high and low resolution mode
5986510, Jan 09 1998 PERKINELMER HOLDINGS, INC Method and apparatus for amplifying input signals in one of multiple modes of resolution
6043478, Jun 25 1998 Industrial Technology Research Institute Active pixel sensor with shared readout structure
6084229, Mar 16 1998 DYNAMAX IMAGING, LLC Complimentary metal oxide semiconductor imaging device
6084259, Jun 29 1998 Intellectual Ventures II LLC Photodiode having charge transfer function and image sensor using the same
6100551, Apr 13 1995 OmniVision Technologies, Inc Active pixel sensor integrated with a pinned photodiode
6107655, Aug 15 1997 OmniVision Technologies, Inc Active pixel image sensor with shared amplifier read-out
6127697, Nov 14 1997 OmniVision Technologies, Inc CMOS image sensor
6160281, Feb 28 1997 OmniVision Technologies, Inc Active pixel sensor with inter-pixel function sharing
6233013, Oct 23 1997 Xerox Corporation Color readout system for an active pixel image sensor
6249618, Dec 18 1998 AMBIR TECHNOLOGY, INC Circuit architecture and method for switching sensor resolution
6252217, Dec 18 1997 Siemens Aktiengesellschaft Device for imaging radiation
6297070, Dec 20 1996 OmniVision Technologies, Inc Active pixel sensor integrated with a pinned photodiode
6377304, Feb 05 1998 Nikon Corporation Solid-state image-pickup devices exhibiting faster video-frame processing rates, and associated methods
6388243, Mar 01 1999 U S BANK NATIONAL ASSOCIATION, AS COLLATERAL AGENT Active pixel sensor with fully-depleted buried photoreceptor
6512546, Jul 17 1998 Analog Devices, Inc Image sensor using multiple array readout lines
6519371, Sep 30 1999 California Institute of Technology High-speed on-chip windowed centroiding using photodiode-based CMOS imager
6614479, Sep 29 1997 Sony Corporation Solid-state image pickup device in-layer lens with antireflection film with intermediate index of refraction
6657665, Dec 31 1998 OmniVision Technologies, Inc Active Pixel Sensor with wired floating diffusions and shared amplifier
6693670, Jul 29 1999 Vision - Sciences Inc Multi-photodetector unit cell
6731335, May 08 1998 Carl Zeiss AG CMOS image sensor having common outputting transistors and method for driving the same
6831690, Dec 07 1999 M-RED INC Electrical sensing apparatus and method utilizing an array of transducer elements
6977684, Apr 30 1998 Canon Kabushiki Kaisha Arrangement of circuits in pixels, each circuit shared by a plurality of pixels, in image sensing apparatus
7209173, Feb 17 1998 Aptina Imaging Corporation Methods of operating photodiode-type pixel and imager device
20020180875,
20050001283,
EP616464,
EP707417,
JP2000152086,
JP2001298177,
JP4004681,
JP4004682,
JP5207376,
RE41340, Aug 19 1998 Round Rock Research, LLC Pinned photodiode photodetector with common buffer transistor and binning capability
RE42292, Aug 19 1998 Round Rock Research, LLC Pinned photodiode photodetector with common pixel transistors and binning capability
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