A set of masks corresponds to an integrated circuit layout. The integrated circuit layout includes a first cell having a first transistor region and a second transistor region, and a second cell having a third transistor region and a fourth transistor region. The first cell and the second cell adjoin each other at side cell boundaries thereof, the first transistor region and the third transistor region are formed in a first continuous active region, and the second transistor region and the fourth transistor region are formed in a second continuous active region. The set of masks is formed based on the integrated circuit layout.
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0. 28. A device, the device comprising:
a first cell comprising a first active region and a first side boundary;
a second cell comprising a second active region and a second side boundary along the first side boundary;
a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;
a second gate strip in the second cell parallel to the second side boundary and overlying the second active region; and
a dummy gate strip parallel to and between the first gate strip and the second gate strip,
wherein the dummy gate strip is electrically continuous and overlies the first active region and the second active region.
0. 21. A device, the device comprising:
a first cell comprising a first transistor region and a second transistor region;
a second cell comprising a third transistor region and a fourth transistor region,
wherein
the first cell and the second cell adjoin each other at side cell boundaries thereof,
the first transistor region and the third transistor region are formed in a first continuous active region, and
the second transistor region and the fourth transistor region are formed in a second continuous active region; and
a middle gate strip electrically continuously extending from the first transistor region to the second transistor region, along a line at which the first cell adjoins the second cell.
9. A set of masks corresponding to an integrated circuit layout, the integrated circuit layout comprising:
a first cell comprising a first active region and a first side boundary;
a second cell comprising a second active region and a second side boundary along the first side boundary;
a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;
a second gate strip in the second cell parallel to the second side boundary and overlying the second active region; and
a dummy gate strip parallel to and between the first gate strip and the second gate strip,
wherein the dummy gate strip overlies one of the first active region or and the second active region, and the dummy gate strip is electrically continuous,
wherein the set of masks is formed based on the integrated circuit layout.
0. 34. A device, the device comprising:
a first cell comprising a first active region and a first side boundary;
a second cell comprising a second active region and a second side boundary along the first side boundary;
a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;
a second gate strip in the second cell parallel to the second side boundary and overlying the second active region;
a blank region abutting the first active region and the second active region;
a first dummy gate strip between the first gate strip and the first side boundary, and overlying the first active region and the blank region; and
a second dummy gate strip overlying the second active region and the blank region, wherein the second dummy gate strip is electrically continuous with the first dummy gate strip.
1. A set of masks corresponding to an integrated circuit layout, the integrated circuit layout comprising:
a first cell comprising a first transistor region and a second transistor region;
a second cell comprising a third transistor region and a fourth transistor region,
wherein
the first cell and the second cell adjoin each other at side cell boundaries thereof,
the first transistor region and the third transistor region are formed in a first continuous active region, and
the second transistor region and the fourth transistor region are formed in a second continuous active region; and
a middle gate strip electrically continuously extending from the first transistor region to the second transistor region, along a line at which the first cell adjoins the second cell,
wherein the set of masks is formed based on the integrated circuit layout.
15. A set of masks corresponding to an integrated circuit layout, the integrated circuit layout comprising:
a first cell comprising a first active region and a first side boundary;
a second cell comprising a second active region and a second side boundary along the first side boundary;
a first gate strip in the first cell parallel to the first side boundary and overlying the first active region;
a second gate strip in the second cell parallel to the second side boundary and overlying the second active region;
a blank region abutting the first active region and the second active region;
a first dummy gate strip in the first cell between the first gate strip and the first side boundary, and overlying the first active region and the blank region; and
a second dummy gate strip in the second cell between the second gate strip and the second side boundary, and overlying the second active region and the blank region, wherein the second dummy gate strip is electrically continuous with the first dummy gate strip,
wherein the set of masks is formed based on the integrated circuit layout.
2. The set of masks of
a first gate strip; and
upper and lower cell boundaries on opposite ends of the first cell,
wherein
the side cell boundaries are parallel to the first gate strip;
the first transistor region comprises a first PMOS transistor comprising a first portion of the first gate strip as a first gate, a first source region and a first drain region adjacent to the first gate, and
the second transistor region comprises a first NMOS transistor comprising a second portion of the first gate strip as a second gate, and a second source region and a second drain region adjacent to the second gate.
3. The set of masks of
a second gate strip parallel to the first gate strip; and
upper and lower cell boundaries on opposite sides of the second cell,
wherein
the third transistor region comprises a second PMOS transistor comprising a first portion of the second gate strip as a third gate, and a third source region and a third drain region adjacent to the third gate, and
the fourth transistor region comprises a second NMOS transistor comprising a second portion of the second gate strip as a fourth gate, and a fourth source region and a fourth drain region adjacent to the fourth gate.
4. The set of masks of
5. The set of masks of
a first power supply line extending across the upper cell boundaries of the first cell and the second cell; and
a second power supply line extending across the lower cell boundaries of the first cell and the second cell,
wherein the first power supply line is electrically coupled to the first source region and the third source region and the second power supply line is electrically coupled to the second source region and the fourth source region.
0. 6. The set of masks of
an upper portion of the middle gate strip, the first drain region, and the third source region form a parasitic transistor;
a lower portion of the middle gate strip, the second drain region, and the fourth source region form a parasitic transistor;
the upper portion of the middle gate strip is electrically coupled to the first power supply line; and
the lower portion of the middle gate strip is electrically coupled to the second power supply line.
7. The set of masks of
the first cell further comprises a first dummy gate strip along the side cell boundary opposite to the middle gate strip and the second cell further comprises a second dummy gate strip along the side cell boundary opposite to the middle gate strip.
8. The set of masks of
the first continuous active region extends to the side cell boundaries of the first cell, and the second continuous active region extends to the side cell boundaries of the second cell.
10. The set of masks of
the first cell further comprises a third active region,
the second cell further comprises a fourth active region,
when the dummy gate strip overlies the first active region, the dummy gate strip also overlies the third active region, and
when the dummy gate strip overlies the second active region, the dummy gate strip also overlies the fourth active region.
11. The set of masks of
12. The set of masks of
13. The set of masks of
14. The set of masks of
16. The set of masks of
17. The set of masks of
the first cell further comprises a third active region,
the second cell further comprises a fourth active region,
the first dummy gate strip overlies the third active region, and
the second dummy gate strip overlies the fourth active region.
18. The set of masks of
the first dummy gate strip overlies a first edge of the blank region, and
the first active region and the third active region abut the first edge of the blank region.
19. The set of masks of
the second dummy gate strip overlies a second edge of the blank region, and
the second active region and the fourth active region abut the second edge of the blank region.
20. The set of masks of
0. 22. The device of claim 21, wherein the first cell further comprises:
a first gate strip; and
upper and lower cell boundaries on opposite ends of the first cell,
wherein
the side cell boundaries are parallel to the first gate strip;
the first transistor region comprises a first PMOS transistor comprising a first portion of the first gate strip as a first gate, a first source region and a first drain region adjacent to the first gate, and
the second transistor region comprises a first NMOS transistor comprising a second portion of the first gate strip as a second gate, and a second source region and a second drain region adjacent to the second gate.
0. 23. The device of claim 22, wherein the second cell further comprises:
a second gate strip parallel to the first gate strip; and
upper and lower cell boundaries on opposite sides of the second cell,
wherein
the third transistor region comprises a second PMOS transistor comprising a first portion of the second gate strip as a third gate, and a third source region and a third drain region adjacent to the third gate, and
the fourth transistor region comprises a second NMOS transistor comprising a second portion of the second gate strip as a fourth gate, and a fourth source region and a fourth drain region adjacent to the fourth gate.
0. 24. The device of claim 23, wherein the first gate strip and the second gate strip are active gate strips and the middle gate strip is a dummy gate strip.
0. 25. The device of claim 23, wherein the device further comprises:
a first power supply line extending across the upper cell boundaries of the first cell and the second cell; and
a second power supply line extending across the lower cell boundaries of the first cell and the second cell,
wherein the first power supply line is electrically coupled to the first source region and the third source region and the second power supply line is electrically coupled to the second source region and the fourth source region.
0. 26. The device of claim 21, wherein:
the first cell further comprises a first dummy gate strip along the side cell boundary opposite to the middle gate strip and the second cell further comprises a second dummy gate strip along the side cell boundary opposite to the middle gate strip.
0. 27. The device of claim 21, wherein:
the first continuous active region extends to the side cell boundaries of the first cell, and
the second continuous active region extends to the side cell boundaries of the second cell.
0. 29. The device of claim 28, wherein:
the first cell further comprises a third active region,
the second cell further comprises a fourth active region.
0. 30. The device of claim 28, wherein the device further comprises a first power supply line along a direction perpendicular to the dummy gate strip, wherein the first active region comprises a first source region electrically coupled to the first power supply line.
0. 31. The device of claim 30, wherein the device further comprises a second power supply line along the direction perpendicular to the dummy gate strip, wherein the second active region comprises a second source region electrically coupled to the second power supply line.
0. 32. The device of claim 28, wherein the first power supply line is electrically coupled to the second power supply line.
0. 33. The device of claim 28, wherein the first power supply line is separate from the second power supply line.
0. 35. The device of claim 34, wherein the first dummy gate strip overlies a border between the first active region and the blank region.
0. 36. The device of claim 34, wherein:
the first cell further comprises a third active region,
the second cell further comprises a fourth active region.
0. 37. The device of claim 36, wherein:
the first dummy gate strip overlies a first edge of the blank region, and
the first active region and the third active region abut the first edge of the blank region.
0. 38. The device of claim 37, wherein:
the second dummy gate strip overlies a second edge of the blank region, and
the second active region and the fourth active region abut the second edge of the blank region.
0. 39. The device of claim 34, wherein the second side boundary is along the first side boundary in the blank region.
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The present application is a divisional of U.S. application Ser. No. 13/779,104, filed Feb. 27, 2013, which claims the priority of U.S. Provisional Application No. 61/747,751, filed Dec. 31, 2012, which are incorporated herein by reference in their entireties.
In the design of integrated circuits, particularly digital circuits, standard cells having fixed functions are widely used. Standard cells are typically pre-designed and saved in cell libraries. During an integrated circuit design process, the standard cells are retrieved from the cell libraries and placed into desired locations. Routing is then performed to connect the standard cells with each other and with other circuits on the chip.
Pre-defined design rules are followed when placing the standard cells into the desired locations. For example, spacing the active regions apart from the cell boundaries, so that when neighboring cells are abutted, the active regions of neighboring cells will not adjoin each other. The precaution associated with the active regions; however, incurs area penalties. The reserved space between the active regions and the cell boundaries results in a significant increase in the areas of the standard cells. In addition, because the active regions are spaced apart from the cell boundaries, when the standard cells are placed abutting each other, the active regions will not be joined, even if some of the active regions in the neighboring cells need to be electrically coupled. The spaced apart active regions have to be electrically connected using metal lines. The performance of the resulting device is worse than if the active regions are continuous.
Layout patterns and configurations can affect yield and design performance of the standard cells.
For a more complete understanding of the embodiments, and the advantages thereof, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
The making and using of the embodiments of the disclosure are discussed in detail below. It should be appreciated, however, that the embodiments provide many applicable inventive concepts that can be embodied in a wide variety of specific contexts. The specific embodiments discussed are merely illustrative, and do not limit the scope of the disclosure.
One or more embodiments of integrated circuit design layouts including standard cells are shown. Throughout the various views and embodiments, like reference numbers are used to designate like elements. In some embodiments, an integrated circuit is manufactured by performing one or more lithographic processes, growing processes, etching processes, or other processes based on a set of masks. In some embodiments, a set of masks is fabricated based on an integrated circuit design layout that depicts a plurality of features of the integrated circuit in various component layers.
In
The standard inverter cell 100 includes upper and lower boundaries 100a and 100b and left and right cell boundaries 100c and 100d as indicated by the dashed lines shown in
The second transistor region (e.g., an NMOS transistor 119) of the standard inverter cell 100 as shown in
A width “w” of standard inverter cell 100 is defined by a measurement from left to right boundaries 100c and 100d. The cell width is also referred to as the cell pitch. A length of standard inverter cell 100 is defined by the measurement from upper to lower boundaries 100a and 100b. In one or more embodiments, edges of active regions 114 and 120 are spaced apart from the right and left boundaries 100c and 100d by a distance a as shown in
In
Further, in one or more embodiments, the active regions 114 of the cells 100 and 130 are discrete (i.e., spaced apart from each other), and the active regions 120 of cells 100 and 130 are also discrete. In one or more embodiments, active regions of adjoining cells are continuous in
In
As shown in
The standard cell 150 includes the first gate strip 115a, the second gate strip 115b, and the third gate strip 115c are in parallel with each other. Upper and lower boundaries 150a and 150b are at opposite ends of the standard cell 150, and left and right side boundaries 150c and 150d are parallel to the plurality of gate strips 115a, 115b and 115c. The PMOS transistor 110 comprises a first portion of the first gate strip 115a as a first gate G1 and a first portion of the second gate strip 115b as a second gate G2.
The PMOS transistor 110 further includes the extended active region 152 (as indicated by dimensions X3 by Y5) including a first source region 114a and a first drain region 114b at opposite sides of the first gate G1, and the first drain region 114b and a second source region 114c at opposite sides of the second gate G2. The active region 152 is extended by two gate pitches (i.e., one gate pitch on each side). The use of an extended active region allows the metal (M0) poly to be positioned in the active OD region and therefore there is no degradation regarding the device size.
Standard cell 150 further includes a NMOS transistor 119 including a second portion of the first gate strip 115a as a third gate G3 and a second portion of the second gate strip 115b as a fourth gate G4, the second extended active region 154 (as indicated by dimensions X3 by Y6) includes a third source region 120a opposite first source region 114a of the PMOS transistor 110 and adjacent to third gate G3, and a second drain region 120b opposite second source region 114c and adjacent to fourth gate G4.
First and second source regions 114a and 114c of PMOS transistor 110 are connected with VDD power supply line by metal connections (e.g., metal line 117 and contact plugs 118). Further, third source region 120a of NMOS transistor 119 is connected with VSS power supply line by a metal connection (e.g., metal line 127 and contact plug 128). In one or more embodiments, first gate strip 115a is an active gate strip and second gate strip 116 is a dummy gate strip. Further, according to one or more embodiments, gate strip 115d is a non-operative floating poly and gate strip 115c is an active gate strip for other devices (not shown).
In one or more embodiments, first drain region 114b of PMOS transistor 110 is electrically connected with second drain region 120b of NMOS transistor 119 by a metal connection.
Standard cell 160 further includes a third gate strip 115c parallel to first gate strip 115a and includes an upper portion as a fifth gate G5 and a lower portion as a sixth gate G6. First and second dummy source regions 164 and 165 corresponding to PMOS transistor 110 and NMOS transistor 119 are defined within the extension of the active regions 161 and 162. First and second dummy source regions 164 and 165 are disposed to the left of the third gate strip 115c and adjacent to a side boundary (e.g., the left side boundary 160c). VDD power supply line is electrically connected to first dummy source region 164 and VSS power supply line is electrically connected to second dummy source region 165 by metal connections. Use of first and second dummy source regions 164 and 165 at boundary 160c prevents the generation of parasitic capacitance, and protects the source region 114a and the LOD effect as a result of the extended active regions 161 and 162.
In one or more embodiments, third gate strip 115c is a dummy gate strip and is biased at VDD power supply line or the VSS power supply line.
In some embodiments, some or all layouts of standard cells for NOT, AND, OR, XOR, or XNOR gates, and/or the like are arranged in a manner that the source regions are positioned adjacent to the cell side boundaries, such as side boundaries 160c and 160d of cell 160. Accordingly, generation of parasitic transistors at the side boundaries 160c and 160d when abutting another cell is prevented.
In
In
Standard cell 180 further includes NMOS transistor 119 including a second portion of first gate strip 115a as a fourth gate G4, second extended active region 182 including a second source region 120a opposite first source region 114a and second source region 120a and second drain region 120b disposed at opposite sides of the fourth gate G4. A second portion of second gate strip 115b as a fifth gate G5, and a third dummy source region 186 and second source region 120a are disposed at opposite sides of the fifth gate G5, and a second portion of third gate strip 120c as a sixth gate G6, the second drain region 120b and a third drain region 120c are disposed at opposite sides of sixth gate G6. First dummy source region 184, second dummy source region 185 and first source region 114a are connected with VDD power supply line by metal connections, and third dummy source region 186, and second source region 120a are connected with the VSS power supply line by metal connections. As shown, first, second and third source regions 184, 185 and 186 are disposed along the side boundaries 180c and 180d of standard cell 180. Biasing is performed on the source side of the standard cell 180. The first, second and third drain regions 114b, 120b and 120c are connected together and act as an output of the inverter.
One or more embodiments include a set of masks corresponding to an integrated circuit layout. The integrated circuit layout comprises a first cell comprising a first transistor region and a second transistor region, and a second cell comprising a third transistor region and a fourth transistor region. The first cell and the second cell adjoin each other at side cell boundaries thereof, the first transistor region and the third transistor region are formed in a first continuous active region, and the second transistor region and the fourth transistor region are formed in a second continuous active region. The set of masks is formed based on the integrated circuit layout.
One or more embodiments include a set of masks corresponding to an integrated circuit layout. The integrated circuit layout comprises a first cell comprising a first active region and a first side boundary, and a second cell comprising a second active region and a second side boundary along the first side boundary. The integrated circuit layout further comprises a first gate strip in the first cell parallel to the first side boundary and overlying the first active region, a second gate strip in the second cell parallel to the second side boundary and overlying the second active region, and a dummy gate strip parallel to and between the first gate strip and the second gate strip, wherein the dummy gate strip overlies at least one of the first active region or the second active region. The set of masks is formed based on the integrated circuit layout.
One or more embodiments include a set of masks corresponding to an integrated circuit layout. The integrated circuit layout comprises a first cell comprising a first active region and a first side boundary, and a second cell comprising a second active region and a second side boundary along the first side boundary. The integrated circuit layout further comprises a first gate strip in the first cell parallel to the first side boundary and overlying the first active region, a second gate strip in the second cell parallel to the second side boundary and overlying the second active region, a blank region abutting the first active region and the second active region, a first dummy gate strip in the first cell between the first gate strip and the first side boundary, and overlying the first active region and the blank region, and a second dummy gate strip in the second cell between the second gate strip and the second side boundary, and overlying the second active region and the blank region. The set of masks is formed based on the integrated circuit layout.
Although the embodiments and their advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the embodiments as defined by the appended claims. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, and composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the disclosure. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps. In addition, each claim constitutes a separate embodiment, and the combination of various claims and embodiments are within the scope of the disclosure.
Lu, Lee-Chung, Tien, Li-Chun, Zhuang, Hui-Zhong, Wu, Chang-Yu
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